TKS-MKS说明

Downstream Pressure Controllers and ValvesPRODUCT SELECTION GUIDE651, 1651, 153, 253, 653, aND hEaTED VaLVESIsolating and close-loop controlling each variable that affects a vacuum process is the best method for achieving process consistency. At MKS, we can isolate and close-loop control process pressure using a throttling control valve and a digital PID or self-tuning pressure controller. A typical pressure control system works as follows: (1) a Baratron ® capacitance manometer senses pressure in a vacuum chamber; (2) this pressure is then compared to the desired set point pressure in the pressure controller; and (3) the pressure controller commands the control valve to open or close, changing the chamber pressure and bringing it to the desired process pressure set point.No one pressure control technique is best for all applications, though the downstream control technique is chosen most often for today’s more critical vacuum processes (see chart below). With the downstream control technique, an exhaust throttle valve is opened or closed, changing the conductance to the vacuum pump in order to achieve and maintain the desired process pressure—independent of gas inlet. The downstream pressure control technique provides high dynamic range, works well with all types of vacuum pumps, provides fast response, is tolerant to most effluent gases, and has moderate initial costs.Pressure Control T echniquesValveW W W .M K S I N S T .C OM1651The 1651 is a display-less version of the 651 for OEMdesign engineers who wish to completely control theirprocess via a host computer. Offered as an economicalalternative to the 651, this “black box” version allowsfor remote setup or control entirely through rear panelinterface—RS-232, TTL, or analog. Its compact size allowsfor installation anywhere on the process system, savingvaluable rack space.651The 651 Self-tuning/Digital PID Valve Controller drives653 or 253 Exhaust Throttle Valves with speed andprecision. Its self-tuning algorithm brings the system toset point faster than conventional controllers, and ensuresrepeatable process recipes without operator involvement.The self-tuning function determines optimal controlparameters for any set point in the range of the valve bylearning time constants, transfer functions of the valve andplumbing, valve gain, and other important parameters.The 651 includes adjustable soft-start functions for eachset point, as well as open and close functions to minimizeturbulence in the chamber; local/remote transducerzeroing capability; and two relays to activate other systemfunctions, or to indicate if the pressure deviates fromthe desired set point. All controls are easily accessedvia a simple-to-use front panel, or remotely through RS-232, TTL, or analog voltage. An LCD readout showsvalve position and displays pressure in a wide range ofengineering units. Five reprogrammable set points areprovided for pressure or position control.Self-T uning/Digital PIDPressure ControllersPressure Controllers andExhaust Throttle Valves“Smart” Exhaust Throttle Valve253The 253 Exhaust Throttle Valve regulates the removal of gas from a processing system. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The 253 is available in standard sizes and flange styles, and is compatible with all MKS throttle valve controllers.Exhaust Throttle Valve153Specifically designed for computer-controlled applications where a simple pressure control system is desired, the 153 Valve integrates all control, communication, and driver circuits via a compact “add-on” electronics module within a 253 Throttle Valve assembly, eliminating the need for a separate pressure control electronics module. The 153 is operable in two modes, flapper positioning or pressure control.For DeviceNet ™ communications consult Applications Engineering on the 683.653The 653 high-speed motor and gear/driver assembly provides fast response to a given set point to quicklyachieve desired pressure and increase system throughput. High accuracy is attained by micro-stepping the flapper to give more precise control, and no drift, of pressure at the desired set point. The 653 has sufficient torque to operate sealing valves up to four inches and non-sealing valves to 12 inches to prevent clogging from contamination buildup. The valve body can be heated up to 150°C (using optional sealing