美国AALBORG艾博格原装进口GFC系列气体质量流量控制器
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美国艾里卡特科技有限公司(Alicat Scientific Inc.) 于1991 年在美国成立,是全球杰出的质量流量和压力解决方案厂商,隶属于英国豪迈(Halma)集团环境与分析事业部,荣膺“年度最佳子公司奖”、“国际业务拓展增长奖”和“豪迈创新奖”。
Alicat产品采用层流差压式原理,拥有LFE专利技术,凭借航天级水准,长期支持美国航天局(NASA)、SpaceX火箭项目,并为科研及工业领域提供快捷、稳定的技术解决方案。
产品类型:气体或液体质量流量计、质量流量控制器、压力控制器、压力传感器。
客户行业:实验科研、环境保护、生物医药、过程控制、能源化工、半导体以及相关的公共事业。
应用领域:计量检测、泄漏测试、生物发酵、燃烧控制、真空镀膜、光伏、燃料电池等。
高压应用实时多元流量测量这款多功能MQ系列高压气体质量流量计可缩短检定或验证高压(160-320 psia)条件下运行流量所需时间,还能够同时实时测量质量流量、体积流量、管线压力和管线温度。
∙准确。
流量测量具有NIST可溯源精度,适用于低至满量程1/50th的各种气体,还可利用COMPOSER™气体编辑器自定义您自己的气体组成。
∙使用简单。
只要您打开流量计,流量计便能显示您所选工艺设备中的实时流量、压力和温度读数。
∙连接。
艾里卡特流量计默认采用数字与模拟两种通讯方式;订购时,可选择以太网/IP、EtherCAT、DeviceNet、Profibus或Modbus(RTU和TCP/IP)通讯,方便与您的数字工业或实验室网络整合。
更多产品信息请查看质量流量计、质量流量控制器、压力控制器、压力传感器。
性能∙可用量程:最大0-5000 slpm;最小0-10 sccm(欲了解常备量程,参见零件编号标签)∙可调比:50:1∙校准精度(NIST可溯源):±2%满量程∙可重复性:0.2%满量程∙标准控制器响应时间常数:5-10ms∙无需预热时间工作条件∙兼容气体:98(MQ系列)或130(MQS系列)种预置可选气体;利用COMPOSER气体编辑器自定义的其它混合气体∙工作温度:-10°C至+60°C∙最大内部压力(静态):305 psig(320 psia)∙最大差压(进口至出口):100 psid∙耐受压力:400 psig(415 psia)∙STP/NTP:用户可选(默认为25°C & 1 atm STP/0°C & 1 atm NTP)∙包装清单∙MQ系列高压气体质量流量计(电源需另行订购)∙NIST可溯源校准证书∙艾里卡特操作说明书配件(需另行订购)∙过程端口接头和过滤器∙电源∙通讯线缆和转换线缆∙BB3和BB9多点式集线盒∙Flow Vision软件型号变体∙腐蚀性气体型号(MQS系列,见下文)∙配有可充电电池的便携式型号(MBQ系列)∙另有:∙标准配置型号,最高160 psia(M系列)∙低压损型号,最多60 psia(MW系列)腐蚀性气体(MQS系列)MQ系列高压气体质量流量计中,还有适用于腐蚀性气体的“S”系列配置(即MS系列)可供选择。
日本Horiba公司的质量流量控制器(MFC)需求量预测作者:陈诚来源:《管理观察》2012年第04期摘要:回顾了国内外半导体产业的发展历程,分析了国内半导体市场制程中所需质量流量控制器的需求现状,提出了借鉴日本市场的需求预测方法对我国半导体、泛半导体及太阳能、LED市场上常用质量流量控制器(MFC)进行需求预测,预测Horiba公司2012年在我国MFC需求量为2500多台。
关键词:半导体太阳能产业质量流量控制器销售预测1.背景半导体产业是现代信息和电子工业的基础,从1947年在美国的贝尔实验室里科技史上第一支晶体管产品被开发,半导体产业已经经过了60多年的高速发展。
当今的半导体产业发展正愈来愈体现出自身的鲜明特色,这对我国带来了巨大挑战,但同时也为实现产业升级提供了极好的历史机遇。
气体质量流量控制器,即Mass Flow Controller(MFC),可以对气体质量流量做精密控制。
其作用是非常精确的控制进入腔体的载气和反应气体的单位时间内的流量,达成反应需要的混成比例,从而保证在晶圆表面生成需要的分布均衡和品质稳定的成分膜。
目前,我国蓬勃发展的半导体产业、太阳能电池片制造行业以及LED制造领域都对质量流量控制器有着巨大的使用需求。
而日本作为一个有几十年半导体产业发展史的国家,对市场定量的预测有其独到之处。
本文主要目的在于借鉴日本市场的销售预测方法对半导体产业中常用的MFC进行市场需求量预测。
2.日本Horiba公司简介株式会社堀场制作所(Horiba)是世界第六大测量测试设备的制造供应商,总部位于日本京都。
Horiba的气体质量流量控制器产品来自旗下Horiba/STEC子公司。
Horiba公司从最初进入中国市场时只有小于20%市场份额年销售量仅几百台质量流量控制器、销售量完全不及同类型欧美厂商(主要有美国的Unit和Tylan,艾默生集团旗下的Brooks,荷兰的Bronkhorst等)的MFC供应商,到2010年时已经年销售量占到国内半导体及太阳能设备装机MFC市场60%份额的举足轻重的制造商。
艾科国际贸易(海南)有限公司P R O D U C T D E S C R I P T I O N产品说明书气液分离膜接触器系列产品公司简介GOALPURE是高频科技设立的产品独立子品牌,专注于超纯水与循环再生解决方案中的关键工艺产品及化学药剂的研发、推广和应用,以高频科技全资子公司艾科国际贸易(海南)有限公司为主体进行市场推广和行业应用。
我们立足自身在半导体高端制造行业超纯水领域的工艺经验和技术能力,分别与全球知名卷式膜分离制造商、国内反渗透膜龙头企业,中国离子交换树脂行业副理事长单位、国内吸附分离材料的龙头企业,以及中国膜接触器技术的“黄埔军校”、中国中空纤维膜接触器技术起源的专业化企业携手同行,聚焦于半导体超纯水工艺中反渗透、离子交换、膜脱气三大关键技术,联合研发并定向生产GOALPURE系列反渗透膜元件、树脂系列产品和气液分离膜接触器,更加精准且持续满足半导体超纯水系统中高端工艺和技术演进的要求。
此外,我们与国家科学技术进步奖获得单位、多项国家/行业标准制定单位、自然资源部直属科研机构携手,专注于半导体水处理化学药剂使用的特殊行业属性,联合研发并定制半导体制程过程中必不可缺的水处理化学药剂及相关解决方案,不断应对半导体生产高速增长、特别是高阶制程带来的多样化、高挑战的应用需求。
高频科技(高频美特利环境科技(北京)有限公司)成立于1999年,是国家高新技术企业和中关村高新技术企业。
公司专注于芯片、显示等半导体高端制造业二十多年,拥有资深的专业技术团队,立足超纯工艺能力,不断融汇国内外先进的水处理技术,积累了丰富的行业经验,长期服务于中芯国际、德州仪器、康宁、有研、燕东、格科、积塔、通威等国内半导体领域的顶级客户,同时也为饮料、医药等轻工行业提供专业水服务,获得荣获不同行业客户的高度认可。
