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No.PS※※-OML0002CN-G数字式压力开关ZSE30A(F)ISE30A安全注意事项 2型式表示·型号体系 8产品各部的名称及功能 10用语说明 11安装・设置 14设置方法 14配管方法 17配线方法 18压力的设定 21什么是测试模式 21功能设定 24什么是功能选择模式 24出厂设定 24 F0 单位切换功能 26 F1 OUT1的设定 27 F2 OUT2的设定 30 F3 响应时间的设定 30 F4显示分辨率的设定 31 F5 自动预设功能的设定 32 F6 显示值微调的设定 34 F7 省电模式的设定 35 F8 密码输入的设定 36特殊功能的设定 37 F90 全功能的设定 37 F97 复制功能的选择 39 F98 输出确认 41 F99 恢复出厂设置 43其他设定 44维护 47忘记密码的情况 48故障一览表 49规格 56规格表 56外形尺寸图 58此处所示的注意事项是为了确保您能安全正确地使用本产品，预先防止对您和他人造成危害和损失而制定的。
这些注意事项，按照危害和损伤的大小及紧急程度分为「注意」「警告」「危险」三个等级。
无论哪个都是与安全相关的重要内容，所以除了遵守国际规格(ISO/IEC)、日本工业规格(JIS)※1)以及其他安全法规※2)外，这些内容也请务必遵守｡※1) ISO 4414: Pneumatic fluid power -- General rules relating to systemsISO 4413: Hydraulic fluid power -- General rules relating to systemsIEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-SafetyJIS B 8370: 空气压系统通则JIS B 8361: 油压系统通则JIS B 9960-1: 机械类的安全性、机械的电气装置（第1部： 一般要求事项)JIS B 8433-1993: 产业用操作机器人-安全性等※2) 劳动安全卫生法等注意:误操作时，有人员受伤的风险，以及物品破损的风险｡警告:误操作时，有人员受到重大伤害甚至死亡的风险。
Doc. no.XM-OMP0001-AHigh Vacuum Angle Valve / Straight ValveXMA/XYA SeriesThank you for purchasing SMC product.For appropriate operation of this product, please read this operation manual thoroughly to understand.Also, refer to the drawing, product information for structure and specification of this product, Confirm operating environment is within specifications.Keep this operation manual with care so that it can be usedat any time.Contents of this operation manual is subject to change without notice.Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2 1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4(Precautions on Design, Selection, Mounting, Piping, Maintenance)2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6(Maintenance parts)3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 74. Construction / Dimensions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 85. Warranty period and guaranteed range - - - - - - - - - - - - - - - - - - - - - - - - - - - - 106.Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11Safety InstructionsThese safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations.*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems ISO 4413: Hydraulic fluid power -- General rules relating to systemsIEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -- SafetyCaution Caution indicates a hazard with a low level of risk which, if not avoided, could resultin minor or moderate injury.Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. DangerDanger indicates a hazard with a high level of risk which, if not avoided, will resultin death or serious injury .Safety InstructionsLimited warranty and Disclaimer/Compliance RequirementsThe product used is subject to the following “Limited warranty and Disclaimer” and “Compliance Requirements”.Read and accept them before using the product.Common Specific Precautions 1 Be sure to read before handling.●All models1. T he body material is SCS13, the bellows is SUS316L, and other metal seal material isSUS304. Standard seal material in the vacuum section is FKM that can be changed to the other materials (please refer “How to Order”). Use fluids those are compatible with using materials after confirming.2. S elect materials for the actuation pressure piping, and heat resistance for fittings that aresuitable for the applicable operating temperatures.●Models with auto switch1. T he switch section should be kept at the temperature no greater than 60 o C.●All models1. W hen controlling valve responsiveness, take note of the size and length of piping, as well asthe flow rate characteristics of the actuating solenoid valve.2. A ctuating press should be kept within the specified range. 0.4MPa to 0.5MPa is recommended.3. U se within the limits of the operating pressure range.