最新负性光刻胶显影液(正庚烷)MSDS[整理]

BN308紫外负性光刻胶◆用途BN308系列紫外负型光刻胶是一类采用宽谱紫外线曝光的阴图型光致抗蚀剂，主要用于分立器件及其它微型器件的制作。

◆产品特点涂布性能：在多种基片上均有良好的粘附性感光性能：对宽谱紫外线(高压汞灯)敏感抗蚀性能：抗湿法腐蚀性能优异◆产品规格粘度(30℃),mPa.s膜厚(μm)(转速:4000转/分)留膜率(％)单项金属杂质(ppm)水份,％BN308-150140~170 2.5-2.8≥80≤1≤0.03BN308-300280~350 4.0-4.6≥80≤1≤0.03BN308-450440~500 4.8-5.4≥80≤1≤0.03◆参考使用工艺涂胶：旋转涂布，温度20℃～25℃，湿度60%以下前烘：对流烘箱，90℃，20min曝光：高压汞灯曝光，曝光量25-95 mj/cm2显影：BN负胶显影剂，室温浸入显影2～4min漂洗：BN负胶漂洗剂，室温浸入漂洗1～2min坚膜：对流烘箱，130～140℃，30min湿法腐蚀：依用户工艺而定去胶：BN负胶去膜剂，90~110℃，10~20minBN303紫外负性光刻胶◆用途BN303系列紫外负型光刻胶是一类采用宽谱紫外线曝光的阴图型光致抗蚀剂，主要用于中小规模集成电路、分立器件及其它微型器件的制作。

◆产品特点涂布性能：在多种基片上均有良好的粘附性 感光性能：对宽谱紫外线(高压汞灯)敏感分辨率：实用分辨率可达5μm抗蚀性能：抗湿法腐蚀性能良好◆产品规格粘度(30℃),mPa.s膜厚（μm）(转速:4000转/分)留膜率(％)单项金属杂质(ppm)水份，％BN303-3029.0±1.50.85～0.95≥60≤1≤0.02 BN303-4542.0±2.00.95~1.15≥60≤1≤0.02 BN303-6060.0±2.0 1.05～1.15≥65≤1≤0.02 BN303-60H60.0±2.0 1.3-1.5≥65≤1≤0.02 BN303-100100.0±10.0 2.0～2.3≥75≤1≤0.02 BN-303-100TS100.0±10.0 1.9~2.1≥75≤1≤0.02◆参考使用工艺涂胶：旋转涂布，温度20℃～25℃，湿度60%以下前烘：对流烘箱，80℃，20min曝光：高压汞灯曝光，曝光量15-35 mj/cm2显影：BN负胶显影剂，室温浸入显影1～2min漂洗：BN负胶漂洗剂,室温浸入漂洗1min坚膜：对流烘箱，130～140℃，30min湿法腐蚀：依用户工艺而定去胶：BN负胶去膜剂，90~110℃，10~20min。

