高压差分探头P1300

ZP1500D 用户手册高压差分探头修订历史目录1.安全须知 (1)1.1一般性安全概要 (1)1.2警示标志 (1)1.2.1面板图标意义 (1)1.2.2测量类别介绍 (2)1.3测量类别 (3)1.4保养与清洁 (4)2.产品简介 (5)2.1产品应用 (5)2.2产品特色 (5)3.技术参数 (6)3.1技术指标 (6)3.2普通技术规格 (7)3.3配件 (8)4.快速入门 (9)4.1操作基础 (9)4.1.1面板说明 (9)4.1.2功能检测 (10)4.1.3操作步骤 (10)4.1.4注意事项 (11)5.常见问题 (14)5.1具体问题阐述 (14)5.1.1上电后面板指示灯全灭 (14)5.1.2调零输出值偏大或调零时间较长 (14)5.1.3测量波形不能稳定显示或误差明显 (14)6.性能验证 (15)6.1直流精度 (15)6.2方波响应 (15)6.3直流共模抑制比 (16)7.装箱单 (17)8.免责声明 (18)1.安全须知为保证您能正确安全地使用本仪器，请务必遵守以下注意事项。

如果未遵守本手册指定的方法操作本仪器，可能会损坏本仪器的保护功能。

因违反以下注意事项操作仪器所引起的损伤，广州致远电子有限公司不予以承担责任。

1.1 一般性安全概要了解下列安全性预防措施，以避免受伤，防止损坏本产品或本产品连接的任何产品。

使用推荐的电源适配器电源适配器为5V/2A USB输出，符合CB认证要求。

使用正常接地的示波器不建议探头信号输出端浮地，请将探头输出线缆连接到正常接地的示波器设备上。

查看所有终端额定值为避免起火和过大电流的冲击，请查看产品所有的额定值和标记。

产品使用前，请仔细阅读用户手册以了解额定值的详细信息。

请勿开盖操作请勿在仪器外壳打开时运行本产品。

避免电路外露电源接通后，请勿接触外露的接头和元件。

防止触电危险适配器必须插在墙壁上或在可视范围内的具有保护地的插排上，不可插在引线混乱的插排上，插排不可过流使用。

Differential pressure transmitterCP 114 – CP 115KEY POINTSMaterial: ABS V0 as per UL94Protection: IP65Display: LCD 10 digits. Size: 50 x 17 mmHeight of digits: Value: 10 mm; Unit: 5 mm Connections: safety Ø6.2 mmCable gland: for cables Ø8 mm maximum Weight: 143 g●Ranges from -500/+500 mbar to -2000/+2000 mbar (according to models)●Configurable intermediary ranges●0-10 V or 4-20 mA output, active, power supply 24 Vac/Vdc (3-4 wires) or 4-20 mA output, passive loop, power supply from 16 to 30 Vdc (2 wires)●ABS V0 housing, IP65, with or without display ●“¼ turn” system mounting with wall-mount plate ●Housing with simplified mounting systemFEA TURES OF THE HOUSINGTECHNICAL FEA TURESMeasurement units mbar, inWG, mmHG, PSI, mmH 2O, daPa, hPa, kPa Accuracy*±1.5% of reading ±3 mbar Response time 1/e (63%) 0.3 sResolution 1 mbar; 0.1 inWG; 1 mmHG; 1 mmH 2O; 1 hPa; 10 daPa; 0.1 kPa; 0.1 PSI Autozero Manual with push-button Type of fluidAir and neutral gasesOverpressure tolerated CP114: 1400 mbar; CP115: 4100 mbarConditions of use (°C/%RH/m)From 0 to +50°C. In non-condensing condition. From 0 to 2000 m.Storage temperatureFrom -10 to +70°CMeasuring range4: -500/+500 mabr 5: -2000/+2000 mbarPART NUMBERCP 11To order, just add the codes to complete the part number:Power supply / OutputA: Active – 24 Vac/Vdc – 0-10 V or 4-20 mA P: Passive – 16/30 Vdc – 4-20 mADisplayO: with display N: without displayExample: CP 114 – AOPressure transmitter measuring range -500/+500 mbar, 0-10 V or 4-20 mA active, with display*All the accuracies indicated in this technical datasheet were stated in laboratory conditions, and can be guaranteed for measurements carried out in the same conditions, or carried out with calibration compensation.46 mm90mm109m m056 222 38 18*********************SEN TRONIC AGTECHNICAL SPECIFICA TIONSCONNECTIONSPressure connectionsOutput / Supply -active sensor 0-10 V or 4-20 mA (alim. 24 Vac/Vdc ±10%), 3-4 wires -passive loop 4-20 mA (power supply 16/30 Vdc), 2 wires -common mode voltage <30 VAC-maximum load: 500 Ohms (4-20 mA) / minimum load: 1 K Ohms (0-10 V)Consumption 2 VA (0-10 V) or 0.6 VA (4-20 mA)European directives 2014/30/EU EMC; 2014/35/EU Low Voltage; 2011/65/EU RoHS II; 2012/19/EU WEEE Electrical connection Screw terminal block for cables from 0.05 to 2.5 mm2 or from 30 to 14 AWG Carried out according to the code of good practice Communication to PC USB-mini DIN cable EnvironmentAir