LD泵浦的Nd：GdVO4／Cr^4＋：YAG被动调Q激光器刘杰;贾玉磊;等
【期刊名称】《量子电子学报》
【年(卷),期】2002(19)6
【总页数】1页(P557-557)
【关键词】激光二极管;LD泵浦;Nd:GdVO4/Cr^4+:YAG;被动调Q;激光器
【作者】刘杰;贾玉磊;等
【作者单位】山东师范大学物理系现代光学实验室，济南250014
【正文语种】中文
【中图分类】TN248
【相关文献】
1.LD泵浦Cr^4＋：YAG被动调Q锁模Nd：Gd0.42Y0.58VO4激光器 [J], 姜其畅;苏艳丽
2.LD泵浦Nd∶LuVO_4/Cr^(4+)∶YAG被动调Q激光器 [J], 王正平;杜晨林;张怀金;阮双琛;胡大伟;王营;许心光;王继扬;邵宗书
3.LD泵浦Nd:Gd_(0.42)Y_(0.58)VO_4/Cr^(4+):YAG被动调Q锁模激光器 [J], 卓壮;姜其畅;苏艳丽;李涛;李健
4.LD端面泵浦Cr^(4+):YAG被动调Q的Nd:YLF激光器 [J], 王春;胡文涛;陈绍和;邓锡铭
5.LD泵浦Nd:YVO_4/Cr^(4+):YAG被动调Q锁模激光器的输出特性 [J], 刘辉兰;王红梅;杨海莲;杨延玲
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Superior Reliability&PerformanceA Full Line of Excimer LasersAs the world’s largest laser manufacturer and the leader in excimer technology,we manufacture and ship more excimer lasers than all other laser companies combined. We’re also the only laser company that makes virtually every other commercially available type of pulsed and continuous-wave ultraviolet laser.We have applications labs on three continents with each lab fully equipped for UV studies. We’ll also share our40-plus years of UV experience with you.So,whatever your UV laser application is,you’ll get the best solution when you work with Coherent.Cover:Excimer Lasers for Flat Panel Display Production Coherent offers the following advantages:•UV technology leader•Professional applications laboratory facilities worldwide •High power and high pulse energy•High repetition rate•Extremely compact light sources•OEM integration and custom performance parameters•Beam management systems•Superior customer-focused service and support2Superior Reliability&Performance••tech.sales@3Laser Selection Guide4Excimer Lasers4Applications Matrix 7Applications Labs Worldwide 9Excimer LasersExciStar XS 10Xantos XS12BraggStar Industrial Series 14IndyStar 18COMPexPro 20COMPexPro 150T 22LPXpro Series 24LAMBDA SX26On-Site Requirements32UV Optical Systems and Components34VarioLas Family 35GeoLasPro375X Optical Subsystems 39CrystaLas 40Components41Laser Measurement and Control Accessories44Contents•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz)ExciStar XS 11571200/5001935200/5002488200/5003514200/500Xantos XS 11571500193550024885003514500BraggStar Industrial Series 1BraggStar Industrial 19371000248101000BraggStar Industrial LN 193>0.5100024821000IndyStar 119381000248121000COMPexProCOMPexPro 501931005024815050COMPexPro 10019320020/10024840020/10030825020/10035120020/100COMPexPro 150T 1932505024845050COMPexPro 20019340010/5024870010/5030750010/5035130010/50Laser Selection GuideExcimer Lasers1Max.energy (mJ)is stabilizedenergy.4Superior Reliability &Performance • •tech.sales@Wavelength (nm)Max.Energy (mJ)Max.Repetition Rate (Hz)LPXpro SeriesLPFpro 20015750200LPXpro 210193450100248800100308500100351400100LPXpro 220193300200248550200308300200351200200LPXpro 305193600502481100503087005035140050LAMBDA SXLAMBDA SX C-Series 300Hz 3081050300LAMBDA SX K-Series 2481000300LAMBDA SX C-Series 600Hz308900600Laser Selection GuideExcimerLasers5•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Applications Matrix16This matrix shows only a sampling of many possible applications for our lasers.Please contact us regarding your application.Superior Reliability&Performance••tech.sales@7Applications MatrixExamples of Marking and Surface Treatment