SUZHOU RUIHONG ELECTRONIC CHEMICALS CO. LTDMaterial Safety Data SheetSection 1 - Product and Company IdentificationProduct Identification: RZJ-300(RZJ-390,RZJ-390PG.RZJ-390H,RZJ-304,RZJ-306) Manufacturer's Name: Suzhou Ruihong electronic chemicals co.,ltd.Manufacturer's Address: 81,Suli Road, Wuzhong district, Suzhou City, P. R. China. Manufacturer's Country: P. R. China.General Information Telephone: 0086-512-65284373, 65281007/FAX:0086-512-65279925 Emergency Telephone: 0086-512-65284373Section 2 - Composition/Information on IngredientsCOMPONENT CAS-NO. CONCENTTRATION Propyleneglycolmonomethyletheracetate 108-65-6 73%Cresol-Formaldehyde Novolak Resin 9016-83-5 21%6-Dizao-5, 6-Dihydoro-5-Oxo-1-Naphthalenesulfonic acid, Ester with 68510-93-0 6%2,3,4-TrihydroxybenzophenoneSection 3 - Hazards IdentificationFLAMMABLEIrritating to eyes.Classified as hazardous according to regulatory criteria.Japan Chemical Industry Association ClassificationFlammable liquidSection 4 - First Aid MeasuresINHALATION: Remove from exposure. If there is difficulty in breathing. Seek medical attention if symptoms persist.SKIN CONTACT: Wash skin with soap and water for at least 15 minutes while removing contaminated clothing and shoes. Get medical attention, if needed. Thoroughly clean and dry contaminated clothing and shoes before reuse.EYE CONTACT: Flush eyes with plenty of water for at least 15 minutes. Then get immediate medical attention.INGESTION: If person is unconscious, turn head to side. Never make an unconscious person vomit or drink fluids. When vomiting occurs, keep head lower than hips to help prevent aspiration. Contact local poison control center or physician immediately. Get medical attention. NOTE TO PHYSICIAN: Treat symptomatically.Section 5 - Fire Fighting MeasuresSUITABLE EXTINGUISHING MEDLA: Use water spray, foam, dry chemical or carbon dioxide . Keep containers and surroundings cool with spray.SPECIFIC HAZARDS DURING FIRE FLGHTING: This product may give rise to hazardous vapors in a fire. Vapors can travel a considerable distance to a source of ignition and result in flashback.SPECIAL PROTECTIVE EQUIPMENT FOR FIRE-FIGHTERS: Wear full protective clothing and self-contained breathing apparatus.FURTHER INFORMATION: Pressure may build up in closed containers with possible liberation of combustible vapors.Section 6 - Accidental Release MeasuresPERSONAL PRECAUTIONS:Wear suitable protective clothing.Wear respiratory protection.Eliminate all ignition sources.ENVIRONMENTAL PRECAUTIONS:Prevent the material from entering drains or water courses.Do not discharge directly to a water source.Advise Authorities if spillage has entered watercourse or sewer or has contaminated soil or vegetation .METHODS FOR CLEARING UP:Cover with absorbent or contain. Collect and dispose.Section 7 - Handling and StorageHANDLINGUse local exhaust ventilation. Avoid contact with eyes, skin and clothing. Keep container tightly Closed. Further information on storage conditions; Proprietary photo resist film contains approximately 2-4% of 2.3.4-trihydroxybenzophenone (THBP).Which may sublime duringsoft-bake or hard-bake processing. THBP has low acute toxicity (LD50>5g/kg). Contact with eyes. Skin or mucous membranes cause irritation. To prevent accumulation of THBP on equipment surfaces and ventilation ducts, preventative maintenance program including regular cleaning should be implemented. Wipe surfaces using an appropriate cleaning solvent when possible. Provide adequate general or local exhaust ventilation during the cleaning process. In situations where this is not possible or where solvent or dust concentrations become excessive. Use an air purifying respirator with an organic vapor/toxic particulate cartridge. When cleaning residual THBP, wear protective gloves and adequate protective clothing to prevent skin contact. Practice good personal hygiene to prevent accidental exposure. Clean all protective clothing and equipment thoroughly after each use.STORAGEStorage conditions; Store in original container. Keep away from heat and sources of ignition,Storage area should be cool dry well ventilated out of direct sunlightSection 8 - Exposure Controls & Personal ProtectionEXPOSURE LIMITS:Exposure limits are listed below, if they exist.Component Regulation Type of listing Value2-methoxy-1-methylethyl Rohm and Haas TWA 30ppm AcetateRohm and Haas STEL 90ppmRohm and Haas Absorbed via SkinOEL (EU) TWA 275mg/m3 50ppmOEL (EU) STEL 550mg/m3100ppmOEL (EU) SkinEXPOSURE CONTROLSEYE PROTACTION: gogglesHAND PROTECTION: Butyl rubber gloves. Other chemical resistant gloves may be recommended by your safety professional.SKIN AND BODY PROTECTION: Normal work wear.RESPIRATORY PROTOCTION: Respiratory protection if there is a risk of exposure to high vapor concentrations. The specific respirator selected must be based on the airborne concentration found in the workplace and must not exceed the working limits respirator. ENGINEERING