静电消除器使用说明书

第 1 页 共 2 页 使用静电消除器应注意的事项范本

1. 阅读和理解使用说明书：在使用静电消除器之前，仔细阅读并理解使用说明书。确保自己了解设备的工作原理、使用方法以及安全注意事项。

2. 确保安全操作：在操作和调整静电消除器时，确保自己采取适当的安全措施，如佩戴防静电手套、穿着防静电鞋，并保持工作区域干燥和整洁。

3. 避免接触高压部件：在使用静电消除器时，避免直接接触高压部件，以防止电击和其他安全事故。确保设备没有裸露的电线和其他高压部件。

4. 定期检查设备：定期检查静电消除器的工作状态和机械部件。确保所有零部件都完好无损，并及时更换损坏的部件。不要在设备损坏或存在故障的情况下继续使用。

5. 远离易燃物品：静电消除器产生的电流和电弧可能引发火灾，因此在使用静电消除器时，应远离易燃物品和易燃环境。确保工作区域通风良好，避免积聚可燃气体和蒸汽。

6. 保持设备干燥：静电消除器通常需要在干燥的环境中工作。避免将设备暴露在潮湿的环境中，以防止电器部件受潮损坏。

7. 遵守使用指南：根据使用指南的要求和建议，设置和调整静电消除器的参数。确保设备以最佳方式工作，以提供最有效的静电消除效果。 第 2 页 共 2 页 8. 定期维护和清洁：定期对静电消除器进行维护和清洁，以确保其长期有效工作。清除积聚的灰尘和污垢，并检查并更换过滤器和消耗品，如静电消除棒。

9. 避免违反法律法规：在使用静电消除器时，确保严格遵守相关的法律法规和安全标准。确保设备符合适用的安全认证和标准。

10. 定期接受培训：定期进行静电消除器的使用和安全培训，以提高自己的技能和知识。确保了解最新的安全技术和最佳实践。

总结起来，正确使用静电消除器需要仔细阅读操作说明，确保安全操作，定期检查设备并进行维护，远离易燃物并保持设备干燥，遵守使用指南和相关法律法规，接受培训以提高安全意识和技能。

Ionization SolutionsWWW.SIMCO-ION.CO

MModulated Pulse AeroBar®MODEL 5635MSimco-Ion’s Model 5635M AeroBar MP ionizing bar is specifically designed to eliminate static charge in semiconductor and other ultra-clean manufacturing processes where fast discharge time, low swing voltages and precision balance are required, but exposed metallic surfaces are not permitted. The Model 5635M utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 mm particles or nanoparticles) and ISO 14644 Class 1 (0.1 mm particles) cleanliness, critical for smaller technology nodes. For processes that do not require extreme cleanliness, the optional air-assist accelerates ion delivery, providing faster discharge times and performance over longer distances. MP technology is easy to adjust and features the ability to fine-tune voltage, frequency and balance to meet differing environmental and product sensitivity requirements. Shorter bars (<600 mm) feature 50 mm spacing between nozzles, to improve ion distribution in close applications. FeaturesBenefits• ISO 14644-12 (0.01 mm particles) cleanliness• Compatible with all wafer technology nodes including 14 nm and below• Modulated pulse technology• Precision balance, high ion output with long-term stability• Metal-free design “M”• Perfect for “No Metal” applications• Excellent lateral uniformity• Uniform balance across the AeroBar• Low field voltages• Safe placement as close as 150 mm of the wafer or reticle• Air-assist capability• Enhanced static charge neutralization at fast automation speeds• Optional software with easy-to-use interface with wide adjustability• Fast setup and easy optimization in any environment• Alarm output signal• Communicate to tool or facility monitoring system

963E-NO963E-XTB-9007 Page 1 of 3© 2015 DESCO INDUSTRIES, INC.Employee Owned

SCS - 926 JR Industrial Drive, Sanford, NC 27332 • (919) 718-0000 • Website: 963E Benchtop Air IonizerInstallation, Operation and Maintenance

DescriptionThe SCS 963E Benchtop Air Ionizer is a self-contained ionizing air blower designed to remove static charges from non-conductive objects. The proprietary circuitry contained in the blower generates balanced levels of positive and negative ions. The Ionizer is equipped with a two speed fan which allows the user to select the amount of ionized air to be delivered to the target object. The Benchtop Air Ionizer meets the required limits of ANSI/ESD S20.20 tested per ANSI/ESD STM3.1 or ESD TR53.PerformanceThe Benchtop Air Ionizer reduces a static charge of ± 1000V to ± 100V in less than two seconds (the discharge time) at a distance of one foot (30 cm) using the high fan speed. Testing is performed in accordance with the ionization standard ANSI/ESD STM3.1.Power RequirementsThe Benchtop Air Ionizer requires 24VDC power, which is supplied through a Mini DIN connector on the back of the unit. The Ionizer is packaged with a switching power supply, capable of converting 100V–240VAC, 50/60 Hz into 24VDC. The switching power supply uses a 6 ft. (1.8 m) cord to connect to the ionizer, and has an IEC 320 input socket for incoming power. It comes with a North American-style three-prong plug or Continental Europe (EURO) plug. Two versions are available depending on the power cord plug (European or North American). The Ionizer should only be used with the included power supply.September 2015 USER GUIDE TB-9007

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A compact shape for reducing workbench clutter

Compact size of 150 × 166 × 62 mm (5.906 × 6.535 × 2.441 in)

Low-volume fan type also available for various applications

Two exchangeable louvers to suit your needsAn ionizer with a 120 mm 4.724 in fan diameter that has a class leading compact size for reducing workbench clutter and increasing efficiency.Low-volume fan type with a suppressed fan speed of approx. half is available for charge removal in processes which involve handling of small parts or thin films.* Graphs represent typical values at 300 mm 11.811 in from directly in front of air outlet, straight louver, with no filter installed.