grams, AFOSR support basic research in materials and MEMS research, DARPA creates MUMPS foundry services with MCNC in 1993, NIST supports commercial foundries for CMOS and MEMS; ➢ In our country, “micron/nanometer manufacture technology national key laboratory” was founded in 1996; ➢ In 1992, Chris Pister (UCLA) creates first micromachined hinge, it’s features open possibilities for pseudo-3D structures and assembly; ➢ In 1992, MCNC starts the Multi User MEMS Process (MUMPS);
➢ In 1969, Westinghouse creates the “Resonant Gate FET” based on new microelectronics fabrication techniques;
➢ In 1970s, Bulk-etched silicon wafers used as pressure sensors;
Definition:
MEMS is the integration of electrical elements, mechanical elements, sensor, actuators on a common silicon substrate through micro fabrication technology. These system can sense, control and actuate on the micro scale, and function individually or in Saernrsoaryssgattohergeinnfeorramtateioenfffreocm ttsheoennvmiraocnrmeontsctharloeug.h