and neutral gasesInside the front housingDIP SwitchsOutput terminalblockPower supply terminal blockLCC-S connectionFixed back housingRemovable front faceCable glandAutozeroELECTRICAL CONNECTIONS – as per NFC15-100 standardThis connection must be made by a qualified and trained technician. To make the connection, the transmitter must not be energized.For CP114/115 – AO models and CP114/115 – ANmodels with 0-10 V or 4-20 mA output – active, 4 wires:A-+76L N Power supply 24 Vac class IIorNL12+3VP +5IP4GND -7+6-Power supply 24 Vdc-VRegulator display orPLC/BMS passive typeor-+4 wiresTo make a 3-wire connection, before powering up the transmitter, please connect the output ground to the input ground. See drawing below.4 wires3 wires+Regulator display or PLC/BMS passive type-12+3VP +5IP4GND -7+6-3 wiresPower supply24 Vdc+5IP4GND -7L 6N +Power supply24 Vac class IILN A-+orVRegulator display or PLC/BMS passive type-+Regulator display or PLC/BMSpassive typeor056 222 38 18*********************SEN TRONIC AGSETTINGS AND USE OF THE TRANSMITTERTo perform an autozero, unplug the 2 pressure connections tubes and press the “Autozero” key.When an autozero has been performed, “On” green light turns off then turns on, and on transmitters equipped with a display, “autoZ” is displayed.➢Autozero➢ConfigurationTo configure the transmitter, it must not be energized. Then, you can make the settings required, with the DIP switches (as shown on thedrawing below). When the transmitter is configured, you can power it up.To configure the transmitter, unscrew the 4screws from the housing then open it. DIPswitches allowing the different settings arethen accessible.To set a measuring range, put the 1, 2 and 3 on-off switches as indicated in the table below.➢Measuring range settings – left DIP switchExample:●From 0 to 750 mmH2O, measuring range is 750 mmH2O.●From -500 mbar to +500 mbar, measuring range is 1000 mbar.●Measuring ranges of the CP114transmitter on the ±500 mbar range according to the measurement unit.●Measuring ranges of the CP115transmitter on the ±2000 mbar range according to the measurement unit.Type oftransmitterCP114CP115CP114CP115CP114CP115CP114CP115CP114CP115 mbar100500200750300100040015005002000inWG40.0200.080.0300.0120.0400.0160.0600.0200.00800.0 kPa10.050.020.075.030.0100.040.0150.050.0200.0 PSI 2.010.0 4.015.0 6.020.08.030.010.040.0 mmHg8040016060024080032012004001600mmH2O1000500020007500300010 000400015 000500020000 daPa 1.0 5.0 2.07.5 3.010.0 4.015.0 5.020.0 hPa100500200750300100040015005002000 12341234123412341234Combination 1Combination 2Combination 3Combination 4Combination 5Measuringranges settingStandard range orcentral 0 settingLeft DIP switch12341234Right DIP switchOutput settingUnits settingOn-off switch➢Standard range / central zero setting – left DIP switchTo set the type of measuring range, put the on-off switch 4 as indicated beside:Configurations Full scale Central zeroCombinationsExample 0-100 mbar: Full scale / 0Central zero(0 / 100 mbar)(-50 mbar / 0 / +50 mbar)For CP114/115 – PO models and CP114/115 – PN models with 4-20 mA output – passive:2 wires IP57+6-Power supply16-30 VdcVdcA-IP57+6-Vdc-2 wires+A2 wires............Display/regulator/PLCpassive typeDisplay/regulator/PLCactive type +-16-30 Vdcor+Off On Off OnF T a n g – C P 114-115 – 27/01/17 – R C S (24) P ér i g u e u x 349 282 095 N o n -c o n t r a c t u a l d o c u m e n t – W e r e s e r v e t h e r i g h t t o m o d i f y t h e c h a r a c t e r i s t i c s o f o u r p r o d u c t s w i t h o u t p r i o r n o t i c e .MAINTENANCEPlease avoid any aggressive solvent. Please protect the transmitter and its probes from any cleaning product containing formalin, that may be used for cleaning rooms or ducts.OPTIONS AND ACCESSORIES●KIAL-100A: Power supplyclass 2, 230 Vac input, 24 Vac output ●KIAL-100C: Power supply class 2, 230 Vac input, 24 Vdc output ●LCC-S: configuration software with USB cable●Connection tube ●Connection fittings ●Through-connections●Straight connections ●Spherical coupling nut➢Output setting – right DIP switch (CP114/115 – AO and CP114/115 – AN models)To set the type of analogue output, please put the on-off switch of the output as shown beside.➢Units setting – right DIP switchTo set a measurement unit, put the on-off switches 2, 3 and 4 of the units as shown in the table below.Please follow carefully the combinations beside with the DIP switch. If the combination is wrongly done, the following message will appear on the display of the transmitter “CONF ERROR”. In that case, you will have to unplug the transmitter, place the DIP switches correctly, and then power the transmitter up.ConfigurationsmbarinWGkPaPSImmHGmmH 2OdaPa hPaCombinationsConfigurations4-20 mA0-10 VCombinations1234123412341234123412341234123412341234MOUNTINGTo mount the transmitter, mount the ABS plate on the wall (drilling: Ø6 mm, screws and pins are supplied).Insert the transmitter on the fixing plate (see A on the drawing beside). Rotate the housing in clockwise direction until you hear a “click” which confirms that the transmitter is correctly installed.Once the transmitter is installed and powered up, please make an autozero to guarantee the correct working of the transmitter in any position.An easy and friendly configuration with the software!You can configure your own intermediary ranges.Caution : the minimum difference between the high range and the low range is 20.For example, it is possible to set the instrument from -20 to 0 mbar, from 0 to +20 mbar, or from -10 to +10 mbar...• To access the configuration via software:- Set the DIP switches as shown beside. Nota : the on-off switch 1 of the right DIP switch can be in any position (selection of the analogue output 0-10 V or 4-20 mA)- Connect the cable of the LCC-S to the connection of the transmitter.•Please refer to the user manual of the LCC 100 to make the configuration.CONFIGURA TION VIA LCC-S SOFTW ARE (option)1234Left DIP switch1234Right DIP switchThe configuration of the parameters can be done either with the DIP switch or via software (you can not combine both solutions).Configuration via PC7.5mm8mm4.5mm40mm50m m68m m75mm37.5mm23.75m m14mmAAOnly the accessories supplied with the device must be used.PRECAUTIONS FOR USEPlease always use the device in accordance with its intended use and within parameters described in the technical features in order not to compromise the protection ensured by the device.Once returned to KIMO, required waste collection will be assured in the respect of the environment in accordance with European guidelines relating to WEEE.。