MEASURES: Engineering methods to prevent or control exposure are preferred. Methods include process or personnel enclosure, mechanical ventilation (local exhaust), and control of process conditions.Section 9 - Physical & Chemical PropertiesPHYSICAL STATE: liquidCOLOR: Red AmberODOUR: Ester-likeBOILING POINT: ca.146℃FLASH POINT: 40-46℃VAPOR PRESSURE: 3.7 mmHg at 20℃RETATIVE DENSITY: 0.80-1.00WATER SOLUBILITY: InsolublePH: neutralEVAPORATION RATE: Slower than etherVOC’S:727-950 g/lNOTE: The Physical date presented above are typical values and should not be construed as a specification.Section 10 - Stability & Reactivity DataMATERLALS TO AVOID: Oxidizing agents.CONDITIONS TO AVOID: High temperatures Static discharge.HAZARDOUS: Combustion will generate; carbon monoxide, phenols.HAZARDOUS REACTIONS: Stable under normal conditions.POLYMERIZATION: Will not occur.DECOMPOSITION PRODUCTS: Nitrogen oxides (NOX), aldehydes, acrid smoke and irritating fumes.Section 11 - Toxicological InformationToxicological information on this product or its components appears in this section when such data is available.COMPONENT: 2-methoxy-1-methylethyl acetateAcute oral toxicity LD50 rat 8,532mg/kgCOMPONENT: 2-methoxy-1-methylethyl acetateAcute inhalation toxicity LC50 rat 6h 23.49mg/lCOMPONENT: 2-methoxy-1-methylethyl acetateAcute dermal toxicity LD50 rabbit >5,000 mg/kgCOMPONEN T: CresolAcute dermal toxicity LD50 rabbit >5,000 mg/kgCOMPONENT: 2-methoxy-1-methylethyl acetateTOXICITY TO REPRODUCTIONDermal teratology testing of this solvent (with less than 3% beta isomer) revealed no maternally toxic, teratogenic or fetotoxic responses in rats or rabbits exposed to concentrations of 1,000 and 2,000 mg/kg per day.COMPONENT: 2-methoxy-1-methylethyl acetateMUTAGENLELTYNo significant mutagenic response was observed and the carcinogenic potential of the material is therefore considered to be low.Section 12 - Ecological InformationEcotoxicologioal information on this product or its components appear in this section when such date is available.2-methoxy-1-methylethyl acetateEcotoxicity effectsToxicity to fish LC50 Fathead minnow (Pimephales promelas) 86h 161 mg/l Toxicity aquatic EC50 Daphnia magna 48hInvertebrates >500mg/lSection 13 - Disposal ConsiderationsENVIRONMENTAL PRECAUTIONS: Prevent the material from entering drains or water courses.Do not discharge directly to a water source.Advise Authorities if spillage has entered watercourse or sewer or has contaminated sell or vegetation.DISPOSALDispose in accordance with all local, state (provincial), and federal regulation.Do not remove label until container is thoroughly cleaned. Empty containers may contain hazardous residues. This material and its container must be disposed of in a safe way.Section 14 - MSDS Transport InformationTransport In Accordance With Fire Service Law etc.CLASSIFICATION FOR ROAD ANG RAIL TRANSPORT:Proper shipping name RESIN SOLUTIONUN-No. UN 1866Class 3Packing group ⅢCLASSIFICATION FOR SEA TRANSPORT (IMO-IMDG):Proper shipping name RESIN SOLUTIONUN-No. UN 1866Class 3Packing group ⅢCLASSIFICATION FOR TRANSPORT (IATA/ICAO):Consult current IATA regulations prior to shipping by air. Transportation classifications may vary by container volume and may be influenced by regional or county variations in regulationsSection 15 - Regulatory InformationLabelClassification and labeling have been performed according to regulations.Hazard symbol and indication of dangerXi IrritantContains: 2-methoxy-1-methylethyl acetateR-phrase(s)R10 FlammableR36 Irritating to eyesS-phrase(s)S26 Incase of contact with eyes, rinse immediately with plenty of water and seek Medical advice.S43 Incase of fire. Use sand, dry chemical or alcohol-resistant foam.S63 This material and its container must be disposed of as hazardous waste. JAPAN. KASHIN-HOU LAW LIST (ENCS): All intentional components are listed on the inventory, are exempt, or are supplier certified.US. TOXIC SUBSTANCES CONTROL ACT (TSCA): All components of this product are incompliance with the inventory listing requirements of the U.S. Toxic Substances Control Act (TSCA) Chemical Substance Inventory.JAPAN FIRE SERVICE LAWArticle 2, Dangerous Substance, Class 4 Second oil type, risk gradeⅢNo FireJAPAN WASTE DISPOSAL AND PUBLIC CLEANING LAWJapan Specific Controlled Industrial wasteSection 16 - Other InformationSuzhou Ruihong makes no express or implied warranties, guarantees or representations regarding the product or the information herein, including but not limited to any implied warranty of merchantability or fitness for use. Suzhou Ruihong shall not be liable for any personal injury, property or other damages of any nature, whether compensatory, consequential, exemplary, or otherwise, resulting from any publication, use or reliance upon the information herein.正性光刻胶组成成分: 6 Dizao - 5，6 - Dihydoro - 5 -氧- 1 -萘磺酸，与2,3,4酯，羟基二苯甲酮(6%);甲酚甲醛酚醛树脂(21%);2-甲基丙醇乙酸酯(73%)四甲基氢氧化胺显影液: CH13NO4负胶漂洗液:C6H12O2。

