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TECHNICALPAPERPeristalticmicropumpsystemwithpiezoelectricactuatorsLing-ShengJangÆYung-ChiangYu
Received:15February2007/Accepted:15July2007/Publishedonline:3August2007ÓSpringer-Verlag2007
AbstractThisworkpresentsadrivingsystemforaperistalticmicropumpthatisbasedonpiezoelectricactua-tion.Theeffectsoftheactuationsequenceonpumpper-formancearealsoconsidered.Avalvelessperistalticmicropumpbasedonpiezoelectricactuationisdesignedandfabricatedusingmicroelectromechanicalsystemtechnol-ogy.Thepumphasthreeparts––silicon,PyrexglassandcommerciallyavailablebulkPZT(leadzirconatetitanate)chips.TheperistalticmicropumpactuatedbyPZTchipscomprisesthreechambersthatareinseries.ThedrivingsystemconsistsofanATmega8535microprocessor,ahighvoltagepowersupply,threedifferentialamplifiers,aphasecontroller,anA/Dconverter,a555oscillatorandanLCDmodule.Itissuppliedviaa110Vrms60-HzAClineandisprogrammable.Thesystemcanproducestep-functionsig-nalswithvoltagesofupto100Vppandfrequenciesrangingfrom10Hzto1kHz,astheinputsforthepump.Fluidpumpingwithairissuccessfullydemonstrated.Addition-ally,3-,4-and6-phaseactuationsequencesforthepumparedesignedandusedtostudytheeffectsonpumpper-formance,asrevealedbytheflowrateandthedisplacementofapumpdiaphragm.Theexperimentalresultsshowthattheflowrateandthedisplacementofthediaphragmactu-atedbythe4-phasesequenceexceedthoseactuatedbythe3-and6-phasesequences.Aflowrateof17.6llminÀ1andadisplacementof2.91lm(peak-to-peak)in4-phaseperistalticmotionareachievedat100Hzand100Vpp.Theresultsdemonstratethatthepumpactuatedinthe4-phasesequenceisthemostefficient.Consequently,theactuationsequencescanaffectthepumpperformance.
1IntroductionMicroelectromechanicalsystemtechnology(MEMS),specificallysensorsandactuators,isveryusefulforbio-medicalapplications(Greiherr1997).Astheimportanceofproteomics,genomicsanddrugdiscovery,microfluidicsystemshavebecomethesubjectofextensiveresearch.Microfluidicsystems,suchasmicrototalanalysissystems(lTAS),exploitMEMStechnologytoprovidesuchadvantagesaslowcost,smallsize,rapidresponse,highthroughput,lowpowerconsumption,reductionintheamountofreagentsrequiredandsmalldeadvolume(Tay2002).Micropumps,microvalvesandmicro-flowsensorsarecriticalcomponentsinmanipulatingfluidsonthemicro-scale.Themicropumpshavegreatpotentialinbiologicalapplications(Caoetal.2001;Liaoetal.2005).Inthelastdecade,variousmicropumpshavebeendevel-oped.Variousactuationmethodshavebeenusedinthedesignofmicropumps,includingthosebasedonpiezo-electrics(Anderssonaetal.2001;Jangetal.2007),elec-trostatics(Xieetal.2004;Francaisetal.1998),magnetics(Ahnetal.1995),shapememoryalloys(Shu2002)andthermalactuation(Tsaietal.2002).Piezoelectricactuationispromisingsinceithasrelativelysimplestructure,largeoutputpowerdensityandhighactuationstrength(Nguyenetal.2002).
L.-S.Jang(&)ÁY.-C.YuDepartmentofElectricalEngineeringandCenterforMicro/NanoScienceandTechnology,NationalChengKungUniversity,1UniversityRoad,Tainan701,Taiwane-mail:lsjang@ee.ncku.edu.tw
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MicrosystTechnol(2008)14:241–248DOI10.1007/s00542-007-0428-8Peristalticpumpshavemanyadvantagesoverotherpumpswhenusedinbiomedicalmicrosystems.Unlikecheck-valvepumps,peristalticpumpsdonotrequirepas-sivevalvestorectifyflow.Therefore,theparticlesandlivingcellsdonotsticktothevalvesorbecomedamagedbecauseperistalticpumpsdonothavemovingpartsintheirmicrochannels.Theriskofclogginginthechannelsisthusreduced.Thepumpingprincipleisbasedontheperistalticmotionofpumpchambers,whichsqueezesthefluidinthedesireddirection.Theoretically,theperistalticpumpsrequirethreeormorechamberswithreciprocatingmem-branes.Peristalticpumpsofbothairandwaterinmicro-fluidicchannelshavebeensuccessfullydeveloped(Husbandetal.2004;Leeetal.2004;Jan1990).Theseperistalticpumpstoleratebubbles,andcanperformself-primingandbidirectionaltransportation.Theperistalticpumpsbasedonpiezoelectricactuatorsarecommonlyoperatedbelowtheresonantfrequencyat10–100sofHertzusingsuchequipmentasafunctiongeneratorandapoweramplifier.Thedrivingequipmentistypicallybulky,cumbersome,hardtocarryinhandanddifficulttointegratewithothercomponents.Accordingly,anintegrateddrivingsystemformicropumpsisessentialtoportability,automationandintegration.Furthermore,anoptimizedactuationsequenceisrequiredtooperatetheperistalticmicropump.However,fewdatahavebeenpre-sentedonthestudyofthedrivingsystemandtheeffectsoftheactuationsequencesonpumpperformance.Thisworkdevelopsanintegrateddrivingsystemforperistalticmicropumpsthatisbasedonpiezoelectricactuation,andstudiestheinfluenceofactuationsequencesonpumpperformance,intermsofpumpingrateandthedisplacementofthediaphragm.Thisstudypresentsthedesign,fabrication,principlesofactuationsequences,drivingsystem,andpumpperformancewithworkingfluidofairforthe3-,4-and6-phaseactuationsequences.