高压差分探头用户手册ZP1000系列UserManual UM01010101 V2.00 Date: 2019/03/13类别内容关键词高压差分探头摘要本文主要介绍ZP1000系列高压差分探头的使用方法、主要技术指标等。

修订历史首先，非常感谢您购买本公司ZP1000系列高压差分探头。

本手册包括安全概述、产品简介、主要技术指标及使用方法等内容。

请在开始使用前仔细阅读本手册。

除非另外声明，本手册中出现的“产品”、“探头”均指ZP1000系列高压差分探头。

产品保证和保修服务：本公司保证ZP1000系列高压差分探头的性能完全达到本手册中所列的各项技术指标。

本公司对该产品所采用的原材料和生产工艺进行严格控制，确保产品稳定可靠，并承诺对产品本身提供一年的保修服务。

本保修服务仅限于产品在保修期内并在正常使用和管理情况下所发生的质量故障，不适用于被错误使用、无人管理、遭受事故或处于非正常环境中使用的情况。

仅作以上保证，不作任何其他明示的或默示的保证，其中包括适销性，对某种特定应用的合理性和适应性的保证。

不论在合同中、民事过失上或其它方面，本公司不对任何特殊的、偶然的或间接的损害负责。

前言 (ii)1.安全概述 (1)2.产品简介 (2)3.主要技术指标 (3)4.收货检查及使用前检查 (5)4.1收货检查 (5)4.2使用前检查 (5)5.探头主体 (6)6.探头附件 (7)7.使用方法 (8)7.1操作步骤： (8)7.2使用注意事项： (8)7.3简单故障现象及排除方法 (9)8.免责声明 (10)为了确保使用人员和本产品以及与本产品相连接设备的安全，请严格遵照下列安全操作规范：✧使用正确的电源适配器：必须使用本产品原配电源适配器，以免造成探头损坏。

✧掌握并采用正确的链接和断开方法：连接时先将探头输出端连接到测试仪器再连接探头输入：先连接好测试输入端辅助配件再连接输入电路。

断开时要先断开测试输入再断开探头输出端的连接。

书山有路勤为径；学海无涯苦作舟
JNJP1300高速自动检品机
normal >无锡江南印刷机械厂的JNJP-1300高速自动检品机适用于卷筒状的薄膜及80g/m2以下卷筒纸制品印刷、涂布后的缺点检查、异物检查，同时也可用于卷状材料的其它边位周径复卷，是印刷、涂布、复膜等行业必不可少的理想设备。

主要特点：
normal align=center>
normal >
normal >■采用具有国际先进水平的质量自动检查系统，整机技术达到国际先进水平。

normal >■电气控制系统采用PLC集中控制，由触摸屏进行人机对话。

根据不同的产品要求设置、显示工作参数。

normal >■收/放卷装料采用无轴气动锥顶式，装卸料方便效率高。

normal >■放卷部光电自动纠偏。

normal >■驱动由3台交流向量变频电机进行高精度张力控制，具有卷取及制动双种功能，能正、逆向工作。

normal >■缺点记忆停机功能，能自动回到有缺陷位置。

可选购自动贴标机进行贴标处理。

normal >■可通过触摸屏操作进行穿透、反射检查的切换。

normal >■断料检测停机功能。

专注下一代成长，为了孩子。

SIGLENT探头数据手册CN01ASIGLENT探头数据手册无源探头1X/10X 1X/10X 1X/10X 1X/10X10X 10X 10X 10XSIGLENT探头数据手册10X单端有源探头1.5GHz 1GHz 1GHz2.5GHzSIGLENT探头数据手册差分有源探头>2.5 GHzSIGLENT探头数据手册电流探头DC-200kHz DC-1MHz DC-300kHz DC-300kHzSIGLENT探头数据手册DC-50MHz DC-100MHz DC-12MHz DC-5MHzSIGLENT探头数据手册23℃ ,60%RH, 附近无载流线，被测导线穿过中心测试，负载阻抗1MΩSIGLENT探头数据手册高压差分探头70MHz 100MHz 70MHz 100MHzSIGLENT探头数据手册50MHz 50MHzSIGLENT探头数据手册高压探头DC-40MHzSIGLENT探头数据手册逻辑探头16 16 16SIGLENT探头数据手册近场探头300kHz to 3 GHz 300kHz to 3 GHz 300kHz to 3 GHz 300kHz to 3 GHzSIGLENT 探头数据手册关于鼎阳鼎阳科技（SIGLENT ）是通用电子测试测量仪器领域的行业领军企业。