在快速变化和发展的新时代背景下,我们秉承专业敬业,正直担当,持续精进,成就彼此的企业价值观,稳稳扎根,不惧困难,探索前行,致力于持续优化并赋能行业领先的超纯水与循环再生解决方案,为客户创造洁净、可持续的水环境。
FLEXI-FLOW™ CompactMass Flow and Pressure Controller for GasesQuick Start GuideDoc. no.: 9.17.157 rev. DDate: 03-07-2023Complete documentationFor a comprehensive instruction manual, hook-up diagrams and other documentationabout the FLEXI-FLOW™ Compact, visit the Bronkhorst® product pages:/flexi-flow (or scan the QR code)Intended useThe FLEXI-FLOW™ Compact has been developed to measure and/or control mass flow rates and pressures of clean, dry, non-corrosive and non-toxic gases in a fluid system.The product is suited for general purpose indoor (dry) applications, like laboratories and machine enclosures, under the following constraints:Ambient temperature:0 … 50 °COperating pressure:17 bar (a) max.Power supply:24 VdcIngress protection IP40Responsibility for the use of the equipment regarding its intended use, suitability for the intended application, cleaning and compatibility of process media with the applied materials lies solely with the user.Safety notes·The product(s) described in this document may only be handled by qualified personnel who arefamiliar with combined fluid and electrical systems and who recognize the associated hazards(e.g. (high) fluid pressure, electric shock).·The user is responsible for taking the necessary safety measures to prevent damage and/or injurywhile working with the equipment and process media (as described in the associated MaterialSafety Data Sheets).·The equipment and its accessories must be used in accordance with their intended use,specifications and operating instructions.·Opening the equipment is not allowed and will void warranty and cancel the manufacturer'sliability.·If the product is defective or otherwise does not meet your requirements, please contact yourBronkhorst representative for assistance or advice.Product overview1.Power & signal connector (9-pin D-sub)2.Address selection switch3.Support interface (USB-C)4.Fluid inlet5.Status indication LED6.Control valve7.Fluid outlet8.Flow directionInstallation·Verify that the power supply has sufficient capacity to power the instrument.·Always turn off electrical power before connecting the instrument electrically.MountingIf applicable: install the process connections according to the manufacturer's e the mounting holes to attach the instrument to a stable underground.Electrical connectionVerify the connector for correct pin lay-out.Connect the power connector.ConfigurationAddress selection0: digital address setting.1-9: manual address setting (overrides the digital parameter).Digital configurationAfter installing Bronkhorst FlowSuite, establish connection through support interface (USB-C). Configure with Bronkhorst FlowSuite.Install Bronkhorst FlowSuitePowering up·Check leak tightness of fluid system before applying full operating pressure.