洁净度测试记录与标准由来
- 格式:xlsx
- 大小:1.51 MB
- 文档页数:1
NO.
国际单位英制单位
m3ft3m3ft3m3ft3m3ft3m3ft
3
1M13509.9175.72.1430.90.875100.283
2M1.511240352657.5106335.31
3M2350099.175721.43098.751002.83
4M2.5101240035026507510603035310
5M3350009917570214309087.5100028.3
6M3.510026500750106003003530100
7M47570021403090087510000283
8M4.510003530010002477
9M5100000283061817.5
10M5.51000035300010000247070
11M61000000283006180175
12M6.5100000353000010000024700700
13M710000000283000618001750
FS-209E 标准洁净度等级与《ISO/DIS14644-1国际标准》对照表
等级名称等 级 限 值50.10.20.30.5
容积单位容积单位容积单位容积单位容积单位