同时，也是通用电子测试测量仪器行业第一家A 股上市公司。

2002年，鼎阳科技创始人开始专注于示波器研发，2005年成功研制出第一款数字示波器。

历经多年发展，鼎阳产品已扩展到数字示波器、手持示波表、函数/任意波形发生器、频谱分析仪、矢量网络分析仪、射频/微波信号源、台式万用表、直流电源、电子负载等基础测试测量仪器产品，是全球极少数能够同时研发、生产、销售数字示波器、信号发生器、频谱分析仪和矢量网络分析仪四大通用电子测试测量仪器主力产品的厂家之一，是这四大主力产品领域唯一一个国家级重点“小巨人”企业。

公司总部位于深圳，在美国克利夫兰和德国奥格斯堡成立了子公司，在成都成立了分公司，产品远销全球80多个国家和地区，SIGLENT 已经成为全球知名的测试测量仪器品牌。

Dedicated designed for High Voltage and High Current application• On wafer high power devic e measurement up to 10 kV/600 A• Gold plated c huc k surface for minimum contac t resis-tance and vacuum holes optimized for thin wafer hand-ling down to 50 µm• Taiko wafer chuck option• Dedicated high voltage and high current probes • Anti-arcing solutionsMPI ShieldEnvironment™ for Accurate Measurements • Designed for Advanced EMI / RFI / Light-Tight Shielding • fA low-leakage capabilities• Ready for temperature range -60 °C to 300 °CErgonomic Design and Safety• Easy wafer or single DUT loading from the front• Regulatory approved safety interlocked light curtain to protect users• Integrated active vibration isolation• Completely integrated prober c ontrol for faster, safer and c onvenient system and test operation• T he Safety Test Management (STM™) option to load/unload wafers at any chuck temperatures and auto dew point controlMPI TS3000-HP | 300 mm Automated Probe SystemFor accurate and reliable High Power measurementsFEATURES / BENEFITSSTAGE SPECIFICATIONSMax. movement speed 50 mm / secChuck Z Stage (Programmable)Travel range 30 mm (1.18 in)Resolution 0.2 µm Accuracy ± 2 µm Repeatability ± 1 µmZ stage drive Closed-loop high precision stepper motor GuiderPrecision ball bearingsPROBE PLATENMICROSCOPE MOVEMENTSTAGE SPECIFICATIONSChuck Theta Stage (Programmable)Travel range ± 5.0°Resolution 0.0001° (0.24 µm @ 300mm edge)Accuracy < 2.0 µm (measured at the edge of the 300 mm chuck)Repeatabilty < 1.0 µmTheta stage driveHigh resolution stepper motor with linear encoder feedback systemLarge Probe Platen supporting up to 8x DC or 4x DC + 4x RF MicroPositioners or standard 4.5” probe card holderXYZ Programmable XY - Travel range*50 x 50 mm / 300 x 300 mm Resolution 1 µm (0.04 mils)Repeatability ≤ 2 µm (0.08 mils)Accuracy ≤ 5 µm (0.2 mils)Z - Travel range 140 mmResolution 0.05 µm (0.002 mils)Repeatability ≤ 2 µm (0.08 mils)Accuracy≤ 4 µm (0.16 mils)*In case of ShielDEnvironment™ X x Y: 25 mm x 25 mmShielDEnvironment™MPI ShielDEnvironment™ is a high performance local environmental chamber providing excellent EMI- and light-tight shielded test environment for ultra-low noise, low capacitance measurements.MPI ShielDEnvironment™ allows up to 4-port RF or up to 8-ports DC/Kelvin or a combination of those configu-rations. MPI ShielDCap™ provides easy reconfiguration of measurement setup as well as EMI/noise shielding - which make great difference in simplifying day to day operations.ShielDEnvironment™ Electrical Specifications*EMI shielding> 30 dB (typical) @ 1 kHz to 1 MHzLight attenuation≥ 130 dBSpectral noise floor≤ -180 dBVrms/rtHz (≤ 1 MHz)System AC noise≤ 5 mVp-p (≤ 1 GHz)*Including 4 MicroPositioners.SAFETY MANAGEMENTLight CurtainLight Curtain Interloc k protec ts user from ac c identalhigh voltage shoc k by shutting down the instrumentthrough interlock