毕 业 论 文
课 题 名 称
压力传感器的温度补偿分析
分 院/专 业 机械工程学院/机电一体化技术
班 级 机电1051
学 号 1001043522
学 生 姓 名 兵
指导教师： 新春
2013年5月20日
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┊ 摘 要
压力传感器是工业实践中最为常用的一种传感器，而我们通常使用的压力传感器主要是利用压电效应制造而成的，这样的传感器也称为压电传感器。
我们知道，晶体是各向异性的，非晶体是各向同性的。某些晶体介质，当沿着一定方向受到机械力作用发生变形时，就产生了极化效应；当机械力撤掉之后，又会重新回到不带电的状态，也就是受到压力的时候，某些晶体可能产生出电的效应，这就是所谓的极化效应。科学家就是根据这个效应研制出了压力传感器。
但是随着工作环境温度的不断变化，会导致体管参数发生变化，将会引起不稳定的静态工作点，电路的动态参数不稳定和温度漂移（包括零点漂移和灵敏度漂移）。最简单的方法就是保持工作环境温度的恒定，当然，这种要永远达不到的。所以本文就针对温度漂移问题展开分析。对于不同的压力传感器采用不同的温度补偿方法，使其达到预期的效果。
关键词：压力传感器、温度、补偿
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┊ Abstract
The pressure sensor is the most commonly used one kind of sensor in industrial practice, and we
usually use the pressure sensor is mainly made of the use of piezoelectric effect, the sensor also known
as piezoelectric sensor.
As we know, the crystal is anisotropic, non crystal is isotropic. Some crystal medium along a
certain direction, when subjected to mechanical stress deformation occurs, produces the polarization
effect; when the mechanical force is removed, will return to the uncharged state, when it is under
pressure, can produce electricity effect of some crystals, which is called polarization effect. The scientist
is developed according to the effect of pressure sensor.
But with the continuous change of the environmental temperature, will cause the body tube
parameter changes, will cause the static working point is not stable, dynamic parameters of the circuit
unstable and temperature drift (including zero drift and sensitivity drift). The simplest method is to
maintain a constant temperature working environment, of course, this requirement is never reach. So
this article aims at the problem of temperature drift analysis.
The temperature compensation method is different with different pressure sensors, to achieve the
desired effect.
Keywords: pressure sensor, temperature, compensation
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┊ 目 录
第1章 绪论 ............................................................................................................................................... 1
1.1本课题研究的目的和意义 .......................................................................................................... 1
1.2 压力传感器的发展概况 ............................................................................................................ 2
1.2.1 压力传感器的发展历程 ................................................................................................. 2
1.2.2 压力传感器国外研究现状 ............................................................................................. 3
1.2.3 压力传感器的发展趋势 ................................................................................................. 4
1.3 传感器的常用术语 .................................................................................................................... 4
1.4 传感器的技术特点及环境影响 ................................................................................................ 7
第2章 压力传感器的原理 ....................................................................................................................... 9
2.1 压力传感器的基本原理 ............................................................................................................ 9
2.1.1 半导体的压阻效应 ......................................................................................................... 9
2.1.2 压力传感器的原理及结构 ........................................................................................... 10
2.1.3 压力传感器的特性指标 ................................................................................................11
2.2压力传感器温度漂移产生的机理 ............................................................................................ 14
第3章 压力传感器的温度补偿 ............................................................................................................. 16
3.1 温度补偿的技术指标 ............................................................................................................... 16
3.2 补偿方式简介........................................................................................................................... 17
3.2.1部补偿 ............................................................................................................................. 17
3.2.2外部补偿 ......................................................................................................................... 17
第4章 总结 ............................................................................................................................................. 26
辞 ........................................................................................................................................................... 27
参考文献 ................................................................................................................................................. 28
附录 ......................................................................................................................................................... 29
