Does the thermal spike affect low-energy ion-induced interfacial mixing
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arXiv:cond-mat/0302262v3 [cond-mat.mtrl-sci] 9 Oct 2003Doesthethermal-spikeaffectlow-energyion-inducedinterfacialmixing?
P.S¨ule,M.Menyh´ard,K.Nordlund
ResearchInstituteforTechnicalPhysicsandMaterialScience,
KonkolyThegeu.29-33,Budapest,Hungary,sule@mfa.kfki.huAcceleratorLab.,Helsinki,Finland(February2,2008)
Moleculardynamicssimulationshavebeenusedtoobtainthethree-dimensionaldistributionofinterfacialmixingandcascadedefectsinTi/Ptmultilayersystemduetosingle1keVAr+impactatgrazingangleofincidence.TheTi/Ptsystemwaschosenbecauseofitsrelativelyhighheat
ofmixinginthebinaryalloyandthereforeasuitablecandidatefortestingtheeffectofheatofmixingonion-beammixing.However,thecalculatedmixingprofileisnotsensitivetotheheatofmixing.Thereforethethermalspikemodelofmixingisnotfullysupportedundertheseirradiationconditions.Insteadwefoundthatthemajorityofmixingoccursafterthethermalspikeduringthe
relaxationprocess.Theseconclusionsaresupportedbyliquid,vacancyaswellasadatomanalysis.Theinterfacialmixingisinvariousaspectsanomalousinthissystem:thetimeevolutionofmixingisleadingtoaphasedelayforTimixing,andPtexhibitsanunexpecteddoublepeakedmixing
evolution.Thereasonstotheseeffectsarediscussed.PACSnumbers:61.82.Bg,79.20.Rf,81.40.Wx
I.INTRODUCTION
Withtheappearanceofnanotechnologytheimpor-
tanceofthinfilmsincreasedconsiderably.Eitherduring
makingthinfilmsbyanykindofvarioussputteringpro-
cessesorinthinfilmanalysis(variouskindsofsputter
depthprofilingtechniques)thethinfilmsystemissub-
jectedtolowenergyionbombardment.Forthisreason
thestudyoftheeffectsofthelowenergyionirradiation
ofthinfilmstructuresisofhighimportance.
Oneoftheeffectsofionbombardmentisinterfacialion
beammixing.Thistermisusedforthatprocesswhen
anoriginallysharpinterface(IF)betweenpureAand
Bmaterialsgetsbroaderduetoionbombardment.The
ionmixing(IM)phenomenonisknownforalongtime
[1].Themajorityofourknowledgereferstocaseswhen
theinterfacetobemixedisrelativelydeepinthematrix
(thatis,farfromthefreesurface)andconsequentlythe
ionenergyappliedisintherangeof100keV[2].
Severaltheoreticalapproachesandtechniqueshave
alsobeendevelopedandarathercoherentpictureseems
tohaveemerged[1,2].Thoughthereisnoprincipaldiffer-
encebetweenthelowandhighenergyionmixingstillthe
previousexperimentalandtheoreticaltechniquescannot
bedirectlyappliedforthelowenergycase.Themostim-
portantdifferencebetweenthehighandlowenergyion
mixingisthat(i)thelatteroccursclosetothefreesur-
faceand(ii)itsextentisobviouslymuchlessthanthat
ofhighenergymixing.
WiththeincreasingcomputationspeedMDsimula-
tionshavebecomeastandardtooltostudythelowen-
ergyionbeamsurfaceinteraction,andinterfacemixing
aswell.MDsimulationofIMhasbeenthesubjectof
severalstudiesinthelastdecades[1].IMinmultilayer
systemhasalsobeeninvestigatedbyseveralgroupsusing
MD[1,4,6,7].Acommonfeatureofthesestudiesisthat
onlyasingleionimpacthasbeenconsideredduringthesimulations.Experimentalanalysisofinterfacialmixing
inmultilayermetals,however,alwaysdealwithaseriesof
ionimpacts.Forinstance,Augerdepthprofilinganalysis
ofmultilayersshouldleadtotheremovalofthetarget
duringanalysis[9].Asafirststep,weinthisstudyfocus
onunderstandingthesingle-ionprocess.Togobeyond
thislevelwewillemployaseriesofionimpactsinthe
nextstudy.
Theothercommonfeatureofthestudiesavailableis
thattheyuseanormalangleofincidence.Weshould
liketomodelionmillinganddestructivedepthprofiling
techniques[9].Basedonexperimentalevidencesweknow
thatfortheoptimumapplicationofthesemethodsone
shouldapplylowenergyionbombardmentwithgrazing
angleofincidence(tominimizethesurfacemorphology
development).Thisarrangement,however,isfarfrom
thepreviousone.First,theangleofincidenceisgrazing
incontrasttonormalangleofincidence.Second,Pinzon
etal.[8]recentlyshowedbyMDcalculationthatthe
damagestructurechangeswithangleofincidence.At
grazingangleofincidenceionbombardmentthedefects
areconfinedclosetothesurface.
Anotherinterestingaspectofion-beammixingisthe-
oretical.Itisstillunclearwhetherthemechanismof
IMispurelyballisticorheatspikesplayessentialrole
inthemagnitudeofinterfacialmixing[1,2].Inparticu-
larwithinthethermalspike(TS)model[2]theheatof
mixing(∆Hm)isfoundtobeakeyquantityindetermin-
ingthemagnitudeofmixing.Theroleofheatofmixing
ongoverningmixingprocessesisquestionedbyR.Kelly
etal.[10].Theyemphasizedtheroleofresidualdefects
inmixing(longrangedeffects).Althoughthethermal
spikeconceptiswidelyaccepted,itsapplicabilityforlow-
energybombardmentsisnotstraightforward.MDsimu-
lationofcascadeshavebeenreportedwithevidencethat
localmeltingoccursduringthetermalspikephaseswhich
persistsforseveralpsinthe3−5keVenergyregime[11].