·For reliable operation, make sure fluid stream is uncontaminated.1. Power up2. Pressurize fluid system3. Green indication LED: ready to use!Customer CareFor current information about Bronkhorst® and worldwide service addresses, please visit our website. For after-sales questions, help and guidance, our Customer Care department can be contacted by e-mail:*************************No matter the time zone, our experts within the Customer Care department are available to answer your request immediately or take appropriate further action. Our experts can be reached at:+31 859 02 18 66Service and returnsFor current information about Bronkhorst®, worldwide service addresses and return information, visit the Service & Support section on our website:/service-support (or scan the QR code)DisposalIf you are a customer within the European Union and wish to dispose of Bronkhorst®equipment bearing the symbol of a crossed out waste disposal bin, Bronkhorst can takecare of proper dismantling, recycling and/or reuse. Just return the item(s) following thereturn instructions on our website; please mention in the covering letter that you arereturning the product for disposal.In countries outside the EU, disposal of electrical and electronic equipment (EEE) may be subject to local or national directives and/or legislation. If applicable, consult local or national authorities to learn how to handle EEE properly in your area.DisclaimerThis document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability for errors, inaccuracies or absence of information. The material in this document merely serves information and illustration purposes; no rights can be derived from its contents. Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without prior notice. Device specifications and the contents of the package may deviate from what is stated in this document.Copyright© 2023 Bronkhorst High-Tech B.V. - All rights reservedBronkhorst High-Tech B.V. Nijverheidsstraat 1aNL-7261 AK Ruurlo, The Netherlands +31 573 45 88 00******************* 。
气体质量流量控制器 MFC 流量传感器产品名称气体质量流量控制器 MFC 流量传感器公司名称北京堀场汇博隆精密仪器有限公司价格8000.00/个规格参数建议零售价:¥8000.00加工定制:否品牌:HORIBAMETRON/堀场汇博隆公司地址北京市朝阳区北苑路40号23号、25号联系电话010-******** 130********产品详情提示:以下模板中任意文字及图片均可执行修改、复制、删除的操作,添加更多的图片和文字描述有助于增加产品对买家的吸引力。
产品介绍产品信息重量: 2.8kg毛重: 2.8kg 产地: 北京堀场汇博隆精密仪器有限公司流量规格流量规格: (100,150,200)l/min 调节阀类型:电磁调节阀 调节阀静止状态: 常闭 准确度: ± 1.0%f.s. 线性: ±0.5%f.s.重复性精度: ±0.2%f.s.响应时间:2s(t98)产品性能简介企业介绍北京堀场汇博隆精密仪器有限公司是一支由中方经营管理,中日双方共同协作的国际化团队,是由全球顶级热式质量流量控制器(mfc)制造商——horiba stec与中国知名热式质量流量控制器(mfc)制造商——北京汇博隆仪器有限公司共同出资成立,是以研发、生产、销售热式质量流量控制器为主业的高新技术企业。
公司经营层和整个国际化团队坚持"群策群力,持续发展,立足国内,走向世界"的企业总体发展方向。
力循"中外结合,品质为本"的经营理念,努力在人才、技术、生产、工艺、质量、市场、服务等各个方面引入和完善现代企业经营管理机制,以适应全球经济一体化的市场竞争,为加速我国相关产业的不断发展贡献一份力量。
企业证书购买须知1、货源说明厂家一手货源,公司生产周期短、产品品质有保证2、关于尺码与使用手册里尺寸一致,以收到实物为准3、关于颜色本店产品均为实物拍摄, 与实物平铺图最为接近,收到实物与图片颜色不一致的,可能与电脑显示器的色彩对比度和色温等因素有关4、关于客服如您的提问未能及时回复,可能是因为咨询量过大或系统故障5、关于售后6、关于发货合作快递 中通、德邦本产品的建议零售价是¥8000.00,加工定制是否,品牌是HORIBAMETRON/堀场汇博隆,型号是S4828,类型是质量流量计,测量范围是12(m3/h),精度等级是1.0%,适用介质是气体,工作压力是3(MPa ),工作温度是5~45(℃),产品属性是仪器仪表。
