Effects of surface acoustic waves on adsorptive properties of

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SurfaceScience433–435(1999)525–528www.elsevier.nl/locate/susc

EffectsofsurfaceacousticwavesonadsorptivepropertiesofZnOandNiOthinfilmsdepositedonferroelectricsubstrates

H.Nishiyama,N.Saito,H.Chou,K.Sato,Y.Inoue*DepartmentofChemistry,NagaokaUniversityofTechnology,Nagaoka940-2188,Japan

AbstractTheeffectsofsurfaceacousticwaves(SAWs)ontheadsorptivepropertiesofthin-filmmetaloxideswerestudiedbytheirsurfaceconductivitychangeswithgasadsorptionanddesorptioninthepresenceandabsenceofSAWs.Theconductivityincreaseswereconsiderablyenhancedbya10-MHzRayleighSAWat1Wwiththeethanoladsorptionon10nmn-typesemiconductingZnOandbya20-MHzshearhorizontalleakySAW(SH-LSAW)withtheO2adsorptionona30-nmp-typesemiconductingNiOsurface.ThedesorptionofoxygenfromtheNiOwasalso

promotedbytheSH-LSAW.TheinteractionsoftheSAWswithchargecarriersinthemetaloxidefilmsaremainlyresponsiblefortheenhancementoftheconductivitychanges,anditisproposedthatthepromotionofnotonlyadsorptionbutalsodesorptionisassociatedwiththeperiodicfeaturesofSAW-inducedlatticedisplacement.©1999ElsevierScienceB.V.Allrightsreserved.

Keywords:Adsorption;Desorption;Ferroelectricsubstrates;NiO;Surfaceacousticwaves;ZnO

1.IntroductioneffectivefortheactivationofCOoxidationonaPt{110}thin-filmsinglecrystalcatalyst[7–10].ItisofparticularinteresttoextendtheresearchonSurfaceacousticwaves(SAWs)areabletocausedynamiclatticedisplacementatsurfaces([1]andtheSAWeffectstometaloxidesurfacessincetheirelectronicstructuresofamuchlowerdensityofreferencestherein)andhavedrawnspecialatten-tioninrecentyearsasapromisingphenomenonconductionelectronsandmetal–oxygenbondswouldbeexpectedtobeinfluencedmoresignifi-thatpermitsthedesignofmetalcatalystsurfaceswithartificiallycontrollablefunctionsforchemicalcantlybydynamiclatticedisplacement.Oneoftheimportantcharacteristicfeaturesofreactions.Recently,wehavedemonstratedthattheSAWsareeffectivefortheactivationofthin-metaloxidesurfacesisassociatedwithelectrontransferbetweenadsorbedspeciesandmetaloxidefilmmetalcatalystsdepositedontheSAWpropa-gationpath.Forethanoloxidationonpolycrystal-surfaces.Therefore,wepresentastudyoftheinfluenceofSAWsonsurfaceconductivitychangeslinethinfilmsofPd,NiandAgcatalysts,theSAWsincreasedthecatalyticactivityseveral-foldduetogasadsorptionandthedesorption.AspecialtypeofaSAWsamplewasdesigned[2–6].Morerecently,Kingandco-workershavesoastopermitsurfaceconductivitymeasurementsreportedaninterestingresultthattheSAWis

ofthin-filmmetaloxidesdepositedonthewavepropagationpathduringSAWpropagation.A*Correspondingauthor.Fax:+81258-47-9830.

E-mailaddress:inoue@analysis.nagaokaut.ac.jp(Y.Inoue)n-typesemiconductingmetaloxideofZnOanda

0039-6028/99/$–seefrontmatter©1999ElsevierScienceB.V.Allrightsreserved.PII:S0039-6028(99)00045-X526H.Nishiyamaetal./SurfaceScience433–435(1999)525–528p-typeoxideofNiOwerechosenasmetaloxides,whereasthesurfaceconductivityofthethinfilmswasmeasuredbymonitoringelectriccurrentsgen-andtheirthinfilmsweredepositedonthepropaga-tionpathofRayleighSAWandSH-LSAW.Theeratedbyd.c.voltage.Thetemperatureofthethin-filmsurfacesintheadsorptionofethanolonZnOandofoxygenonNiOwereexamined.presenceandabsenceoftheSAWswasmeasuredbytwomethods:firstlybyaSAWfrequencyshift,sincethereisagoodrelationbetweenSAWfre-quencyshiftandtemperaturechanges[9],and2.Experimentalsecondlybyanon-contactingmethodusingaradiationthermometer.ChangesintemperatureFig.1showsastructureofaSAWdeviceforsurfaceconductivitymeasurements.ApairofIDTduetotheSAWswerecompensatedbyanouterelectricfurnace.electrodeswasfabricatedphotolithographicallyonthesurfaceofaferroelectric128°rotatedY-cutLiNbO3singlecrystalforthegenerationofRayleighSAW.BetweenthetwoIDTelectrodes,3.Resultsa10-nm-thickZnOthinfilmwasdepositedbysputteringofaZnOtargetinanAr–O2mixture.Fig.2showsthechangesinsurfaceconductivitywiththeadsorptionofethanolonaZnOsurfaceOntopofthefilm,Auelectrodesforsurfaceconductivitymeasurementsweredeposited.Theat468K.Upontheintroductionof0.7-kPaetha-noltothesurfacewithoutSAW,arapidincreasedirectionofsurfacecurrentinthesurfaceconduc-tivitymeasurementswasnormaltotheSAWprop-intheconductivityoccurredataninitialstage,andthenfollowedbyagradualincrease.Aslowagationtoavoidmutualinterference.AdifferentSAWdevicewiththesamestructurewaspreparedincreasecontinueduptomorethan1h.However,undertheconditionsofRayleighSAW-onat1W,bydepositinga30-nm-thickNiOfilmona36°rotatedY-cutLiTaO3singlecrystal,whichgener-theintroductionofethanolunderthesamecondi-tionsproducedaconsiderablylargersurfacecon-atedSH-LSAW.TheNiOfilmwaspreparedbysputteringofaNiOtargetinanAr–O2atmo-ductivityincrease.Thisenhancementreachedaconstantlevelinamuchshorteradsorptiontime,sphere.Themetaloxidesweresubjectedtooxida-tionin0.7-kPaoxygenat548KpriortoadsorptioncomparedtothatwithSAW-off.experiments.Radio-frequencypowerwasgeneratedfromanetworkanalyzer,amplifiedandthenintroducedtotheIDTelectrodesafterimpedanceadjustment,