Applications•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-1170Applications Labs Worldwide8Applications MatrixMost source Superior Reliability &Performance • •tech.sales@9Coherent Japan YokohamaCoherent,Inc.Santa ClaraCoherent GmbH,G¨0ttingenApplications Labs WorldwideOur laser Please information,please go to page 50.Application Lab,Göttingen•Toll Free:(800)527-3786•Tel:(408)764-4983•Fax:(800)362-117010Excimer Lasers2.Key Features and Customer Benefits Key Features Customer Benefits Ultra-Compact•Low investment costs Lightweight Design•Flexible integrationAlmeta XS Tube Design •Extended tube lifetime•High pulse-to-pulse stability•Available at 157,193,248and 351nm wavelengths Corona Preionization •Homogeneous beam profile Solid-State Switch •Immediate operation•Maintenance-free operation Energy Monitor •Preset stabilized energy operation(optional)1.DescriptionExciStar™XS excimer lasers are tabletop systems with an ultra-compact design for easy installation and operation.Due to the integration of the new Almeta XS™tube design,they deliver excellent results in low pulse energy applications.Featuring soft corona preionization,the ExciStar XS provides a homogeneous energy distribution and high pulse-to-pulse stability.Solid-state switching provides immediate and main-tenance-free operation,and units are available with maxi-mum repetition rates of 200Hz and 500Hz.ExciStar XSExcimer Lasers3.Specifications 1Wavelength (nm)157193248351Max.Repetition Rate (Hz)200/500200/500200/500200/500Max.Pulse Energy (mJ)28126Stabilized Pulse Energy (mJ)1584Average Pulse Power 2<0.2/0.51/2.5 1.6/40.8/2Energy Stability 2(sigma,%)2/32/32/32/3Beam Dimensions (FWHM,V x H,mm 2)6x 36x 36x 36x 3Beam Divergence (FWHM,V x H,mrad 2)2x 12x 12x 12x 1Pulse Duration (ns)(typ.)55551All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate (200/500Hz).Superior Reliability &Performance • •tech.sales@5.Accessories Part No.Product Description Use part Energy monitornumber of matching laser type On requestElectromechanical shutter (available only in combination with the energy monitor)4.Weight/Utilities/Dimensions Weight 58kg/128lbs.Cooling Air-cooledElectrical230V,50or 60Hz,2000VAC,16A (recommended external fuse),single-phase Dimensions 649x 300x 400mm (L x W x H)(25.6x 11.8x 15.7in.)ExciStar XSExcimerLasersE x c i m e r L a s e r sSpecifications (continued)Wavelength (nm)157193248351Part No.EXS-200-157nm-XS EXS-200-193nm-XS EXS-200-248nm-XS EXS-200-351nm-XS (200Hz,without energy monitor)-w/o emon -w/o emon -w/o emon -w/o emon 111588111158791115884On request Part No.EXS-200-157nm-XS EXS-200-193nm-XS EXS-200-248nm-XS EXS-200-351nm-XS (200Hz,with energy monitor)1115882111588011158851157175Part No.EXS-500-157nm-XS EXS-500-193nm-XS EXS-500-248nm-XS EXS-500-351nm-XS (500Hz,without energy monitor)-w/o emon -w/o emon -w/o emon -w/o emon 112441111244131124415On requestPart No.EXS-500-157nm-XS EXS-500-193nm-XS EXS-500-248nm-XS EXS-500-351nm-XS (500Hz,with energy monitor)1124412112441411244161148001Excimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsGas Management•Equipped with a completegas management system,including premix gas cylinder•No additional external gascompartment necessary•Compliant with GermanTÜV safety standardsAlmeta XS Tube Design•Extended tube lifetime•High pulse-to-pulse stability•Available