曝光机故障信息表(中文)

2 PLC battery low PLC电池不足
3 Data link error数据链接错误
4 Cycle time over循环周期溢出
10
Fence door close error栅栏关门错 ＊In operation, fence close sensor turned OFF.在运行，栅栏关闭传感器关闭 误 Mask holder temperature error 12 ＊Mask holder temperature out of setting range.Mask支架温度超越设定范围 Mask支架温度错误 Stage temperature error平台温度错 13 ＊Stage temperature out of setting range.平台温度超越设定范围 误 ＊Circulator emitting alarm or Flow late of cooling 14 Chiller unit error冷凝器单元异常 water exceeding limit.循环蒸发器故障或冷却水流速低 Spot air conditioner error曝光空 ＊Spot air conditioner not in steady operation or 16 调错误 emitting alarm.曝光空调不能稳定运行或故障灯亮 Vacuum source pressure error真空 20 ＊Vacuum source pressure sensor is OFF.真空源压力传感器 源压力异常 Supply conveyor preparatory ＊Preparatory transfer of supply conveyor failed to transfer substrate from 30 transfer error预传送搬运错误 entrance to POS.1.玻璃未能从预传送入口处POS.1搬运 ＊When fore transfer of supply conveyor is ON, POS.1 substrate sensor failed Supply conveyor fore transfer 40 to turn ON within given time.当输送机向前搬运状态为ON，玻璃在POS.1传感器未能规 error传送向前搬运错误 定时间内感应到。 ＊When fore transfer of supply conveyor is ON, POS.1 substrate sensor failed Supply conveyor back transfer 41 to turn OFF within given time.当输送机向后搬运状态为ON，玻璃在POS.1传感器未能 error传送向后搬运错误 规定时间内感应到。
＊When low-speed transfer of supply conveyor is ON,POS.1 substrate stop sensor failed to turn ON within given time.当输送机低速搬运状态为ON，玻璃在POS.1传感 器未能规定时间内感应到。 ＊When solenoid valve for supply substrate alignment is ON, SET sensor failed to turn OFF within given time.当玻璃对位的电磁阀为ON，传感器未能在特定时间内感 应到。 ＊When solenoid valve for supply substrate alignment is OFF, RESET sensor failed to turn OFF within given time.当玻璃对位的电磁阀为OFF，传感器未能在特定 时间内感应到OFF。 ＊In starting-up, shuttle unable to operate due to interlock.在启动时，搬运机 由于联锁无法运行， ＊When supplied substrate transferred from POS.1 to POS.2, POS.2 substrate sensor failed to turn ON.当玻璃从POS.1搬运到POS.2 ， POS.2基板传感器未能感应到 ＊When supplied discharged transferred from POS.2 to POS.3, POS.3 substrate sensor failed to turn ON.当玻璃从POS.2搬运到POS.3 ， POS.3基板传感器未能感应到 ＊When motor for shuttle up/down is ON, upward sensor failed to turn ON within given time.当搬运电机向上/向下为ON,向上传感器未能在规定时间内感应到。 ＊When motor for shuttle up/down is ON, downward sensor failed to turn ON within given time.当搬运电机向上/向下为ON,向下传感器未能在规定时间内感应到。 ＊After pre-alignment, out of stage sensor is ON. ⇒Verify substrate size setting.预对位后，超出平台传感器为ON。 ⇒检查基板尺寸设置。 ＊On discharging substrate, substrate sensor on stage is OFF.⇒Check if substrate stuck on mask.对履行基板，基板传感器是在舞台上赶走。 ⇒检查基板停留 在遮罩。 ＊When solenoid valve of lamp house shutter is ON, sensor for shutter close failed to turn OFF within given time. ＊When solenoid valve of lamp house shutter is OFF, sensor for shutter close failed to turn ON within given time. ＊When solenoid valve of substrate suction is ON, sensor for suction check failed to turn ON within given time. ＊When solenoid valve of substrate suction is OFF,sensor for suction check failed to turn OFF within given time. ＊When solenoid valve of substrate lift pin is ON,up sensor failed to turn ON within given time. ＊When solenoid valve of substrate lift pin is OFF,down sensor failed to turn ON within given time.
100 Shutter open error
ห้องสมุดไป่ตู้
101 Shutter close error 102 Substrate suction error 103 Substrate suction release error 104 Substrate lift pin up error 105 Substrate lift pin down error
108 Illumination quantity check error 109 Lamp house lighting error Discharge conveyor preparatory 200 transfer error 210 211 212 230 231 232
＊During exposure, light integrator check signal failed to turn ON. ＊In starting-up, LAMP-ON signal of lighting device turned OFF. ＊Preparatory transfer of discharge conveyor failed to transfer substrate from POS.3 to exit. ＊When transfer of discharge conveyor is ON, exit substrate sensor failed to Discharge conveyor transfer error turn OFF within given time. Discharge substrate alignment SET ＊When solenoid valve for discharge substrate alignment is ON, SET sensor error failed to turn OFF within given time. Discharge substrate alignment ＊When solenoid valve for discharge substrate alignment is OFF, RESET sensor RESET error failed to turn OFF within given time. Library slot No.setting error ＊Slot No. of library disaccorded with selected slot No. Multiple masks for transfer ＊Multiple mask sensors in mask holder & transfer unit are ON. available ＊Multiple mask sensors in mask holder & transfer unit are OFF. Discharged mask not available ＊Mask sensor for selected library slot is OFF. ＊When mask is taken out of mask table, mask POS.4 sensor for mask transfer arm is OFF. ＊When mask is delivered from transfer arm to conveyor unit, mask POS.5 sensor for mask delivery unit is OFF ＊After mask is transferred to mask holder, mask POS.5 sensor for mask delivery unit is ON. ＊When mask is transferred to mask holder, availability sensor for mask holder is OFF. ＊Mask case sensor at library layer to be supplied is OFF. ＊After mask is transferred from mask holder, mask POS.5 sensor for mask delivery unit is OFF. ＊When mask transfer arm received mask from mask transfer unit, mask POS.4 sensor for mask transfer arm is OFF. ＊Error in data of library slot No. to be discharged. ⇒Discharge mask manually. ＊Mask case sensor at library slot to be discharged is OFF. ＊Mask sensor at library slot to be discharged is ON.