第31卷第1期2018年1月传感技术学报
CＨINESE JOURNAＬOF SENSORS AND ACTUATORS Vol．31 No．1Jan．2018
项目来源:国家自然科学基金项目(11372210)
收稿日期:2017－0４－17 修改日期:2017－09－1４Analysis of the Influence of Driving Micro Beam Shape
on MEMS Gyroscope Coupling Error ?
HAO Shuying 1，2?，ZHANG Chenqing 1，2，QI Chengkun 1，2，LI Huijie 1，2，
ZHANG Kunpeng 1，2，CHEN Wei 1，2
(1.Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control ，School of Mechanical Engineering ，Tianjin University of Technology ，Tianjin 30038４，China ;2.National Demonstration Center for Experimental Mechanical and Electrical Engineering
Education (Tianjin University of Technology )，Tianjin 30038４，China )Abstract :Under the machining deviation，in order to study the effect of the microgyroscope drivingmicrobeam Shape Variation on orthogonal coupling Error，modal coupling and detection Signal．The finite element analysis model of the driving microbeam under the diagonal beam width error is established，the influence of the variation of the length of one end of U-beam on the orthogonal coupling error，modal coupling and detection signal of micro-gyroscope is provided by combining the method of elemental simulation and analytic calculation．It is found that when the beam length of one end of U-beam is about one half of the length of the other end，this kind of machining deviation will cause very serious orthogonal coupling error and modal coupling phenomenon，and it have great influence on the de-tection signal．When the U-beam is degraded into a straight beam or an equal length beam，the interference of the detection signal is very small，the orthogonal coupling error is zero，the modal coupling degree is the smallest，and the variation rule of the two is positively correlated．Increasing the frequency spacing between the driving mode and detecting mode of the single degree of freedom microgyroscope．Not only adding the bandwidth of microgyroscope，
but also reducing the influence of coupling．Key words :micro gyroscope;machining error;micro beam shape;orthogonal error;modal coupling EEACC :7230 doi :10.3969/j.issn.1004-1699.2018.01.009驱动微梁形状对微陀螺仪耦合误差的影响分析
?
郝淑英1，2?，张辰卿1，2，齐成坤1，2，李会杰1，2，张昆鹏1，2，陈 炜1，2
(1．天津市先进机电系统设计与智能控制重点实验室，天津30038４;2．机电工程国家级实验教学示范中心(天津理工大学)，天津30038４)摘 要:为研究微陀螺驱动微梁在加工误差下的微梁形状变化对正交耦合误差二模态耦合以及检测信号的影响，建立了驱动微梁在对角线梁宽误差下的有限元分析模型，采用有限元仿真分析和解析计算相结合的方法研究了U 型梁一端梁长的变化对微陀螺正交耦合误差二模态耦合以及检测信号的影响三研究发现，当U 型梁一端的梁长为另一端长度的二分之一左右时该类加工误差会引发非常严重的正交耦合误差和模态耦合现象，并对检测信号产生极大影响;当U 型梁退化为直梁或者为等长梁的时候，对检测信号的干扰很小二正交耦合误差为零二模态耦合程度最小，而且两者的变化规律呈现正相关三适当地加大单自由度微陀螺驱动模态和检测模态的频率差不仅可增加微陀螺的带宽还可减小耦合的影响三
关键词:微陀螺;加工误差;微梁形状;正交误差;模态耦合
中图分类号:V241.62 文献标识码:A 文章编号:1004-1699(2018)01-0048-06
微机械陀螺仪是一种利用哥氏效应来测量物体
转动角速率的惯性传感器，与传统的陀螺仪相比，具
有性价比高二尺寸小二重量轻以及动态性能好等特点，广泛应用于航空航天二军事二汽车工业和消费电万方数据