●High temperature types1. I n the case of gases which cause a large amount of deposits, heat the valve body to preventdeposits in the valve.● All models1. I n high humidity environments, keep valves packed until the time of installation.2. I n case with switches, secure the lead wires so that they have sufficient slack, without anyunreasonable force applied to them.3. P erform piping so that excessive force is not applied to the flange sections. In case there isvibration of heavy objects or attachments, secure them so that torque is not applied directly to the flanges.4. V ibration resistance allows for normal operation of up to 30 m/s2(45 to 250Hz), butcontinuous vibration may cause a decline in durability.Arrange piping to avoid excessive vibration or impacts.● High temperature types; (Temperature specifications/H0)1. W hen a valve is to be heated, only the body section should be heated, excluding the bonnetsection.1. B efore mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.2. T here is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and itshould be handled so that the seal surface is not damaged in any way.If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve should be disassembled, cleaned and re-assembled by an operator who has sufficient knowledge and experience (e.g. a specialist).Caution1. When removing deposits from the a valve, take care not to damage any part of its parts.2. Replace the bonnet assembly and the O-ring when the end of its service life is approached. *For details regarding endurance cycles, please reference Section 5 of this Operation manual titled Period and scope of warranty . ( pages 10 )3. If damage is suspected prior to the end of the service life, perform early maintenance.4. SMC specified parts should be used for service. Refer to the Construction / Maintenance parts table.5. When removing the valve seal and external seal, take care not to damage the sealing surfaces. When installing the valve seal and external seal, be sure that the O-ring is not twisted. (Refer to Section 6 Parts Replacement Procedure (pages 11 to 13) for details.)Common Specific Precautions 2 Be sure to read before handlingOnly SMC specified parts should be used. Please refer to operation manual.The bonnet assembly should also be replaced when changing the seal material. Due to the different materials used, changing only the seal may prove inadequate.the magnet for auto switch is necessary, add “-M9//” a t the suffix of the part number. (Not available for hightemperature models)Note2) An auto switch for high temperature is available with a different part number.Note3) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound No. 1349-80).Note4) The bonnet assembly includes the valve seal.number, except for the standard seal material (FKM: compound no. 1349-80).Note2) Refer to the Construction on the page 9 for the construction numbers.Note3) Please contact SMC if you would like to change the material of the valve seal from ULTIC ARMOR to another material, or from another material to ULTIC ARMOR.Note1) Due to the different materials used, changing only the seal may prove inadequate.Note2) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd.Kalrez R is a registered trademark of Dupont Co.,Ltd.Chemraz R is a registered trademark of Greene, Tweed & Co.,ULTIC ARMOR R is a registered trademark of NIPPON VALQUA INDUSTRIES, LTD.Note3) MITSUBISHI CABLE INDUSTRIES, LTD.3. SpecificationsNote1) XYA-16 is not available due to the interference of the flange shapeNote2) The conductance is “molecular flow” measured with an elbow pipe which has the same dimension with each flange.Note3) Air consumed by a reciprocating motion of a cylinder.Note4) Figures in ( ) indicates the weight of CF , conflate