system. The interlock system at reardoors provides safety, easy and convenient initial mea-surement set-up.WAFER LOADINGLoading or unloading of 150, 200 or 300 mm wafers or substrates is straight forward and intuitive. Special design of the chuck provides easy loading of a single IC of wafer fragments from the system front. SmartVacuum TM tech-nology automatically recognizes size of the wafer on single IC. It also protects the wafer from unexpected release of vacuum due to inexperienced operation when the wafer is located in the IceFreeEnvironment TM.Easy access to the AUX chucks serves for quick exchange of RF calibration substrates, probe cleaning and plana-rization accessories.Probe Hover Control™MPI Probe Hover Control PHC™ allows easy ma-nual c ontrol of probe c ontac t and separation to wafer. Separation distance can accurately control with micrometer feedback for probe to wafer/pad positioning. Ease of use guarantees the safest operation by minimizing error during critical set-up and probe change operations.THERMAL CHILLER INTEGRATIONPicture is courteously provided by ERS.Minimized CDA ConsumptionThe CDA consumption is reduc ed by as muc h as 50% by purging IceFreeEnvironment TM with the re-used cold air of the chiller. Additional automated valve enables purge by Nitrogen*.Additionally, recycled CDA cools the system probe platen and the probe card.*ERS patented technology.Thermal chuck touchscreen control display is an alternative way of interaction with the thermal system. Its ergo-nomic location supports an operator when keying commands and monitoring system status. The fully integrated intelligent hardware control panel is design for intuitive and safe system control and operation. All these signifi -cantly increase the speed and improve convenience of the system interaction work flow.The keyboard and mouse are placed on the sliding tray right below the system control panel. Both can control test instrumentation, if required.USB port is also in front of the system. It removes any hassles when exchanging data.INTEGRATED CONTROLSUnique and revolutionary multi-touch operation soft -ware SENTIO® controls MPI automated engineering pro-be systems. Its simple and intuitive operation c onc ept significantly saves operator training time. Scroll, Zoon, and Move functions mimic modern smart mobile device interface. Switching between applications is just a mat-ter of a simple finger swipe.SENTIO® makes everyone the system operation expert in just minutes.SOFTWARE SOLUTIONHigh Voltage Probes (HVP)Low leakage probes spec ially designed to withstand high voltage up to 10 kV (c oaxial) and 3 kV (triaxial). Choice of various connectors options such as Keysight Triax/UHV, Keithley Triax/UHV, SHV or Banana.High Current Probe (HCP)High performance probes specially designed for on wa-fer measurement of high c urrent up to 200 A (pulse). MPI multi-fingers high current probes are single piece consturction to efficiently handle high current and pro -vide low contact resistance.HIGH POWER PROBESHIGH POWER PROBES - SELECTION GUIDE[2]Keysight or Keithley [3]Banana: 100 A max, 1 ms max PW, 1% max PLC [4]BNC: 40 A max, 1 ms max PW, 1% Max PLCUltra High Power Probe (UHP)Designed for Ultra high voltage