materials) for operation in high temperature applications and processes. The 653 has a flapper position indicator to identify valve angle during systemtroubleshooting, is available in a variety of sizes and flangestyles, and is compatible with 651 and 1651 Controllers.Exhaust Throttle Valve withHigh-speed Motor/Gear AssemblyIPS SubsystemCurrent trends in semiconductor processing are towards less maintenance, more uptime, and increased product yield. Reduction of the solid buildup resulting from thecooling of effluent gases can be a factor in achieving those goals. Heating the valve and other components of the system is part of a method to manage these byproducts, increasing uptime, and improving wafer yields, with a quick payback.IPS offers subsystems to improve heat distribution on downstream lines while complying with strict agency andcorporate personnel safety standards.HeatersDownstream Pressure Controllers Pressure ControllerSpecifications651C 1651CValves Operated 653 and 253 Exhaust 653 and 253 ExhaustThrottle ValvesThrottle ValvesPressure Input Signal 0-10 VDC, 0-5 VDC, or 0-1 VDC, 0-5 VDC, 0-10 VDC, 0-1 VDC,selectableselectable Input Power Required 90-132 or 180-264 VAC, 50/60 Hz ±15 VDC ±5% Minimum Input CurrentFor 653 Valve: 1 Amp +transducercurrentFor 253 Valve: 0.5 Amp + transducer current Maximum Input CurrentNot to exceed 7 AmpsSet PointsProgrammable 5 total, programmable in any5 total, programmable in anycombination for pressure or combination for pressure or position (adjustable from the position (adjustable via RS-232;front panel or RS-232; selectable selectable via TTL or RS-232)from the front panel, TTL,or RS-232)External analog 1; pressure or position, 1; pressure or position,0-5 or 0-10 VDC0-5 or 0-10 VDC Controller Repeatability±0.1% of F .S.±0.1% of F .S.ambient Operating Temperature 15°-40°C (60°-104°F)15°-50°C (60°-122°F)Output PowerStandard:±15VDC±********Available to external transducers: (Derated to 0.4 Amp with 90-99±15 Volts @ 3 Amps max. (90 Watts) or 180-198 VAC input) when powered from an external power supply withOptional: ±15 VDC ±5% @ 1.5a capacity of ±15 Volts @ 5 Amps (150Ampsmax. Watts)analog Output Signal0-5 or 0-10 VDC for 0-100% 0-5 or 0-10 VDC for 0-100%valve position and 0-10 VDC valve position and 0-10 VDCfor 0-100% F .S. pressure for 0-100% F .S. pressure Size1/2-rack packaging: 3 1/2” H x 6.7”W x 9.15”D3-1/2”H x 9-1/2”W x 9”DDisplay2-line LCD with 4-1/2 place readout N/A(pressure and valve position)Display Units T orr, mT orr, mbar, Pascal, N/A cmH 2O, inH 2O, µbar, kPaSoft StartStandard Standard Self-tuning Unit Standard Standard PID Control Standard Standard Remote Zero Standard StandardInterface Front panel, Analog, TTLAnalog, TTL (16 inputs, 6 outputs)(16 inputs, 6 outputs) and RS-232 and RS-232Relay Outputs 2, process limits: 24 Volts AC/DC 2, process limits: 24 Volts VDC @@ 1 Amp resistive1 Amp resistive Remote Control Override Standard Standard (Open, Close, hold)Position Control Capability Standard StandardConnectors Valve: 9-pin Type “D” female Power Connector: 9-pin Type “D” male I/O: 37-pin Type “D” femaleValve: 9-pin Type “D” female Transducer: 15-pin Type “D” female I/O: 37-pin Type “D” female RS-232: 9-pin Type “D” male Transducer: 15-pin Type “D” femaleRS-232: 9-pin Type “D” male ComplianceCECE653B 253B Speed (open to close) 1.7 sec Standard: 7.5 sec. Optional: <2 sec. (Note 1)Resolution1/12,000 Standard: 1/10,000Fast Motor Option: 1/2800Drive MethodDirect gear drive Mechanical (non belt) drive with integral cosinegenerator to linearize valve transfer characteristic Maximum Valve Body Standard: 0°C-100°C 0°-90°C Operating Temperature Optional: 0°C-150°C (Note 1)Valve Motor ambient -20°C to +40°C 0°C-70°C max. Operating Temperature Differential Pressure 1 atm. (15 psig) max. 1 atm. (15 psig) across Valve External Leakage at 1x10-8 scc/sec He1x10-7 scc/sec He Shaft SealMaterials Exposed Standard: 316L S.S., Viton ® (Note 2) 316 S.S., Viton (Note 2) to ProcessCompatible Controller651, 1651651, 1651, 153Visual Position Indicator Standard N/ADrive Output Torque 800 in-oz Standard speed: 600 in-oz (with 651 Controller)High-speed: 170 in-oz Closed Leakage <10-7 (T orr l/s) <10-7 (Torr l/s)(valves with a flapper o-ring) Notes:1) Consistent with shaft seal and flapper seal o-ring material.2) Where Viton is used, other materials are