【AU2019200742A1】包括相同的显子显微术样品支撑件和方法与装置【专利】

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15 specimen.
In order to be illuminated by an electron beam, a specimen must be adequately supported in that beam. Often the electrons forming the electron beam have a high energy and it will be appreciated that bombarding an object, for example, a specimen 20 for examination, together with the support holding the specimen in position within the electron beam, may result in physical, chemical and/or electrical changes to the support and/or specimen. Such changes may impact results, including resolution of image, obtained through use of electron microscopy techniques.
10 BACKGROUND Electron microscopy techniques can be used to image a specimen. According to such techniques, a beam of electrons is used to "illuminate" a specimen. The presence of the specimen in the electron beam results in changes to that beam. The changes to the beam induced by the sample can be examined to create a magnified image of the
FIELD OF THE INVENTION 5 The present invention relates to an electron microscopy sample support; a method of
manufacturing such an electron microscopy sample support; a method of imaging using such an electron microscopy sample support and an apparatus operable to perform such a method of imaging.
(51) International Patent Classification(s) H01J 37/20 (2006.01)
(21)
Application No: 2019200742
(22)
43)
Publication Journal Date:
(62) Divisional of: 2014307715
2019.02.21 2019.02.21
(71) Applicant(s) United Kingdom Research and Innovation
Date of Filing: 2019.02.04
(72) Inventor(s) PASSMORE, Lori;RUSSO, Christopher
(74) Agent / Attorney O'Sullivans Patent and Trade Mark Attorneys Pty Ltd, PO Box 75, Wembley, WA, 6913, AU
Abstract An electron microscopy sample support comprising: a support member comprising a plurality of spaced support elements arranged to form a mesh; and a metal foil comprising a porous region; wherein the support member, support elements and metal foil all being formed from the same metal and said support member being configured to give structural stability to said metal foil, said porous region of said metal foil being configured to receive an electron microscopy sample and wherein said support further comprises a graphene layer in ohmic contact with said metal foil.
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ELECTRON MICROSCOPY SAMPLE SUPPORT AND METHODS AND APPARATUS COMPRISING SAME
(12) STANDARD PATENT APPLICATION (11) Application No. AU 2019200742 Al (19) AUSTRALIAN PATENT OFFICE
(54) Title ELECTRON MICROSCOPY SAMPLE SUPPORT AND METHODS AND APPARATUS COMPRISING SAME