at157,193,248and351nm wavelengthsCorona Preionization•Homogeneous beam profileSolid-State Switch•Immediate operation•Maintenance-free operationEnergy Monitor•Preset stabilized energyoperation1.DescriptionXantos™XS excimer lasers are compact,fully integrated sys-tems that are very easy to install.For ease of use in the lab,theXantos XS housing contains a complete laser module based onthe ExciStar XS,plus a pre-mixed gas cylinder that includes gashandling and complies with all necessary gas safety standards.Xantos XS lasers are best suited for low pulse energy applica-tions,such as spectroscopy and precision material processing.Featuring soft corona preionization,the Xantos XS providesa homogeneous energy distribution and high pulse-to-pulsestability.Solid-state switching ensures immediate,mainte-nance-free operation.Xantos XS lasers are available formaximum repetition rates of500Hz,and standard versionsare equipped with an energy monitor,as well as an electro-mechanical shutter.Xantos XSExcimer Lasers3.Specifications1Wavelength(nm)157193248351Max.Repetition Rate(Hz)500500500500Max.Pulse Energy(mJ)28126Stabilized Pulse Energy(mJ)1584Average Pulse Power2(W)0.5 2.542Energy Stability2(sigma,%)3333Beam Dimensions(FWHM,V x H,mm2)6x36x36x36x3Beam Divergence(FWHM,V x H,mrad2)2x12x12x12x1Pulse Duration(typ.)55551All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.5.AccessoriesNo accessories available.4.Weight/Utilities/Dimensions Weight 170kg/374.8lbs.Cooling Air-cooledElectrical230V,50to 60Hz,2000VAC,16A (recommended external fuse),single-phaseDimensions 900x 400x 1045mm (L x W x H)(35.4x 15.8x 41.1in.)[including signal lamp]Xantos XSExcimerLasersE x c i m e r L a s e r sSpecifications (continued)Wavelength (nm)157193248351Part No.Xantos XS-500-Xantos XS-500-Xantos XS-500-Xantos XS-500-(always includes energy monitor 157nm 193nm 248nm 351nm and electromechanical shutter)1123361112336211233631123364Excimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsIndustrial Design•High uptime•Low maintenanceFutureTube•Metal/ceramic tube design forextended lifetimesCorona Preionization•Homogenous beam profileSolid-State Pulser•"Soft"discharge for better point-ing stability and energy stability•Especially suitable forFBG WritingLine-Narrowed•With line-narrowing moduleBraggStar Version for maximized temporalcoherenceAir-Cooled•Quick and easy integration(water-cooled optional)•Optional external heatexchanger for water cooling athigh repetition rates1.DescriptionThe BraggStar™Industrial Series is a versatile UV light sourcethat delivers excellent performance for all types of:•Phase Mask Fiber Bragg Grating(FBG)Writing•Interferometric FBG Writing•High Spatial Coherence Applications•Precision Interferometric Applications(typical for line-narrowed(LN)version)Two versions are available:BraggStar Industrial and BraggStarIndustrial LN.The BraggStar Industrial,which is available at193nm and248nm wavelengths,provides repetition rates upto1000Hz.It also features the FutureTube™design,coronapreionization and solid-state pulser technology.The"LN"ver-sion includes a line-narrowing module for lower bandwidthoperation.Overall,BraggStar lasers are compact,highly effec-tive systems that are easy to install and easy to operate.BraggStar Industrial SeriesExcimer Lasers3.Specifications1BraggStar Industrial