and c urrent on wafer measurement up to 10 kV/600 A (pulse). MPI replaceable multi-fingers probes tips and probe arms are design for low contact resistance for ultra-high current measure-ment and to support ultra-high voltage of up to 10 KV, without having to change probes for high voltage and current application.UL TRA HIGH POWER PROBESHigh current probe1 finger4 fingers6 fingers8 fingers12 fingersMax current*20 A 80 A120 A 160 A 250 A Max voltage10 KV 10 KV 10 KV 10 KV 10 KV Residual resistance (Typical)≤ 5 mΩ≤ 3 mΩ≤ 1 mΩ ≤ 1 mΩ≤ 1 mΩConnector options Banana Banana Banana Banana Banana Replaceable tip Yes Yes Yes Yes Yes Probe tip width 250 µm 250 µm 250 µm 250 µm 250 µm Probe pitch--650 µm650 µm650 µm650 µm*1 ms Max PW, 0.4% max PLCUL TRA HIGH POWER PROBES - SELECTION GUIDEDIMENSIONSUltra High Power probeOptional Anti-Arcing Probe CardIn addition, MPI is offering optional temperature control of the pressurized air in a range of 20 to 200 °C, which correlate direct with the chuck set temperature.High-voltage testing without arcing at higher tempera-tures are possible now.ANTI-ARCING SOLUTIONSOptional Anti-Arcing LiquidTray™Specially designed anti-arcing LiquidTray™ can be used for arcing suppressing by simply place on the high power chuck surface. Wafers can be safely placed inside the tray to submerge in the liquid for arcing free high voltage test.High Power Wafer ChucksConnectivity 110 kV Coaxial (Banana or SHV)Connectivity 2Kelvin Triax (f), 3 kV or 10 kV CoaxialDiameter310 mm with 2 integrated AUX areasMaterial Gold plated aluminum (flat with 100 µm holes)Chuck surface Planar with 0.5 mm diameter holes in centric sectionsVacuum holes sections (diameter)4, 24, 48, 72, 96, 120, 144, 168, 192, 216, 240, 264, 288 mm SmartVacuum™ distribution In front for single DUT 5x5 mm (4 holes) and 75 mm (3 in) In center for150, 200, 300 mm (6, 8, 12 in)Supported DUT sizes Single DUTs down to 5x5 mm size or wafers 100 mm (4 in) thru 300 mm(12 in)*Surface planarity≤± 5 µmRigidity< 15 µm / 10 N @edge*Single DUT testing requires higher vacuum conditions dependent upon testing application.NON-THERMAL HIGH POWER CHUCKSElectrical Specification (Triax)Chuck isolation> 30 TΩForce to guard> 30 TΩGuard to shield> 500 GΩForce to shield> 100 GΩMPI Non-thermal Triaxial High Power Chuc k with goldplated surface for low contact resistanceMPI 10 kV Triaxial Connector used for Kelvin chuck connectionHIGH POWER THERMAL CHUCKSSpecifications TC-300N Power TC-300NT Power TC-300NT ULN PowerCooling rates** (faster with -60 °C chiller)AC3 Mode25 to -10 °C< 11 min< 12 min< 18 min25 to -40 °C< 18 min< 20 min< 28 min25 to -60 °C< 36 min< 40 min< 66 min200 to 35 °C< 24 min< 27 min< 35 min200 to 20 °C< 28 min< 30 min< 40 min300 to 35 °C N/A N/A< 41 min300 to 20 °C N/A N/A< 54 minTURBO Mode25 to -10 °C< 11 min< 12 min< 18 min25 to -40 °C< 16 min< 18 min< 27 min25 to -60 °C< 34 min< 37 min< 65 min200 to 35 °C< 24 min< 27 min< 35 min200 to 20 °C< 28 min< 30 min< 40 min300 to 35 °C N/A N/A< 41 min300 to 20 °C N/A N/A< 54 minTYPICAL TRANSITION TIME102030405060708090100-100-50050100150200250300350time [min]t e m p e r a t u r e [°C ]MPI & ERS AirCool PRIME RF Chuck -60°C to +300°CMPI & ERS AirCool PRIME RF Chuck +20°C