fittings.4-1. Construction))(保守部品))AAφGHBCCDφGHBEAφFd(K Flange )φFn (KF Flange )45°XMA Series ／Angle ValveXYA Series / Straight ValveThe guaranteed period covers the period which finishes the earliest among 2 million operating cycles [with our durability test conditions], 18 months after shipping from us, and 12 months after starting the use of the product at your place or your c ustomer’s place.If the specification is not kept, or any non-conformance derived from mounting or replace of a device, an assembly, or an O-ring at your place occurs, the guarantee cannot be applied.Note)) The product durability is varied depending on the operating conditions (such as a use with large flow rate).If any failure occurs due to our fault during the guaranteed period, we will guarantee the non-conformance by delivering a substitute in the worst case. However, responsibility of any damage which is led by the product failure is not taken by us.Result of durability test (with the circuit shown on the right)Internal/ external leakage and operation were checked by opening and closing a valve in internally evacuated condition at ordinary temperature (room temperature).It was confirmed that this product satisfied the specification up to 2 million cycles.The test was performed with FKM, the standard sealing material.<Reference>The pumping direction is not limited, but if the pumping creates a flow stream, the durability of the product could be impaired.Therefore, the pumping direction shown on the right figure (bellows side pumping) is recommended. Also, the operating conditions should be checked beforehand because it affects the life.Vacuum pumpBellows side Valve sideChamberRecommended direction of exhaust6-1. PrecautionsBe sure to follow [1. Precautions 1] when disassembling the product for maintenance. Along with the precautions above, comply with the following precautions too.Warning∙If it is expected that product materials may get stuck to the product, ensure safety isassured before handling. It is recommended to wear gloves and a mask.∙Pay attention to the handling of components according to the procedure in the next itemonwards. Do not apply excessive force or impact. This will not only damage the productbut also decrease its performance and life expectancy.∙It is not possible to disassemble the bonnet assembly of this product. If the componentsand assembly are damaged, or damage is expected, exchange the bonnet assemblyitself.∙Do not disassemble the parts that are not explained in this operation manual. Theperformance and life may decrease. Also, it may cause danger.3Bolt124Bottomofdischarge gas.Mounting surface ofO ringBodyO ringO ringBodyBellows holder 1Pilot portBodyBonnet assembly234ValvesSizeX*A-251st Printing :PV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPANTel: + 81 3 5207 8249 Fax: +81 3 5298 5362URL Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.© 2012 SMC Corporation All Rights Reserved。
几款真空阀简介及运用电磁真空带充气阀是安装在机械式真空泵上的专用阀门。
阀门与泵接在同一电源上，泵的开启与停止直接控制了阀的开启与关闭。
当泵停止工作或电源突然中断时，阀能自动将真空系统封闭，并将大气通过泵的进气口充入泵腔，避免泵油返流污染真空系统。
适用的工作介质为空气及非腐蚀性气体。
常闭型气动高真空挡板阀是通过电磁转向阀依靠压缩空气作为阀板启闭动力，在失去电源或压缩空气时，通径DN80以下的阀门将依靠弹簧力自动关闭阀门，DN100以上的阀门通过电磁阀组利用单向阀迅速关闭气缸原有的气源压力达到自动关闭阀门。
从而达到真空系统中迅速切断气流之功能。
GDQ-J型为角通型式，GDQ-S型为带预抽口的三通型式。
超高真空插板阀是通过手柄以螺杆传动推动钢球架运动，撑开阀板关闭，又靠弹簧力收拢阀板，打开后再退出的真空阀门。
阀门适用于超高真空系统中接通或截止气流之用。
高真空系统中接通或截止气流之用。
适用的工作介质为洁净的空气和非腐蚀性气体。
低真空电磁压差充气阀是安装在机械真空泵进气口上一种新型真空阀。
其工作原理是机械泵的电源和电磁阀线圈的电源接在同一电路上，当机械真空泵因工作需要突然停电、停止运转时，该阀利用大气压力使阀芯自动关闭，截止和真空系统相连的通道，同时向泵内放大气，防止机械泵油返回真空系统，起到了保护真空系统作用，有利于机械泵再启动。
适用的工作介质为空气及非腐蚀性气体。
电磁高真空充气阀是以电磁力为动力，当接通电源时，阀门被关闭，使真空系统与大气隔离；切断电源时，阀门处于开启状态，随之大气由外界引入真空系统。
GQC-4A型电磁高真空充气阀具有通电开启和通电关闭两种功能，阀内带有空气过滤器，可用作向真空系统充气。
阀门适用的介质为空气及非腐蚀性气体。
电磁高真空挡板阀是靠电磁力和弹簧复位力，用以打开或关闭的阀门，适用于真空系统中用以打开或隔断气流之用。
当阀关闭时，允许阀板密封面上侧承受大气压，下侧为真空，在此状态下接通电器控制盒电源后，阀板能正常开启。
