纳米定位测量机操作测量结果_英文_

ANanopositioningandNanomeasuringMachine:Operation󰀁MeasuredResults󰀁J󰀁GERGerd,GR󰀂NWALDRainer,MANSKEEberhard,HAUSOTTETino,F 󰀁LRoland(TechnicalUniversityofIlmenau,PF100565,98684Ilmenau,Germany)Abstract:AttheInstituteofProcessMeasurementandSensorTechnologyofTechnicalUniversityofIlmenau,athree󰀁dimensionalnanopositioningandnanomeasuringmachine(NPM󰀁Machine)hasbeendeveloped.TheAbbeoffset󰀁freede󰀁signprovidesextra󰀁ordinaryaccuracy.Intheentirepositioningandmeasuringrangeof25mm󰀁25mm󰀁5mmtheinter󰀁ferometriclengthmeasurementsystemreachesaresolutionof0.1nmandanuncertaintyof5~10nm.Thearticlegivesbasicinformationonthisnanopositioningandmeasuringmachine,explainsitsmodeofoperationandrepresentsmeasure󰀁mentresults.Keywords:nanopositioning;nanomeasuring;laserinterferometer;controlsystem;long󰀁rangescanningprobetechniqueArticleID:1672󰀁6030(2004)02󰀁0081󰀁04纳米定位测量机操作󰀁测量结果J!GERGerd,GR NWALDRainer,MANSKEEberhard,HAUSOTTETino,F 󰀁LRoland(德国伊尔梅瑙工业大学,德国)摘󰀂要:伊尔梅瑙工业大学过程测量和传感技术研究所研制了三维纳米定位和测量机(NPMM).阿贝无偏设计使得该机器异常精确.在整个25mm󰀁25mm󰀁5mm的定位和测量域内,干涉测长系统分辨力可达0.1nm,不确定度达5~10nm.提供了纳米定位测量机的基本信息,介绍其操作模式,并给出了测量结果.关键词:纳米定位;纳米测量;激光干涉仪;控制系统;长距扫描探针技术󰀂󰀂Thebigadvancesmadeinthefieldsofmicroelec󰀁tronics,microtechnology,nanotechnologyandprecisionengineeringrequiretheexactmeasurementofeversmallerstructures.AccordingtotheInternationalTech󰀁nologyRoadmapforSemiconductorsof1999,theposi󰀁tioningrangestoberealizedalreadyintheyearsfrom2010to2014willcoveranareaof450mm󰀁450mm.Furthermore,itwillbenecessarytomeasureandalsotomanufacturenanostructureassmallasabout35nmwithsubnanometeraccuracy.SuchextremerequirementsarecloselylinkedwithtechnologiessuchaselectronrayorX󰀁raylithography.However,alsoNanoimprintingLithography,whichisaverypromisingnewapproachtothecreationofnanostructures,willplacegreatde󰀁mandsonmeasurementandpositioningtechnologies.Also,thefollowingtechniquesandtechnologies,suchasmaskandwaferinspection,circuittesting,scanningprobemicroscopy,geneticengineering,precisiontreat󰀁mentandassembly,developmentandanalysisofnewmaterial,free󰀁formsurfacecharacterization,and3D󰀁precisionmeasurementofsmallparts(microlenses,mi󰀁crobenches,precisionmouldsandmechanicalprecisionparts),arehighlydependentonefficientmeasuringandpositioningsystems[1,2].󰀂󰀂Foragreatnumberofscientificdisciplines,master󰀁ingthesenewtechnologiesandtechniquesmeanstore󰀁spondtoenormouschallenges.Includedareparticularlyalsothe3D󰀁techniquesformeasuringandpositioningob󰀁jectsandforsensingthem.Onlywhenthesetechniquescanmeethighestdemandsandwhentheyareoptimally󰀁Receiveddate:2004󰀁03󰀁04.󰀂󰀂󰀂Towhomcorrespondenceshouldbeaddressed.E󰀁mail:jaeger@mb.tu󰀁ilmenau.de.󰀂第2卷第2期2004年6月纳󰀂米󰀂技󰀂术󰀂与󰀂精󰀂密󰀂工󰀂程NanotechnologyandPrecisionEngineeringVol.2󰀂No.2Jun.2004󰀂adaptedtothepositioningandmeasuringtasks,there󰀁quirednewqualityofmeasurementcanbeachieved.Al󰀁thoughverypromisingapproachesareavailableinthescientificandtechnicalspheresnowadays,theaimscitedabovecanonlybereachedthroughintensiveresearchwork.󰀂󰀂Thereisnotonlyalackofnanomeasuringandposi󰀁tioningsystemsbutalsoof1D󰀁to3D󰀁mechanicallytac󰀁tileandopticalsensingsystemswithanresolutionsofananometrewhichareprimarilynecessaryformeasuringsmallpartswithsophisticatedgeometry.Thechallengesplacedonthenanomeasuringandpositioningtechniquesareadditionallytightenedupbytherequirementtobeinfullworkingorderalsoundervacuumconditions.󰀂󰀂AttheInstituteofProcessMeasurementandSen󰀁sorTechnologyofTechnicalUniversityofIlmenau,anNPMmachinewiththefollowingparametershasbeendevelopedandsuccessfullytested:positioningandmea󰀁suringrangeof25mm󰀁25mm󰀁5mm,resolutionof0.1nm,positioninguncertaintyof5~10nm.Theout󰀁standingprecisionhasbeenobtainedthroughtherealiza󰀁tionoftheAbbecomparatorprincipleinallthreemea󰀁suringaxesandapplyinganewconceptforcompensat󰀁ingsystematicerrorsresultingfrommechanicalguidesystems.Uptonow,eightNPMmachineshavebeenbuilt.TheyareoperatingsuccessfullyinseveralGermanandforeignresearchinstitutesofmetrology.1󰀂Designandoperation[5,6]󰀂󰀂ThebasicprincipleofthenanopositioningandnanomeasuringmachineisillustratedinFig.1.󰀂󰀂Animportantcomponentofthenanopositioningandnanomeasuringmachineisamirrorcornerconsistingofthreeplatesarrangedperpendicularlytooneanother.Theexternalfacesoftheplatesaremirrored.Themir󰀁rorcornerwasmeasuredagainstareference.Fromthedataobtained,functionalerrorswerederivedtocorrectthemeasuredvaluesbasedoncalculation.󰀂󰀂Theobjectispositionedonthebaseplateofthemir󰀁rorcornerandsensedbyastationarysystem(AFM,STM,focussensor,tactileprobes,nanotools).Theprobesareemployedaszerosystemsonly.Asthesens󰀁ingpointoftheprobewiththesurfaceofthemeasuredobjectisstationary,ameasurementfreefromAbbeer󰀁rorscanbeachievedinallthreeaxes.Forthis,threeplanemirrorinterferometerstypeSP500arefixedtoazerodurbase[3,4].Themeasuringbeamsfromtheinter󰀁ferometersarereflectedbytheexternalfacesofthemir󰀁rorcorner.Thevirtualextensionsofthemeasuringbeamshitthesurfaceofthemeasuredobjectatthesens󰀁ingpointoftheprobe.Asaresult,allAbbeerrorsof1storderwillbeavoidedinallmeasuringaxes.