6DS Manual Ch 3b

Operations Manual Operator Functions

Version 4.2 – October 2003 3 - 35 2 – P

ERFORM H

OME S

EQUENCE R

OUTINE

Before the machine is homed, the screen displays a "PERFORM HOME SEQUENCE" prompt.

NOTES

Whenever the "PERFORM HOME SEQUENCE" prompt appears,

go to the Home Machine Menu and perform the home sequence. When the machine displays

the home sequence prompt, it will not permit the running of an auto polish or slurry flush cycle until the home sequence is performed.

Follow the steps below to display the Home Machine Menu:

1. Set the Upper f/Lower f key to "Upper" by pressing the key until the light next to Upper f

is illuminated.

2. Set the Alpha key to "Off" by pressing the key until the light is turned off.

3. Press the F9 key to choose "Select Menu".

4. Display the alternate list of menus by pressing the F9 key to select "OTHER".

5. Press the F5 key to display the Home Machine Menu, shown below.Strasbaugh nTegrity (Model 6DS-SP) Planarizer

3 - 36 Version 4.2 – October 2003 Figure 3-9 Home Machine Menu

To perform the home sequence routine, which moves all parts of the machine into correct

alignment for the auto polish cycle, select ALL at the Home Machine Menu:

6. Press the F5 key to select "ALL".

Wait for the machine to complete the sequence (it takes about three minutes). When the

sequence is complete, the screen will display "REFERENCED" for all axes. Operations Manual Operator Functions

Version 4.2 – October 2003 3 - 37 3 – P

LACE C

ARRIERS ON S

PINDLES

1. Open Left Side Operator Door.

2. Set carrier(s) on load station.

CAUTION

Use caution to avoid damaging the Teflon spray nozzles located

near the load stations.

3. Close all doors to the machine.

4. Press the RESET pushbutton located on the operator interface control panel to reset the

polish area safety controller.

5. Press the F9 key to choose "Select Menu".

6. Display the Auto Polish Cycle Menu by pressing the F1 key to select "Auto Cycle".

7. At the Auto Polish Cycle menu, press the F8 key to select "OTHER", displaying the

alternate function key list.

8. Press the F1 key to select "Load Carriers".

The spindles will move down and apply vacuum to secure the spindles. The spindles will

then move up with the carrier(s) installed.

Strasbaugh nTegrity (Model 6DS-SP) Planarizer

3 - 38 Version 4.2 – October 2003 4 – R

ETRIEVE A S

TORED R

ECIPE

As instructed by your supervisor or the process engineer, retrieve a stored recipe by following

the steps shown below:

NOTE

To set or confirm recipe parameters, follow the procedures found in the Machine Setup chapter of this manual.

1. Press the F9 key to choose "Select Menu".

2. Display the Recipe Management Menu by pressing the F3 key to select "Recipe Manage".

3. At the Recipe Management Menu, highlight the desired recipe by pressing the F2 key until

the highlight bar moves down to the recipe name.

4. Press the F3 key to select "Get Recipe".

The control program retrieves the highlighted recipe and displays its name in the Rec area

of the screen.

5 – R

UN AN A

UTO P

OLISH C

YCLE

Operations Manual Operator Functions

Version 4.2 – October 2003 3 - 39 Assumptions - The procedures below were written with the assumptions that:

• The operator has powered up the machine and performed the home sequence routine.

• The operator has installed the polishing pad, wafer backings, and wafer template rings. (See

the Operator Routine Maintenance section, below in this chapter, for procedures).

• The operator has placed the carriers on the spindles.

• Per instructions from the process engineer or supervisor, the operator has retrieved or

confirmed the recipe parameters.

NOTE

The procedure below runs a standard auto polish cycle with no feature options selected at

the Auto Polish Cycle Menu. For details on options selectable at the Auto Polish Cycle

Menu, refer to Menus Used in Basic Operation, above in this chapter.

1. Press the F9 key to choose "Select Menu".

2. Display the Auto Polish Cycle Menu by pressing the F1 key to select "Auto Cycle".

Screen displays the Auto Polish Cycle menu.

3. Load 1 or 2 cassettes with wafers (polish side down or per supervisor instructions).

4. Open the Elevator Access Operator Door.

5. Holding by top handle, place cassette(s) on send elevator(s), making sure cassettes are seated

in elevator notches.

NOTES

If one cassette is being used, it may be placed on either the right or left send elevator. Send cassettes may be either full or partially filled.

6. Place the cassette sensor arm(s) down on top of the cassette(s).

7. Place 1 or 2 empty cassettes (as needed) on the receive elevators, making sure cassettes are

seated in elevator notches.