Breathing Star BSP-MT 1 - BSP-MT 8 Breathable Compressed AirBSP-MT1-8 breathing air purifiers aredesigned to treat compressed air reliablyand efficiently and deliver breathablequality compressed air that meets orexceeds the air purity requirementsshown in European Pharmacopia andother global breathing air specifications.BSP-MT OperationCompressed air entering the breathingair purifier is first passed through a pairof coalescing filters (1 x general purposefilter and 1 x high efficiency filter inseries) for the reduction of particulates,water aerosols and oil aerosols.The air then enters a heatless adsorptiondryer where water vapour and CarbonDioxide (CO2) are reduced.Next the air enters the activated carbonand catalyst stage for treatment ofoil vapour, odours and conversion ofCarbon Monoxide (CO) into CarbonDioxide (CO2).Finally the air exits through a dryparticulate filter.Advantages• Parker BSP-MT breathing air purifiers provide breathable quality compressed airto meet or exceed European & global breathing air standardsProduct Selection & Correction FactorsFor correct operation, compressed air dryers must be sized using for the maximum (summer) inlet temperature, maximum (summer) ambient temperature, minimum inlet pressure, required outlet dewpoint and maximum flow rate of the installation. To select a dryer, first calculate the MDC (Minimum Drying Capacity) using the formula below then select a dryer from the flow rate table above with a flow rate equal to or above the MDC.Minimum Drying Capacity = System Flow x CFIT x CFAT x CFMIPStated flows are for operation at 13 bar (g) (189 psi g), 35°C (95°F) with reference to 20°C, 1 bar (a), 0% relative water vapour pressure.For flows at other conditions, apply the correction factors shown below.Performance©2021 Parker Hannifin Corporation. All rights reserved.PISBSPMT1-8-00-ENEMEA Product Information Centre Free phone: 00 800 27 27 5374(from AT , BE, CH, CZ, DE, DK, EE, ES, FI, FR, IE, IL, IS, IT , LU, MT , NL, NO, PL, PT , RU, SE, SK, UK, ZA) US Product Information Centre Toll-free number: 1-800-27 27 537Europe, Middle East, AfricaAE – United Arab Emirates, DubaiTel: +971 4 8127100AT – Austria, St. Florian Tel: +43 (0)7224 66201 AZ – Azerbaijan, Baku Tel: +994 50 2233 458BE/NL/LU – Benelux, Hendrik Ido Ambacht Tel: +31 (0)541 585 000BY – Belarus, Minsk Tel: +48 (0)22 573 24 00CH – Switzerland, Etoy Tel: +41 (0)21 821 87 00 CZ – Czech Republic, PragueTel: +420 284 083 111DE – Germany, Kaarst Tel: +49 (0)2131 4016 0DK – Denmark, Ballerup Tel: +45 43 56 04 00ES – Spain, Madrid Tel: +34 902 330 001FI – Finland, Vantaa Tel: +358 (0)20 753 2500FR – France, Contamine s/Arve Tel: +33 (0)4 50 25 80 25GR – GreeceTel: +30 69 44 52 78 25HU – Hungary, Budaörs Tel: +36 23 885 470IE – Ireland, Dublin Tel: +353 (0)1 466 6370IL – IsraelTel: +39 02 45 19 21IT – Italy, Corsico (MI) Tel: +39 02 45 19 21KZ – Kazakhstan, Almaty Tel: +7 7273 561 000NO – Norway, Asker Tel: +47 66 75 34 00PL – Poland, Warsaw Tel: +48 (0)22 573 24 00PT – PortugalTel: +351 22 999 7360RO – Romania, Bucharest Tel: +40 21 252 1382RU – Russia, Moscow Tel: +7 495 645-2156SE – Sweden, Borås Tel: +46 (0)8 59 79 50 00SL – Slovenia, Novo Mesto Tel: +386 7 337 6650TR – Turkey, Istanbul Tel: +90 216 4997081UK – United Kingdom, Warwick Tel: +44 (0)1926 317 878ZA – South Africa, Kempton Park Tel: +27 (0)11 961 0700North AmericaCA – Canada, Milton, Ontario Tel: +1 905 693 3000US – USA, Cleveland Tel: +1 216 896 3000Asia PacificAU – Australia, Castle Hill Tel: +61 (0)2-9634 7777CN – China, Shanghai Tel: +86 21 2899 5000HK – Hong Kong Tel: +852 2428 8008IN – India, MumbaiTel: +91 22 6513 7081-85JP – Japan, Tokyo Tel: +81 (0)3 6408 3901KR – South Korea, Seoul Tel: +82 2 559 0400MY – Malaysia, Shah Alam Tel: +60 3 7849 0800NZ – New Zealand, Mt Wellington Tel: +64 9 574 1744SG – Singapore Tel: +65 6887 6300TH – Thailand, Bangkok Tel: +662 186 7000TW – Taiwan, Taipei Tel: +886 2 2298 8987Parker WorldwideSouth AmericaAR – Argentina, Buenos Aires Tel: +54 3327 44 4129BR – Brazil, Sao Jose dos Campos Tel: +55 080 0727 5374CL – Chile, Santiago Tel: +56 22 303 9640MX – Mexico, Toluca Tel: +52 72 2275 4200。
horiba mfc工作原理-回复Horiba MFC(Mass Flow Controller),也称为质量流量控制器,是一种广泛应用于工业和实验室环境中的流量控制设备。
它能够准确地控制气体的流量,这在许多应用中是非常重要的,例如半导体制造、气体混合、燃烧过程和实验室分析。
Horiba MFC的工作原理可以分为几个关键步骤,包括传感器测量、控制电路和执行机构。
下面将一步一步地解释Horiba MFC的工作原理。
首先,Horiba MFC使用传感器来测量气体的质量流量。
传感器通常采用热毛细管(Thermal Capillary)流量传感器,该传感器基于热传导原理。
传感器内部包含一个非常细微的毛细管,气体流经该毛细管时会带走一部分热量。
传感器通过测量在气体流动中所损失的热量来确定质量流量。
其次,测量到的信号被传送到控制电路中进行处理。
控制电路通常由一个微处理器和一些模拟电子元件组成。
微处理器根据从传感器接收到的信号来计算气体的质量流量,并与用户预设的目标流量进行比较。
如果实际流量低于或高于预设流量,控制电路将根据需求调整执行机构以控制气体流量。
最后,执行机构是Horiba MFC的关键部件之一。
它由一个电磁比例阀(Electromagnetic Proportional Valve)和一个驱动电路组成。
根据控制电路的指令,执行机构会相应地调整电磁阀的开度,从而控制气体流量。
电磁阀的开度调整将导致阀门内的孔径相应变化,进而调整流通截面,从而控制气体的流动速度和量。
总结起来,Horiba MFC的工作原理是通过传感器测量气体质量流量、控制电路计算流量误差并调整执行机构来达到精确控制气体流量的目的。
这个过程是连续的,以确保流量的稳定性和一致性。
需要注意的是,Horiba MFC的性能和准确性受到多种因素的影响,包括气体压力、温度和比例阀的响应时间等。
因此,在使用Horiba MFC进行精确流量控制时,需要对环境条件进行细致的调节和校准,以确保其在各种工况下的可靠性和稳定性。
VerifloContact Information:Parker Hannifin Corporation Veriflo Division 250 Canal BlvdRichmond, California 94804phone 510 235 9590fax 510 232 7396************************/verifloMobile App: /verifloValue Proposition:The LC223S is a high pressure gas or liquid flow controller for liquid chromatography, chemical injection and sampling.The LC223S provides constant flow with varying downstream pressure.Gas or Liquid Flow Controller High Pressure, Stainless SteelLC223S SeriesProduct Features:• Wide Flow Range: From 25 scc/m to 40 slpm • Wide Pressure Range: From 200 to 5000 psig (14 to 345 barg)• Corrosion resistant• Repeatability: Flow isstable within ±0.2% of flow value under the following conditions:1. Ambient temerature variesno more than 10°F 2. Inlet pressure remainsconstant3. Downstream pressure doesnot vary by more than 70% of established valueLC223S SeriesPrinciple of OperationThe controller creates a constant