BraggStar Industrial LN Wavelength(nm)193248193248Max.Repetition Rate(Hz)1000100010001000Max.Pulse Energy(mJ)111614Stabilized Pulse Energy(mJ)710>0.52Average Pulse Power2(W)710>0.52Energy Stability2(sigma,%)3363Beam Dimensions(FWHM,V x H,mm2)6x36x36x1.56x1.5Beam Divergence(FWHM,V x H,mrad2)2x12x12x12x1Pulse Duration(ns)(typ.)12151215BraggStar Industrial SeriesExcimerLasersE x c i m e r L a s e r s3.Specifications 1(continued)BraggStar IndustrialBraggStar Industrial LNT emporal Coherence (FWHM,µm)>30>120>3000>3000Spatial Coherence (FWHM,µm)>700>1500>300>600Spectral Bandwidth 3(FWHM)natural natural <15<15Wavelength (nm)193248193248Part No.BSI 1000-BSI 1000-BSI 1000-BSI 1000-(always includes energy monitor)193nm-FT 248nm-FT 193nm-FT-248nm-FT-line narrowed line narrowed 4-06-0022-0634-06-0018-064112441711216661All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.3Calculated using temporal coherence data.Excimer LasersBraggStar Industrial SeriesExcimer Lasers4.Weight/Utilities/DimensionsBraggStar Industrial BraggStar Industrial LN Weight135kg/298lbs.140kg/309lbs.Cooling Air-cooled,optionally Air-cooled,optionallywater-cooled by external water-cooled by externalheat exchanger heat exchanger Electrical230V,50or60Hz,2000VAC,230V,50or60Hz,2000VAC,16A(recommended external fuse),16A(recommended external fuse),single-phase or two phases single-phase or two phases Dimensions(L x W x H)978x380x837mm978x380x837mm(38.5x15.0x33.0in.)(38.5x15.0x33.0in.)5.AccessoriesPart No.Product Description3-15-0004-000External heat exchangerKB200V —19"version (for 50or 60Hz and 100,115,200,208and 230V),Cooling capacity 2.0kW,water-to-airBraggStar Industrial SeriesExcimerLasersE x c i m e r L a s e r sExcimer LasersIndyStarExcimer Lasers1.DescriptionThe IndyStar series represents the successor of the ExciStarS-Industrial.With the integrated new tube technology“Almeta”the IndyStar provides multiple lifetimes forconsumables like LDU(laser discharge unit)and optics aboutseveral billion pulses compared to the ExciStar S-Industrial.IndyStar excimer lasers are highly effective light sources,featuring a compact design and easy integration andoperation,delivering superior results in demandingapplications,such as photomask inspection(classificationand detection of mask defects)and micromachining forindustrial demands.Featuring corona preionization and solid state pulsertechnology the IndyStar series provides up to1000Hzrepetition rates and is available at193nm and248nmwavelengths.2.Key Features and Customer BenefitsKey Features Customer BenefitsIndustrial Design•High uptime•Low maintenanceCorona Preionization•Homogeneous beam profileSolid-State Pulser•"Soft"discharge for better pointingstability and energy stability•No warm-up timeAlmetaTube•All metal sealed tube design forextended lifetimes about severalbillion pulsesIntegrated•Preset stabilized energy operationEnergy MonitorAir-Cooled•Quick and easy integration(water-cooled•Optional external heat exchangeroptional)for water cooling at high repetitionrates3.Specifications1AlmetaTube ArF KrFWavelength(nm)193248Max.Repetition Rate(Hz)10001000Max.Pulse Energy(mJ)1216Stabilized Pulse Energy(mJ)812Average Pulse Power2(W)812Energy Stability2(sigma,%)<2<2Beam Dimensions(FWHM,V x H,mm2)6x36x3Beam Divergence(FWHM,V x H,mrad2)2x12x1Pulse Duration(typ.)881All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at stabilized energy and maximum repetition rate.IndyStarExcimer Lasers4.Weight/Utilities/DimensionsWeight135kg/298lbs.Cooling Air-cooled;optionally water-cooledby external heat exchangerElectrical230V,50/60Hz,2000VAC,16A(recommended external fuse),single-phase or two phasesDimensions978x380x837mm(L x W x H)(38.5x15.0x33.0in.)