FDS9400资料

半导体刻蚀设备LAMTCP9400PMSOP

PM SOP - TCP 9400SE/PTX POLY ALLIANCE

ETCHER

1.0 Safety Highlights

All PM and corrective maintenance are only allowed to be perform by trained personnel or under strict guidance of the trainedpersonnel for trainees.

1.1Before start of PM, use SMS SMM06TJ1 or SMM17TJ1,put the

correct chamber to PM state. Input the reason for wet clean.

1.2Place a ‘Man at work –Plasma’ sign at working area throughout

the whole PM.

1.3Remember to purge the chm for 5-10 minutes with the in house

vacuum immediately when the chamber is vented for wet clean or

corrective maintenance.

1.4Remember to wear facemask with acid gas filter cartridge

during dismantling and while cleaning the dirty chamber or

parts.

1.5Please remember to wear SK gloves/chemical goggles glove while

using 100% IPA.

1.6Remember to use AK gloves/chemical goggles while using HF acid,

tmJuly 2007

©2007 Fairchild Semiconductor CorporationFDS9958 1FDS9958 Dual P-Channel PowerTrench

® MOSFETFDS9958

Dual P-Channel PowerTrench® MOSFET

-60V, -2.9A, 105mΩ

Features

󰂄Max rDS(on) =105mΩ at VGS = -10V, ID = -2.9A

󰂄Max rDS(on) =135mΩ at VGS = -4.5V, ID = -2.5A

󰂄RoHS CompliantGeneral Description

These P-channel logic level specified MOSFETs are produced using Fairchild Semiconductor’s advanced PowerTrench®

process that has been especially tailored to minimize the on-state resistance and yet maintain low gate charge for superior switching performance.

These devices are well suited for portable electronics applications: load switching and power management, battery charging and protection circuits.

Applications

󰂄Load Switch

󰂄Power Management

MOSFET Maximum Ratings TA = 25°C unless otherwise noted

CN9300, CN9400, CN9500 and CN9600 SeriesU Display Engineering Units °C, °F, bar, psi, pH, rH, SET (Universal Unit)U 4-Digit DisplayU 5 Alarm ConfigurationsU Single Ramp and SoakU PID Heat-Cool ControlU NEMA 4 (IP66) FaceplateU Sleeve MountingU Security LockoutsU Easy-to-UseCN9600 Series Unique FeaturesU Multi Ramp and Soak: 31 Programs, 126 SegmentsU Assured SoakU mA or V Linear InputsU mA or V Linear OutputsU Three Outputs StandardU Analog RetransmissionU High Accuracy ±0.1% Display of Linear InputOptionalU Factory or Field Installable RS232 or RS485 (MODBUS® Protocol) Communications U CN9-SW Charting and Remote Control SoftwareU Low Voltage Power (CN9300 and

CN9500 Only)P-33The new 1⁄32 DIN CN9500, 1⁄16 DIN CN9300 single display, 1⁄16 DIN CN9400 and CN9600 dual display controllers follow the OMEGA tradition of innovative design. The new CN9600 offers powerful process control and programmer capabilities. Building on the success of the CN132 and CN9000A series, the new models include several new features, the most important being the option of a low cost serial communicating system with easy to use Windows based software. The CN9-SW series software bridges the gap between the “stand alone” system and full SCADA of Fieldbus control networks by providing a facility for remote supervision of up to 128 instruments using MODBUS protocol. It requires only a modest investment and can be operated by anyone with a medium specification PC or laptop that can be run with Windows 95, 98 or Windows NT.Autotune Temperature/ Process Controllers

型号

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