differential pressure across a fixed area passage. Flow through the passage is proportional to the area of the passage and to the differentialpressure across it. Since the differential pressure is kept constant, the flow is established by the sizing of the passage area.OperationThe controller functions as a back pressure regulator which delivers a continuous flow. Its diaphragm assembly is subjected to two opposing forces. The force applied to the top of the diaphragm assembly is created by the dome pressure on the area of thediaphragm. The force applied to the bottom of the diaphragm assembly is the sum of the force created by the compression spring and the force created by the inlet pressure on the area of the diaphragm. The diaphragm assembly operates to control the opening of a nozzle in order to maintain a balance between the two opposing forces. If the force on top of the diaphragm assembly tends to exceed the force at the bottom, the imbalance will decrease the opening of the nozzle to increase the inlet pressure until the balance is restored. If the force on top of the diaphragm assembly tends to become smaller than the force at the bottom, the imbalance will increase the opening of the nozzle to reduce the inlet pressure until the balance is restored. Such an operation maintains a constant difference between the pressure in the dome and the pressure at the inlet. The magnitude of the difference is established by the compression spring. The dome of the controller is connected to the upstream side of the flow determining passage; the inlet is connected to the downstream side of the passage. In a typical application, the flow passage is capillary tubing (fixed orifice, or MFC). The differential pressure has a nominal value of 50 to 60 psi. For effective operation, it is required to have a minimum difference of 200 psi between the pressure upstream of the flow passage (applied to the dome) and the pressure at the outlet of the controller (connected to the process). If the application is concerned with gas flow, it is important to maintain the upstream pressure at a constant reference to prevent gas compressibility from affecting the stability of flow control.SYSTEM SET @ 500 PSI1500 PSI CAP PORTINOUTLC223SFLOW RESTRICTORVALVE OR MFC1500 PSIEXAMPLE APPLICATIONFor an explanation of Ordering options please reference literature 25000275at /verifloBlack = Standard Lead Time ConfigurationsBlue = Extended Lead Time Configurations Green Italic = Express Service Program (ESP)LC223S Part Number . