洁净度等级标准
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ISO14644-1(国际标准)
空气洁净
度等级(N) 大于或等于所标粒径的粒子最大浓度限值(个/每立方米空气粒子) 类似于
传统级别
0.1um 0.2um 0.3um 0.5um 1.0um 5.0um
ISO Class1 10 2
ISO Class2 100 24 10 4
ISO Class3 1,000 237 102 35 8 1级
ISO Class4 10,000 2,370 1,020 352 83 10级
ISO Class5 100,000 23,700 10,200 3,520 832 29 100级
ISO Class6 1,000,000 237,000 102,000 35,200 8,320 293 1000级
ISO Class7 352,000 83,200 2,930 10000级
ISO Class8 3,520,000 832,000 29,300 100000级
ISO Class9 35,200,000 8,320,000 293,000
各国洁净度等级近似对照表: 个/M≥0.5um ISO US US EEC FRANCE GERMANY JAPAN
14644-1(1999) 209E(1992) 209D(1988) cGMP(1989) AFNOR(1981) VDI 2083(1990) JAOA(1989)
1 - - - - - - -
3.5 2 - - - - 0 2
10.0 - M1 - - - - -
35.3 3 M1.5 1 - - 1 3
100 - M2 - - - - -
353 4 M2.5 10 - - 2 4
1,000 - M3 - - - - -
3,530 5 M3.5 100 A+B 4,000 3 5
10,000 - M4 - - - - -
35,300 6 M4.5 1,000 1,000 - 4 6
100,000 - M5 - - - - -
353,000 7 M5.5 10,000 C 400,000 5 7
1,000,000 - M6 - - - - -
3,530,000 8 M6.5 100,000 D 4,000,000 6 8
10,000,000 - M7 - - - - -