(including signal lamp)5.AccessoriesPart No.Description3-15-0004-000External heat exchanger KB200V—19"version(for50/60Hz and100,115,200,208and230V),cooling capacity2.0kW,water-to-air ExcimerLasers Specifications(continued)Wavelength193248Part No.IndyStar193IndyStar248(always includes energy monitor)11416611147638Excimer LasersCOMPexProExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsCeramic Preionization•Unmatched pulse-to-pulsestability•Increased pulse energy•Increased static gas lifetimeIntegrated Vacuum Pump•Compact standalone designand Halogen FilterIntegrated,Purgable•Preset stabilized energyEnergy Monitor operationAir-Cooled(up to20Hz),•Quick and easy integrationSingle-PhaseCompliances Met•RoHS1.DescriptionCOMPexPro™lasers are highly effective light sources,featuringa compact design and easy installation and operation.Theydeliver superior results in demanding applications,such assolid sampling systems(LA-ICP-MS),material research(PLD)and precise material processing.Featuring new ceramic preionization,the COMPexPro pro-vides multi-hundred millijoules output,plus unmatchedpulse-to-pulse stability.The COMPexPro also comes with animproved gas processor that extends both gas and opticslifetimes.3.Specifications1Wavelength COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro(nm)50102110201205 Maximum Pulse Energy2(mJ)193100200200400400248150400400700700308-250250500500351-200200300300 Maximum Average Power3(W)19344124152487730730308-516420351-412315 Maximum Repetition Rate(Hz)All50201001050Pulse Duration(FWHM)(ns)All2020202525Energy Stability(sigma,%)All11111Beam Dimensions(FWHM,V x H,mm2)All14x524x1024x1024x1024x10 Beam Divergence(FWHM,V x H,mrad2)All2x13x13x13x13x11All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Measured at10Hz.3Measured at maximum repetition rate.E x c i m e r L a s e r sCOMPexProExcimer Lasers4.Weight/Utilities/Dimensions WeightCOMPexPro 50/100270kg/PexPro 200325kg/716lbs.CoolingWater,2to 3l/min.(0.5to 0.8gal./min.),15to 20°CElectricalCOMPexPro 50/100230V,±10%,16A,50/60Hz switchable,1-phaseCOMPexPro 200115V,±10%,25A,50/60Hz switchable,1-phase OptionsUnstable resonator optics Dimensions (L x W x H)COMPexPro 50/1001282x 375x 793mm (51x 15x 31in.)COMPexPro 2001682x 375x 793mm (67x 15x 31in.)5.AccessoriesPart No.Product Description26082610Unstable resonator optics 193nm (COMPexPro 50and 100)26082710Unstable resonator optics 248nm (COMPexPro 50and 100)26082810Unstable resonator optics 308nm (COMPexPro 100)26082910Unstable resonator optics 351nm (COMPexPro 100)26083010Unstable resonator optics 193nm (COMPexPro 200)26083110Unstable resonator optics 248nm (COMPexPro 200)26083210Unstable resonator optics 308nm (COMPexPro 200)26083310Unstable resonator optics 351nm (COMPexPro 200)262456Unstable resonator adapter (COMPexPro 50,100and 200)1149339Beam aligner1132990Temperature stabilization moduleSpecifications (continued)WavelengthCOMPexPro COMPexPro COMPexPro COMPexPro COMPexPro (nm)50102110201205Part No.