镀膜真空术语中英文对照全集

  • 格式:pdf
  • 大小:216.44 KB
  • 文档页数:9

此为南玻一位资深工程师之多年积累,代为供大家互相学习。

镀膜真空术语全集1.标准环境条件 standard ambient condition:2.气体的标准状态 standard reference conditions forgases:3.压力(压强)p pressure:4.帕斯卡Pa pascal:5.托Torr torr:6.标准大气压atm standard atmosphere:7.毫巴mbar millibar:8.分压力 partial pressure:9.全压力 total pressure:10.真空 vacuum:11.真空度 degree of vacuum:12.真空区域 ranges of vacuum:13.气体 gas:14.非可凝气体 non-condensable gas:15.蒸汽vapor:16.饱和蒸汽压saturation vapor pressure:17.饱和度degree of saturation:18.饱和蒸汽saturated vapor:19.未饱和蒸汽unsaturated vapor:20.分子数密度n,m-3 number density of molecules:21.平均自由程ι、λ,m mean free path:22.碰撞率ψ collision rate:23.体积碰撞率χ volume collision rate:24.气体量G quantity of gas:25.气体的扩散 diffusion of gas:26.扩散系数D diffusion coefficient; diffusivity:27.粘滞流 viscous flow:28.粘滞系数η viscous factor:29.泊肖叶流 poiseuille flow:30.中间流 intermediate flow:31.分子流 molecular flow:32克努曾数 number of knudsen:33.分子泻流 molecular effusion; effusive flow:34.流逸 transpiration:35.热流逸 thermal transpiration:36.分子流率qN molecular flow rate; molecular flux:37.分子流率密度 molecular flow rate density; density of molecular flux:38.质量流率qm mass flow rare:39.流量qG throughput of gas:40.体积流率qV volume flow rate:41.摩尔流率qυ molar flow rate:42.麦克斯韦速度分布 maxwellian velocity distribution:43.传输几率Pc transmission probability:44.分子流导CN,UN molecular conductance:45.流导C,U conductance:46.固有流导Ci,Ui intrinsic conductance:47.流阻W resistance:48.吸附 sorption:49.表面吸附 adsorption:50.物理吸附physisorption:51.化学吸附 chemisorption:52.吸收absorption:53.适应系数α accommodation factor:54.入射率υ impingement rate:55.凝结率condensation rate:56.粘着率 sticking rate:57.粘着几率Ps sticking probability:58.滞留时间τ residence time:59.迁移 migration:60.解吸 desorption:61.去气 degassing:62.放气 outgassing:63.解吸或放气或去气速率qGU desorption or outgassing or degassing rate:64.蒸发率 evaporation rate:65.渗透 permeation:66.渗透率φ permeability:67.渗透系数P permeability coefficient2. 1.真空泵 vacuum pumps1-1.容积真空泵 positive displacement pump:⑴.气镇真空泵 gas ballast vacuum pump:⑵.油封(液封)真空泵oil sealed (liquid-sealed) vacuum pump:⑶.干封真空泵 dry-sealed vacuum pump:⑷.往复真空泵 piston vacuum pump:⑸.液环真空泵 liquid ring vacuum pump:⑹.旋片真空泵 sliding vane rotary vacuum pump:⑺.定片真空泵 rotary piston vacuum pump:⑻.滑阀真空泵 rotary plunger vacuum pump:⑼.余摆线真空泵 trochoidal vacuum pump:⑽.多室旋片真空泵 multi-chamber sliding vane rotary vacuum pump:⑾.罗茨真空泵 roots vacuum pump:1-2.动量传输泵 kinetic vacuum pump:⑴.牵引分子泵molecular drag pump:⑵.涡轮分子泵turbo molecular pump:⑶.喷射真空泵ejector vacuum pump:⑷.液体喷射真空泵liquid jet vacuum pump:⑸.气体喷射真空泵gas jet vacuum pump:⑹.蒸汽喷射真空泵vapor jet vacuum pump :⑺.扩散泵diffusion pump :⑻.