to +300°C5101520253035404550556065050100150200250300350time [min]t e m p e r a t u r e [°C ]102030405060708090100110-100-50050100150200250300350t e m p e r a t u r e [°C ]time [min]MPI & ERS AirCool PRIME Ultra Low Noise Chuck -60°C to +300°C510152025303540050100150200250300350t e m p e r a t u r e [°C ]time [min]MPI & ERS AirCool PRIME Ultra Low Noise Chuck +20°C to +300°CLeakage@ Voltage and:10 V 1.1 kV 10 V 3 kV 10 V 3 kV 10 kV @ -60 °C < 2 pA < 220 pA < 300 fA < 100 pA < 30 fA < 10 pA < 6 nA @ 25 °C < 1 pA < 110 pA < 150 fA < 50 pA < 15 fA < 5 pA < 6 nA @ 200 °C < 1 nA < 110 nA < 300 fA < 150 pA < 30 fA < 10 pA < 15 nA @ 300 °CN/AN/AN/AN/A< 50 fA < 15 pA < 40 nACapacitanceForce-to-Guard < 1600 pF < 600 pF < 600 pF ** Typical values, depends on chiller type and facility supply, please check MPI FPS for the certain chuck and system.300 mm PRIME High-Power Chuck -10°C to +300°CERS AirCool® Fusion*, Controller Integrated Chiller -40 °C / -60 °C ERS AirCool® Fusion*, ControllerIntegrated Chiller -10 °CERS High Power Thermal Chuck*ERS electronic GmbH patented solutionTS3000-HP can be configured with instrument connection package. The packages consists of necessary high voltage/high current probes and cabling accessories for optimal connection to the test instruments. Keysight B1505AHigh Power chuck shorting and floating plugs Keithley 2600-PCT-XB INSTRUMENT CONNECTION PACKAGESExample of Keysight B1505A and Keithley 2600-PCT-XB connection panels.REGULATORY COMPLIANCE WARRANTY• Warranty*: 12 months• Extended service contract: contact MPI Corporation for more information*See MPI Corporation‘s Terms and Conditions of Sale for more details.3rd party, TÜV tested according to • IEC 61010-1: 2010 + Am1:2016; EN 61010-1: 2010; IEC/EN 61010-2-010: 2014; IEC/EN 61010-2-081: 2015; EN ISO 12100: 2010; UL 61010-1: 2012/R: 2016-04; UL 61010-2-010: 2015; CAN/CSA-C22.2 No. 61010-1: 2012/U2: 2016-04; CAN/CSA-C22.2 No. 61010-2-010:2015and certified for CE and US/Canada (NRTL), SEMI S2 and S8.Copies of certificates are available on requestFACILITY REQUIREMENTSSYSTEM CONTROLLER SPECIFICATIONSSUPPORTED SOFTWARE PLATFORMSGeneral Probe SystemPower100-240 V AC nominal ; 50/60 Hz Vacuum-0.9 bar Compressed air 6.0 barCPUIntel® Core TM i7-7700, 3.6 GHz, 8M Cache, 14nm, 65W TDP, LGA1151(4C/8T)RAMDDR4 2400 MHz 16 GB x 164 bit operating systemWindows 10 Professional (English)Power460 W StorageSSD 500 GB LANOne internal and one external TCP/IP ports USB PortsInternal (on PC) x3, external x1GPIB interface OptionalDriversWaferPro / IC-CAP & EasyEXPERT from Keysight, BSIMPro & NoisePro from ProPlus, ACS from Keithley Emulation mode Available for various prober control software** Please contact your local support for more details.MPI Global PresenceDirect contact:Asiaregion:****************************EMEAregion:******************************Americaregion:********************************MPI global presence: for your local support, please find the right contact here:/ast/support/local-support-worldwide© 2022 Copyright MPI Corporation. All rights reserved.PHYSICAL DIMENSIONSTS3000-HPSystem Dimensions (W x D x H)1400 x 1300 x 1700 mm (55.1 x 51.2 x 66.9 in)Weight960 kg*Can vary depends on monitor/chiller position.。