(F-Version)All11244091113836111383811151291115131Part No.(XeCl-Version)All-1113837111383911151301115132Excimer LasersCOMPexPro150TExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsCombination of•Magnetic assist for high lifetimeCOMPexPro110F and of electrical componentsCOMPexPro205F•NovaTube inside for optimizeddischarge conditions/minimizedwear of electrode material•Integrated electrostatic gaspurification minimizes gasconsumption•Ceramic preionization for highoutput stability•Delay stabilized high voltagecircuitsLine Narrowing Module•Tunable•Low bandwidth•Improved temporal coherenceIntegrated,Purgable•Preset stabilized energyEnergy Monitor operationCompliances Met•RoHS1.DescriptionThe COMPexPro™150T represents a special version of the verysuccessful COMPexPro PexPro150T is a combina-tion of two lasers(COMPexPro110and COMPexPro205),oper-ating in oscillator-amplifier-mode plus a tunable line narrow-ing module.It offers a unique combination of performancecharacteristics:narrow line width,high optical power density,low beam divergence and broad tunability.3.Specifications1COMPexPro150T ArF COMPexPro150T KrF Wavelength(nm)193248Maximum Pulse Energy2(mJ)250450Maximum Average Power3(W)1020Maximum Repetition Rate(Hz)5050Pulse Duration(FWHM)(ns)2525Energy Stability(sigma,%)11Beam Dimensions(FWHM,V x H,mm2)10x2410x24Beam Divergence(FWHM,V x H,mrad2)<0.2<0.2Bandwidth(FWHM,pm)<3<31All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.E x c i m e r L a s e r sCOMPexPro 150TExcimer Lasers4.Weight/Utilities/Dimensions Weight 750kg/1653lbs.CoolingWater,2to 10l/min.(0.5to 2.6gal./min.),5to 20°CElectrical400/208VAC ±10%,50/60Hz switchable,3-phasesOptionsUnstable resonator optics Dimensions (L x W x H)1960x 800x 1350mm (72x 31.5x 53.2in.)5.Accessories Part No.Product Description26082610Unstable resonator optics 193nm (COMPexPro 100)26082710Unstable resonator optics 248nm (COMPexPro 100)26083010Unstable resonator optics 193nm (COMPexPro 200)26083110Unstable resonator optics 248nm (COMPexPro 200)1149339Beam aligner1132990Temperature stabilization module3.SpecificationsCOMPexPro 150T ArFCOMPexPro 150T KrF Part No.(F-version)11567741156774Excimer LasersLPXproExcimer Lasers2.Key Features and Customer BenefitsKey Features Customer BenefitsAdaptable Resonator•Fit to application requirementsConfigurationFlexible Pulse Energy•Advanced process controlF-version•193,248,351nm operationC-version•308nm operationTrue Specs•Reliable long-term operationInternal Burst Generator•Programmable laser pulsesRugged Laser Frame•Unmatched beam stabilityLongest Gas Life•Low operation costs1.DescriptionLPXpro™is a family of RoHS compliant excimer lasers,offered at wavelengths of193,248,308and351nm,withoutput powers as high as90W at248nm.The LPFpro familyexpands wavelength range to vacuum UV with157nm.Thebeam quality,high pulse energy,short pulse length and highpeak power of LPXpro and LPFpro lasers combine to optimizeUV applications.These characteristics,plus their proven reliability and lowcost of ownership make LPXpro lasers suitable for a widerange of demanding,high precision processing tasks.Theseinclude drilling,pulsed laser deposition(PLD),laser directpatterning(LDP),laser lift off(LLO)and cleaning.3.Specifications1Wavelength LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro(nm)210220240305205220 Max.Pulse Energy2(mJ)157––––50401934503001606004002502488005503001100––3086500300–700––351400*********––Max.Rep.Rate(Hz)100200300/4005050200 Max.Average Power3(W)157–––– 2.5719335502425154024880908050––30864550–30––35135353015––Energy Stability4(1sigma)(%)112133 Pulse Duration5(ns)202020251515 Beam Dimensions5(V x H)(mm2)10x2410x2410x2010x2410x2410x24 Beam Divergence5(V x H)(mrad2)1x31x31x31x32x62x61All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2Single pulse up to10Hz.3Measured at maximum repetition rate.4Specified at248nm.5Typical,FWHM.LPXpro ExcimerLasers4.Weight/Utilities/DimensionsWeightLPFpro/LPXpro200400kg/880lbs.LPXpro305430kg/946lbs. Cooling Water,<_7l/min.(1.8gal./min.),15to20°C Electrical208or400VAC,50/60Hz3-phaseDimensions(L x W x H)Laser Head1966x800x474mm3(77x32x19in.3) Power Supply460x185x750mm3(18x7x30in.3)5.AccessoriesPart No.Product Description26083020Unstable resonator optics193nm(external resonator configuration)26083120Unstable resonator optics248nm(external resonator configuration)26083220Unstable resonator optics308nm(external resonator configuration)26083320Unstable resonator optics351nm(external resonator configuration)953187Unstable Resonator Output Coupler157nm(LPFpro)953186Unstable Resonator Rear Mirror157nm26083010260831102628561149339ExcimerLasers3.Specifications(continued)LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro210220240305205220 Part No.(F-Version,400V)112012511201291152299112013311201371120139 Part No.(F-Version,208V)112012611201301152300112013411201381120140 Part No.(C-Version,400V)11201271120131–1120135––Part No.(C-Version,208V)11201281120132–1120136––Excimer LasersLAMBDA SXExcimer Lasers2.Key Features+Customer BenefitsKey Features Customer BenefitsIndustrial Design•Rugged and reliable•Modular setupIndustrial Interfaces•Integrated industrial PC•Serial interface RS-232•Direct Control Port(DCP)foreasy integration intoworkstationsExternal Resonator•Excellent beam-pointing stability•SlideValves for tube windowmaintenanceSealed and Purged•Long optics lifetimes,suitable forBeam Path rugged industrial enviromentsHigh-Stability NovaTube•Outstanding energy stability—NovaPowerSwitch™significantly below1%(rms)High UV Laser Power•Lowest costs per Watt UVFlexible Pulse Energy•Advance process controlExternal Resonator•Unmatched beam stability1.DescriptionThe LAMBDA SX™industrial excimer laser series provideshighly stabilized UV power to the production floor.It isdesigned to deliver the best energy stability available,and also features a number of innovative technologies forunsurpassed performance and reliability.PowerLokProprietary PowerLok™technology brings every pulse of aburst train to the desired energy level.PowerLok employs aself-learning algorithm,utilizing a look-up table to smoothencycling bursts.TimeLokProprietary TimeLok™technology stabilizes the trigger-to-pulse delay of all-solid-state HV switch-driven excimer lasersand minimizes the time jitter.TimeLok also employs aself-learning algorithm,utilizing a look-up table for delaystabilization in any operation mode.Onboard Diagnostics and LoggingThe last10,000values of HV,energy and sigma are storedin a ring buffer and are continuously updated from pulse topulse.This enables detailed logging