自净化扩散泵self purifying diffusion pump:⑼.分馏扩散泵 fractionating diffusion pump :⑽.扩散喷射泵diffusion ejector pump :⑾.离子传输泵ion transfer pump:1-3.捕集真空泵 entrapment vacuum pump:⑴吸附泵adsorption pump:⑵.吸气剂泵 getter pump:⑶.升华(蒸发)泵 sublimation (evaporation)pump :⑷.吸气剂离子泵getter ion pump:⑸.蒸发离子泵 evaporation ion pump:⑹.溅射离子泵sputter ion pump:⑺.低温泵cryopump:2.真空泵零部件2-1.泵壳 pump case:2-2.入口 inlet:2-3.出口outlet:2-4.旋片(滑片、滑阀)vane; blade :2-5.排气阀discharge valve:2-6.气镇阀gas ballast valve:2-7.膨胀室expansion chamber:2-8.压缩室compression chamber:2-9.真空泵油 vacuum pump oil:2-10.泵液 pump fluid:2-11.喷嘴 nozzle:2-13.喷嘴扩张率nozzle expansion rate:2-14.喷嘴间隙面积 nozzle clearance area :2-15.喷嘴间隙nozzle clearance:2-16.射流jet:2-17.扩散器diffuser:2-18.扩散器喉部diffuser thoat:2-19.蒸汽导管vapor tube(pipe;chimney):2-20.喷嘴组件nozzle assembly:2-21.下裙skirt:3.附件3-1阱trap:⑴.冷阱 cold trap:⑵.吸附阱sorption trap:⑶.离子阱ion trap:⑷.冷冻升华阱 cryosublimation trap:3-2.挡板baffle:3-3.油分离器oil separator:3-4.油净化器oil purifier:3-5.冷凝器condenser:4.泵按工作分类4-1.主泵main pump:4-2.粗抽泵roughing vacuum pump:4-3.前级真空泵backing vacuum pump:4-4.粗(低)真空泵 roughing(low)vacuum pump:4-5.维持真空泵holding vacuum pump:4-6.高真空泵high vacuum pump:4-7.超高真空泵ultra-high vacuum pump:4-8.增压真空泵booster vacuum pump:5.真空泵特性5-1.真空泵的抽气速率(体积流率)s volume flow rate of a vacuum pump:5-2.真空泵的抽气量Q throughput of vacuum pump:。

5-3.起动压力starting pressure:5-4.前级压力 backing pressure :5-5.临界前级压力 critical backing pressure:5-6.最大前级压力maximum backing pressure:5-7.最大工作压力maximum working pressure:5-8.真空泵的极限压力ultimate pressure of a pump:5-9.压缩比compression ratio:5-10.何氏系数Ho coefficient:5-11.抽速系数speed factor:5-12.气体的反扩散back-diffusion of gas:5-13.泵液返流back-streaming of pump fluid:5-14.返流率back-streaming rate5-15.返迁移back-migration:5-16.爆腾bumping:5-17.水蒸气允许量qm water vapor tolerable load:5-18.最大允许水蒸气入口压力maximum tolerable water vapor inlet pressure:5-19.蒸汽喷射泵、扩散泵或扩散喷射泵的加热时间warm-up time for a vapor jet pump ora diffusion pump or a diffusion ejector pump:5-20.蒸汽喷射泵、扩散泵或扩散喷射泵的冷却时间cool-down time for a vapor jet pump or a diffusion pump or a diffusion ejector pump3. 1.一般术语1-1.压力计pressure gauge:1-2.真空计vacuum gauge:⑴.规头(规管)gauge head:⑵.裸规nude gauge :⑶.真空计控制单元gauge control unit :⑷.真空计指示单元gauge indicating unit :2.真空计一般分类2-1.压差式真空计differential vacuum gauge:2-2.绝对真空计 absolute vacuum gauge:2-3.全压真空计total pressure vacuum gauge:2-4.分压真空计;分压分析器partial pressure vacuum gauge; partial pressureanalyser:2-5.相对真空计relative vacuum gauge :3.真空计特性3-1.真空计测量范围pressure range of vacuum gauge:3-2.灵敏度系数sensitivity coefficient:3-4. 电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressureunits):3-5.