华中科技大学硕士学位论文用于地磁测量的各向异性磁阻传感器研究姓名：王帅英申请学位级别：硕士专业：微电子学与固体电子学指导教师：杨晓非20080530华中科技大学硕士学位论文摘要地球磁场作为地球的基本资源之一，与人类生活、生产息息相关，它在地球科学、航空航天、资源探测、交通通讯、国防建设、地震预报等方面都有着重要的应用。
鉴于地磁场的重要应用价值，人们对地磁场的测量提出了更高的要求和希望。
选择或者设计一种符合地磁测量要求的弱磁传感器是问题的关键。
由于各向异性磁阻传感器具有高灵敏度、高可靠性、良好线性性、低功耗、易于微型化等优点，因而改进或者优化各向异性磁阻传感器的性能使其满足地磁测量的要求具有一定的现实意义。
本文以各向异性磁阻传感器（AMR sensor）作为研究对象，结合地磁测量的相关要求，对各向异性磁阻效应原理以及各向异性磁阻传感器的薄膜制备、器件结构设计、器件制备工艺等方面的内容进行了研究和探讨，主要内容包括以下几个方面：首先，在分析了各向异性磁阻效应原理的基础上，综述了各向异性磁阻材料的研究现状，并结合地磁场的特点，讨论了各向异性磁阻传感器的特性参数以及用于地磁测量的优势和挑战。
其次，在传感器材料方面，本文采用磁控溅射的方法制备了AMR薄膜，分别对膜层结构、薄膜厚度、退火温度等因素进行了研究。
利用NiFeCr或Al2O3作为辅助种子层、退火工艺对薄膜性能进行了优化，分析并讨论了材料本身和工艺方面对实验结果的影响。
实验制备出磁阻曲线光滑且峰值明显的磁阻材料，最大磁阻系数为1.5%。
最后，在器件结构方面，本文分别对惠斯通电桥、barber 电极、置位/复位电流带和偏置电流带等结构的设计思路进行了研究和探讨，然后利用L-edit设计了磁阻单元、惠斯通电桥和置位/复位电流带的掩膜版，讨论并梳理了器件制备的工艺流程。
关键词：地磁场各向异性磁阻传感器坡莫合金（Ni83Fe17）89Cr11 Al2O3华中科技大学硕士学位论文AbstractAs one of the important earth resources, the geomagnetic field is closely linked with the modern production and life. It is needed for many aspects such as the geosciences, aeronautics, astronautics, resource probing, transportation, national defense construction, earthquake prediction and so forth. However all the above mentioned are based on weak magnetic sensors to detect the geomagnetic field which changes with time and space. The anisotropic magnetoresistive sensor (AMR sensor) has the merits of high sensitivity, high reliability, good linearity, low power consumption, easy miniaturization and so on. Therefore, it is very important to improve or optimize the performances of the AMR sensor to satisfy the requirements of geomagnetic measurement. In regard to the requirements to detect the geomagnetic field, the principles, the material and the structures of the anisotropic magnetoresistive sensors were studied in the thesis. The main contents are as follows:Firstly, with the principle of the anisotropic magnetoresistance effect, current research progress of the anisotropic magnetoresistance material was introduced. Then based on the characteristics of geomagnetic field, the pros and cons of the application of AMR sensors in the geomagnetic field measurement were discussed.Secondly, the anisotropic magnetoresistance films (Permalloy films) were prepared with magnetron sputtering method. And their structure, thickness and annealing temperature were studied. The Permalloy films were optimized with NiFeCr or Al2O3 as assisted seed layers and annealing technique. Measurement showed that the magnetoresistance curve of the material was quite smooth, and obvious peaks were found. The best magnetoresistance coefficient (R/ R) of the material reached a maximum of 1.5%.In the last chapter, the structure of the AMR sensor, including the wheatstone bridge, barber pole and current strap was investigated, and the lithography masks were designed with L-edit, also the process for the devices preparation and lithography process were stated.Keywords: Geomagnetic field Anisotropic magnetoresistive sensorPermalloy film （Ni83Fe17）89Cr11Al2O3独创性声明本人声明所呈交的学位论文是我个人在导师指导下进行的研究工作及取得的研究成果。