of laser operations.e-DiagnosticsProvides external online data acquisition and analysis(optional).Allows tracking and analysis of laser performanceexternally on a notebook PC.Supports predicted maintenanceand process parameter control.LAMBDA SX C-Series 300HzExcimerLasersE x c i m e r L a s e r s3.Specifications 1LAMBDA SX 300CLAMBDA SX 200C Wavelength (nm)308308Maximum Stabilized Pulse Energy (mJ)800to 1000550to 670Maximum Stabilized Average Power (W)300200Maximum Repetition Rate (Hz)300300Energy Stability (rms,%)<_2<_1Pulse Duration (FWHM)(ns)2922Beam Dimensions (FWHM,V x H,mm 2)235x 1335x 12Beam Divergence (FWHM,V x H,mrad)<_4.5x 1.5<_4.5x 1.5Beam-Pointing Stability (V x H)<_0.45x 0.15<_0.45x 0.15Dynamic Gas Lifetime>40>40(at max.stabilized energy)(mio.pulses)Part No.11214461139027LAMBDA SX 300C,400VAC,50/60HzLAMBDA SX 200C,400VAC,50Hz 1139028LAMBDA SX 200C,400VAC,60Hz 1All specifications are typical data and are subject to change without prior notice in order to provide the best product possible.2At 1.0m from beam exit.4.Weight/Utilities/Dimensions LAMBDA SX 300C LAMBDA SX 200C Weight 1400kg/3086lbs.1370kg/3020lbs.Cooling Water,12to 28l/min.Water,12to 28l/min.(3.2to 7.4gal./min.),10to 15°C (3.2to 7.4gal./min.),10to 15°C Electrical26kVA,3-phase,400VAC,18kVA,3-phase,400VAC,50or 60Hz,190to 480VAC 50or 60Hz,190to 480VAC (with optional transformer)(with optional transformer)Dimensions 2500x 850x 1925mm 2500x 850x 1925mm (L x W x H)(98.5x 33.3x 76in.)(98.5x 33.3x 76in.)Excimer LasersLAMBDA SX C-Superb300HzExcimer Lasers2.Key Features+Customer BenefitsKey Features Customer BenefitsBest Pulse Stability High annealing homogeneityFlexible Pulse Energy Advanced process&cost controlStable Beam Parameter High annealing yield1.DescriptionThe LAMBDA SX315C is a superb performance excimer lasermainly designed for Excimer Laser Annealing.The highquality demand in OLED display manufacturing requireshigh grade lowtemperature poly-Silicon(LTPS)which canbe created only with high performance excimer lasers.4.Weight/Utilities/DimensionsWeight1400kg/3086lbs.Cooling Water,12to28l/min.(3.2to7.4gal./min.),10to15°CElectrical26kVA,3-phase,400VAC50or60Hz,190to480VAC(with optional transformer)Dimensions(L x W x H)2500x850x1925mm(98.5x33.3x76in.)3.Specifications1LAMBDA SX315CWavelength(nm)308Maximum Stabilized800to1050Pulse Energy(mJ)Maximum Stabilized315Average Power(W)Maximum Repetition Rate(Hz)300Energy Stability(rms,%)<_1。
全固态266 nm紫外脉冲激光器研究张辰;高兰兰;邵志强【摘要】报道了利用激光二极管端面抽运Nd∶YAG晶体,通过Cr4+∶YAG晶体可饱和吸收被动调Q,KTP晶体腔内倍频及BBO晶体腔外四倍频,实现266 nm连续脉冲输出.通过优化激光器外谐振腔,提高腔外非线性变频转化效率.LD抽运功率为4.6W时,得到532 nm激光平均输出功率为154 mW,与腔外直接倍频相比,532 nm激光的平均功率提高了3倍,单脉冲能量和峰值功率提高了2倍,这有利于四倍频转化效率的提高.266 nm紫外激光平均输出功率为3 mW.【期刊名称】《激光与红外》【年(卷),期】2013(043)012【总页数】4页(P1355-1358)【关键词】全固态;266 nm;外谐振腔;倍频【作者】张辰;高兰兰;邵志强【作者单位】长春理工大学理学院,吉林长春130022;长春理工大学理学院,吉林长春130022;长春理工大学理学院,吉林长春130022【正文语种】中文【中图分类】TN2481 引言紫外波段激光器(UV)，由于波长短，能量更集中，分辨率高，在很多领域得到广泛应用［1］。
如工业零部件加工、微电子学、光谱分析、光数据存储、光盘控制、大气探测、光化学、光生物学、空间光通信及医疗等领域有着广泛的应用前景［2］。
特别是在工业加工领域，由于UV激光的短波长和高光子能量特点，其聚焦光斑可以更小，同时高能量UV光子直接破坏材料的分子键，相对于红外激光的“热熔”过程，UV激光加工时是“冷蚀”效应。
这使得加工的尺寸可以更小，加工的精度得到提高［3］。
以355 nm和266 nm为代表的全固态UV激光在工业加工领域已经得到了广泛应用。
2003年，日本三菱公司和大阪大学合作，报道利用200W绿光作为基频光，采用15 mm长的Ⅰ类相位匹配CLBO作为FOHG晶体对绿光倍频，得到了40 W的266 nm UV激光输出。
2006年，中国科学院物理研究所报道了采用CLBO晶体对平均功率120 W绿光激光器进行倍频，得到28.4 W的266 nm UV激光［4］。
