光学设计实验莫尔条纹原理及应用学生姓名：指导教师：所在学院：物理学院所学专业：物理学中国·长春2014 年6 月一、中文摘要目前，以莫尔条纹技术为基础的光栅线性位移传感器发展十分迅速，光栅长度测量系统的分辨率达到纳米级，测量精度已达 0.1um，已成为位移测量领域各工业化国家竞争的关键技术。
它的应用非常广泛，几乎渗透到社会科学中的各个领域，如机床行业、计量测试部门、航空航天航海、科研教育以及国防等各个行业部门。
本文首先详细阐述了莫尔条纹的形成机理，当计量光栅为粗光栅时，莫尔条纹形成机理用遮光阴影原理解释，当计量光栅为细光栅时，则用衍射干涉原理解释。
然后系统介绍了基于莫尔条纹技术的光电测量仪器的设计原理，它由光栅读数头和对莫尔条纹信号进行处理的电子学部分组成，光栅读数头包括光栅副，光电接收元件，由光源和准直镜组成的照明系统，以及必要的光阑、接收狭缝、调整机构等。
最后提出了基于光栅莫尔条纹干涉计量技术的一种新的应用，即把光栅线性位移传感器应用在数字读数显微镜上，数字读数显微镜包括光学系统、控制与显示系统、CCD 摄像机与显示器四部分，其中，控制与显示系统是设计的核心模块，是基于 FPGA 技术实现的，它包括倍频鉴相模块、可逆计数模块、显示控制和显示接口模块。
经过大量的理论研究和实践测试工作，我们已经把光栅莫尔条纹技术成功地应用在数字读数显微镜上，实现了对被测物体线性位移的精密测量，测量分辨率达到 0.5um，测量精度达到±1um。
设计中用 CCD 摄像头代替目镜可以避免传统的肉眼观察的不便。
关键词：莫尔条纹，光栅读数头，FPGA，数字读数显微镜二、英文摘要At the present time, grating linear movement sensor based on grating Moiré fringe interferometry technology has developed rapidly.Grating movement measurement system has reached the nanometer level resolution, measuring accuracy than 0.1um.It is widely used, almost penetrated into the social sciences in various fields, such as the machine tool industry,test measurement,aerospace navigation,national defense,education and scientific research in all industry sectors.This paper first described in detail the formation mechanism of Moire fringe,when the measurement grating for coarse grating, the moire fringe formation mechanism of the shadow of the principle of using sunscreen to explain, when the measurement grating for fine grating, then explained by diffraction interference principle. And then systematically introduced the principle of design of grating linear movement sensor based on Grating Moire fringe technology, grating linear movement sensor is composed of grating reading-head and Moire fringe signal processing electronics components.Grating reading-head include Grating pair, the lighting system composed of light source, collimation mirror, the essential diaphragm, received slot and adjusted organization, etc. Finally, a new kind of application based on the Moire fringe interferometry technology is proposed, which apply the grating linear movement sensor to the digital reading microscope. The digital reading microscope includes optical system, control and display system,CCD camera and display four parts, among them, it is the key module that is designed to control with the display system, which is based on FPGA technology and mainly concludes four fold-frequency and direction-judgment module，reversible counter module,displaying control module and displaying interface module.After a lot of theoretical research and practical testing,we have already applied grating Moire fringe technology to the digital reading microscope successfully,which has made the accurate measurement of linear displacement of the testee become true, and the measured resolution has reached 0.5um, the measurement accuracy has reached ± 1um. CCD camera instead of eyepiece can avoid the inconvenience of traditional visual observation.Keywords: Moire Fringe, Grating Reading Head, FPGA, Digital Reading Microscope三、正文1、问题提出光栅莫尔条纹技术是一门既古老又现代的测量技术。