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .54018192Color Explanations: LC223S SeriesOrdering InformationDimensional DrawingLitPN: 25000043 Rev: E Date of Issue 04/2013© 2007 Parker Hannifin CorporationVerifloOFFER OF SALE:The items described in this document are hereby offered for sale by Parker-Hannifin Corporation, its subsidiaries or its authorized distributors. This offer and its acceptance are governed by the provisions stated in the detailed “Offer of Sale” elsewhere in this document or available at /verifloWARNING USER RESPONSIBILITYFAILURE OR IMPROPER SELECTION OR IMPROPER USE OF THE PRODUCTS DESCRIBED HEREIN OR RELATED ITEMS CAN CAUSE DEATH, PERSONAL INJURY AND PROPERTY DAMAGE. THIS DOCUMENT IS FOR REFERENCE ONLY. PLEASE CONSULT FACTORY FOR LATEST PRODUCT DRAWINGS AND SPECIFICATIONSThis document and other information from Parker-Hannifin Corporation, its subsidiaries and authorized distributors provide product or system options for further investigation by users having technical expertise.The user, through its own analysis and testing, is solely responsible for making the final selection of the system and components and assuring that all performance, endurance, maintenance, safety and warning requirements of the application are met. The user must analyze all aspects of the application, follow applicable industry standards, and follow the information concerning the product in the current product catalog and in any other materials provided from Parker or its subsidiaries or authorized distributors.To the extent that Parker or its subsidiaries or authorized distributors provide component or system options based upon data or specifications provided by the user, the user is responsible for determining that such data and specifications are suitable and sufficient for all applications and reasonably foreseeable uses of the components or systems.The products described herein, including without limitation, product features, specifications, designs, availability and pricing are subject to change by Parker Hannifin Corp and it’s subsidiaries at any time without notice.Proposition 65 Warning: This product contains chemicals known to the state of California to cause cancer or birth defects or other reproductive harm.For additional information on materials of construction, functional performance and operating conditions, please contact factory.Use mobile device to scan this QR Code.SpecificationsLC223S Series。
GFC系列热式气体质量流量控制器是用来测量显示和控制设定的流量。
GFC系列气体质量流量控制器结构紧凑,提供了精确的流量控制,是一款物美价廉的流量控制产品。
对于非腐蚀性介质可选用铝或铜的结构材质,腐蚀性介质可选用316不锈钢材质。
无需打开外壳,可方便的调整零
点和满量程。
坚固的金属结构
最大压力1000psig(70bar)泄漏率小于1×10-7
sml/s 经过NIST校准嵌入可倾斜LCD显示仪0-5VDC和4-20mA信号回路保护可作便携设备使用工程单位或者百分比显示累积器可选
设计特点:
概述:
GFC系列用于测量和控制气体质量流量。
本品外壳坚固耐用,精确度高,是一款多功能而且经济实用的流量控制产品。
可选铝或不锈钢外壳,可选显示工程单位(标准)或百分比。
自带的电磁比例阀可以控制设定的流量,该阀是常闭阀,当意外停电时,阀门将自动关闭。
设定点可以本地控制或外部给定控制。
自带置于传感器顶部的LCD显示模块,这个显示模块可倾斜90度以上以方便读数。
它用一个标准的插头与传感器连接,也可以分开独立安装。
OEM的应用可提供无LCD显示的产品。
GFM质量流量计的测量范围是10sccm到1000sL/min (N2);用1/4",1/8"和1/2"卡套螺纹或3/4"FNPT连接,可选其他连接方式。
该仪表可以作为台式设备或者用螺丝固定在平板上。
电源电路采用保险丝和极性保护设计。
操作原理:
被测气体分别流经两个层流区,一路通过主流量管道,另一路通过毛细测量管。
两个管路的设计保证流体处于层流状态,因此两个管路流量比是恒定的。
两个精密的温度感应绕组在测量管上被加热,当有流量产生时,被加热的气体从上游带走热量到下游的感应绕组上。
产生温差和感应圈电阻的变化是成比例的。
测量绕组的电阻值与瞬时流量成线性比例关系,采用惠斯顿电桥来检测测量绕组的电阻变化。
根据被测气体的质量流量,输出0…5VDC或者4…20mA信号。
经过两个层流区的气体混合后流过具有特定孔径的电磁比例阀,质量流量测量与电磁比例阀组成闭环的控制系统,使流量稳定在设定的流量值上。
在一定范围内温度和压力的变化不会影响流速
泄漏保护
氦气测试最大泄漏率为1×10-7 sml/s。
Mass Flow Controllers。