规管光电流photon current of vacuum gauge head:3-6.等效氮压力equivalent nitrogen pressure :3-7.X射线极限值 X-ray limit:3-8.逆X射线效应anti X-ray effect:3-9.布利尔斯效应blears effect:4.全压真空计4-1.液位压力计liquid level manometer:4-2.弹性元件真空计elastic element vacuum gauge:4-3.压缩式真空计compression gauge:4-4.压力天平pressure balance:4-5.粘滞性真空计viscosity gauge :4-6.热传导真空计thermal conductivity vacuum gauge :4-7.热分子真空计thermo-molecular gauge:4-8.电离真空计ionization vacuum gauge:4-9.放射性电离真空计radioactive ionization gauge:4-10.冷阴极电离真空计cold cathode ionization gauge:4-11.潘宁真空计penning gauge:4-12.冷阴极磁控管真空计cold cathode magnetron gauge:4-13.放电管指示器discharge tube indicator:4-14.热阴极电离真空计hot cathode ionization gauge:4-15.三极管式真空计triode gauge:4-16.高压力电离(中真空)真空计high pressure (medium vacuum) ionization gauge:4-17.B-A型电离真空计Bayard-Alpert gauge:4-18.调制型电离真空计modulator gauge:4-19.抑制型电离真空计suppressor gauge:4-20.分离型电离真空计extractor gauge:4-21.弯注型电离真空计bent beam gauge:4-22.弹道型电离真空计 orbitron gauge :4-23.热阴极磁控管真空计hot cathode magnetron gauge:vacuum plating 真空镀膜; 真空敷涂法vacuum coating 真空镀膜; 真空涂层vacuum deposition 真空沉积; 真空淀积; 真空镀膜vacuuming metalling 真空镀膜vacuum evaporation coating 真空镀膜vacuum plating 真空镀膜vapor deposition 真空镀膜; 汽相沉淀evaporation coating 真空镀膜; 蒸发涂敷vacuum coating machine 真空镀膜机vacuum coating system 真空镀膜系统vacuum coater 真空镀膜装置high vacuum coating machine 高真空镀膜机high vacuum coating unit 高真空镀膜机high vacuum film plating table 高真空镀膜台ultrahigh vacuum coater 超高真空镀膜机box-type vacuum coating machine 箱式真空镀膜机oil-free ultra-high vacuum coating equipment 无油超高真空镀膜设备vacuum electroplating film machine 真空电镀膜机vacuum vapor plating 真空蒸发镀膜vaccum ion coater 真空离子镀膜机vacuum sputtering coated glass 真空溅射镀膜玻璃vacuum evaporation 真空喷镀; 真空蒸镀; 真空蒸发vacuum evaporating 真空喷镀; 真空蒸镀vacuum 真空; 真空装置; 真空吸尘器; 真空的vacuum metallizing 真空镀敷vacuum vapor deposition method 真空镀积法arsenic vacuum coating 砷真空镀层vacuum-deposited coating 真空镀敷法vacuum metallizing 真空镀敷金属vacuum casting 真空电流铸造机; 真空模铸; 真空外壳; 真空吸铸; 真空铸造high-vacuum evaporation technique 高真空蒸镀技术sputtering 溅射阴极真空喷镀; 阴极溅镀vacuum n.真空adj.真空的vt.用真空吸尘器打扫capsule type vacuum gauge 膜盒式真空计; 膜盒真空计vacuum tank 真空槽; 真空容器; 真空室; 整流器外壳; 抽气排水筒hollow cathode ion coater 中空阴极离子镀膜机vacuum cement 真空封泥; 真空气密水泥; 真空粘结剂evacuated capsule 真空膜盒aneroid cell 真空膜盒altitude capsule 高度计膜盒; 真空膜盒vacuum cleaner 真空除尘器; 真空净化器; 真空清洁器; 真空吸尘器vacuum vessel 真空瓶; 真空容器; 真空室vacuum deposited film 真空沉积膜capsule type vacuum gauge 膜盒真空计vacuum diaphragm chamber 真空膜片室capsule gauge 膜盒真空计vacuum 真空; 真空度稀薄的; 真空真空度真空吸尘器稀薄的vacuum diaphragm unit 真空膜片装置evacuated aneroid element 真空膜盒元件diaphragm vacuum gauge 膜片式真空计quartz membrane gauge 石英膜真空。