光刻胶配合物（正胶显影液正胶稀释剂SU8显影液RD-HMDSOMNICOAT）光刻胶配合物（正胶显影液/正胶稀释剂/SU8 显影液/RD-HMDS/OMNICOAT）光刻胶配套试剂品名主要成分包装应用正胶显影液TMAH 2.38% 4LR/PC 正胶显影液正胶稀释剂PGMEA 4LR/PC 稀释剂SU8 显影液PGMEA 4L/PC显影SU8光刻胶RD-HMDS HMDS 500ml/PC 增粘剂OMNICOAT 见MSDS 500ml/PCSU-8增粘剂光分解型光刻胶，采用含有重氮醌类化合物(DQN)材料作为感光剂，其经光照后,发生光分解反应，可以制成正性光刻胶；光交联型光刻胶采用聚乙烯醇月桂酸酯等作为光敏材料，在光的作用下，形成一种不溶性的网状结构，而起到抗蚀作用，可以制成负性光刻胶。

光分解反应示意图在半导体集成电路光刻技术开始使用深紫外（DUV）光源以后，化学放大（CAR）技术逐渐成为行业应用的主流。

在化学放大光刻胶技术中，树脂是具有化学基团保护因而难以溶解的聚乙烯。

化学放大光刻胶使用光致酸剂（PAG）作为光引发剂。

光交联反应示意图当光刻胶曝光后，曝光区域的光致酸剂（PAG）将会产生一种酸。

这种酸在后热烘培工序期间作为催化剂，将会移除树脂的保护基团从而使得树脂变得易于溶解。

化学放大光刻胶曝光速递是DQN光刻胶的10倍，对深紫外光源具有良好的光学敏感性，同时具有高对比度，对高分辨率等优点。

化学放大光反应示意图按照曝光波长分类；光刻胶可分为紫外光刻胶（300~450nm）、深紫外光刻胶（160~280nm）、极紫外光刻胶（EUV，13.5nm）、电子束光刻胶、离子束光刻胶、X射线光刻胶等。

不同曝光波长的光刻胶，其适用的光刻极限分辨率不同。

通常来说，在使用工艺方法一致的情况下，波长越短，加工分辨率越佳。

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