available.Contact Applications Engineering.Throttle Valve Specifications (Common to All Sizes & Flanges)Notes:1) Fast Motor Option only available onnon-sealing valves.2) Where Viton is used, other materials are available. Contact Applications Engineering.Dimensional Drawings Exhaust Throttle Valve Sizes and Flange Styles ASA Flanges253B(a) (B) (C) (D) (E)(**)Nominal NumberFlangeFlange Controllable PartMounting Inside Outside Bolt hole of Bolt Overall Bolt Circle O-ring Flapper O-ring Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height* Diameter Groove ID O-ring Parker No. min (max)253B-2-2-1 2” ASA 1.88 (48) 5.95 (151) 0.75 (19) 0.75 (19) 4 10.79 (274) 4.750 (121) 3.365 (85) Y es 2-237 0.35 300253B-2-2-2 2” ASA 1.95 (50) 5.95 (151) 0.75 (19) 0.75 (19) 4 10.79 (274) 4.750 (121) 3.365 (85) No 2-237 0.7 300253B-60-2-2 2” ASA 2.362 (60) 5.95 (151) 0.75 (19) 0.75 (19) 4 10.79 (274) 4.750 (121) 3.365 (85) No 2-237 0.8 375253B-3-2-2 2” ASA 3.025 (77) 5.95 (151) 0.75 (19) 0.75 (19) 4 10.79 (274) 4.750 (121) 3.365 (85) No 2-237 1 500253B-3-3-2 3” ASA 3.025 (77)7.40 (188)0.88 (22) 0.75 (19) 4 12.24 (311) 6.000 (152) 4.475 (114) No 2-349 1 500253B-3-3-2 3” ASA 3.965 (101) 7.40 (188) 0.88 (22) 0.75 (19) 4 12.24 (311) 6.000 (152) 4.475 (114) No 2-349 1.5 950253B-4-4-24” ASA3.965 (101) 8.90 (226)0.88 (22)0.75 (19)813.74 (349) 7.500 (191) 5.995 (152)No2-258 1.5 950*For 153 Valves, add 1.93” (49mm) to the 253 Dimension** Molecular flow regime653B(a) (B) (C) (D) (E) (**)Nominal Number FlangeFlange Controllable Part Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle O-ring Flapper O-ring Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height Diameter Groove ID O-ring Parker No. min (max)653B-2-2-1 2” ASA 1.886 (48) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) Y es 2-237 0.35 300653B-2-2-2 2” ASA 1.886 (48) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) No 2-237 0.7 300653B-60-2-1 2” ASA 2.360 (60) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) Y es 2-237 0.4 375653B-60-2-1 2” ASA 2.360 (60) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) Nos 2-237 0.8 375653B-3-2-1 2” ASA 2.886 (73) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) Y es 2-237 0.5 500653B-3-2-2 2” ASA 2.886 (73) 5.95 (151) 1.00 (25) 0.75 (19) 4 12.53 (318) 4.750 (121) 3.365 (85) No 2-237 1 500653B-3-3-1 3” ASA 2.886 (73) 7.40 (188) 1.00 (25) 0.75 (19) 4 14.02 (356) 6.000 (152) 4.475 (114) Y es 2-349 0.75 500653B-3-3-2 3” ASA 2.886 (73) 7.40 (188) 1.00 (25) 0.75 (19) 4 14.02 (356) 6.000 (152) 4.475 (114) No 2-349 1 500653B-4-3-1 3” ASA 3.885 (99) 7.40 (188) 1.00 (25) 0.75 (19) 4 14.02 (356) 6.000 (152) 4.475 (114) Y es 2-349 0.75 950653B-4-3-2 3” ASA 3.885 (99) 7.40 (188) 1.00 (25) 0.75 (19) 4 14.02 (356) 6.000 (152) 4.475 (114) No 2-349 1.5 950653B-4-4-1 4” ASA 3.885 (99) 8.90 (226) 1.00 (25) 0.75 (19) 8 15.54 (395) 7.500 (191) 5.995 (152) Y es 2-258 0.75 950653B-4-4-2 4” ASA 3.885 (99)8.90 (226)1.00 (25) 0.75 (19) 8 15.54 (395) 7.500 (191) 5.995 (152) No 2-258 1.5 950653B-6-4-1 4” ASA 5.503 (140) 8.90 (226)1.62 (41)0.75 (19) 8 16.16 (410) 7.500 (191) 5.995 (152) No 2-258 4 2150653B-6-6-2 6” ASA 5.869 (149) 10.90 (277) 1.62 (41) 0.88 (22) 8 18.18 (462) 9.500 (241) 8.000 (203) No 2-266 4 2150653B-8-6-2 6” ASA 7.636 (194) 10.90 (277) 1.62 (41) 0.88 (22) 8 18.18 (462) 9.500 (241) 8.000 (203) No 2-266 6 3600653B-8-8-28” ASA7.636 (194) 13.19 (335) 1.62 (41) 0.88 (22) 8 20.48 (520 11.750 (298) 9.750 (248)No2-273 8 3600653B-10-10-2 10” ASA 10.118 (257) 16.00 (406) 1.62 (41)1.00 (25)1223.31 (592)14.250 (362) 11.938 (362) No2-278106400Dimensions in inches (mm)** Molecular flow regimeCF Flanges253B(a) (B) (C) (D) (E) (**)Nominal Number ControllablePart Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle Flapper Conductance l/sheight*DiameterO-ringholesmin (max)DiameterDiameterNumber FlangeThicknessDiameter253B-20-2CF-1 2 3/4” CF 0.779 (20) 2.75 (70) 1.25 (32) 0.26 (6.6) 6 8.64 (220) 2.312 (59) Y es 0.07 24 253B-20-2CF-2 2 3/4” CF 0.779 (20) 2.75 (70) 1.25 (32) 0.26 (6.6) 6 8.64 (220) 2.312 (59) No 0.25 31 253B-1-2CF-1 2 3/4” CF 1.270 (32) 2.75 (70) 1.25 (32) 0.26 (6.6) 6 8.64 (220) 2.312 (59) Y es 0.2 50 253B-1-2CF-2 2 3/4” CF 1.270 (32) 2.75 (70) 1.25 (32) 0.26 (6.6) 6 8.64 (220) 2.312 (59) No 0.4 55 253B-2-3CF-1 3 3/8” CF 1.889 (48) 3.25 (83) 1.06 (27) 0.33 (8.3) 8 9.14 (232) 2.850 (72) Y es 0.35 300 253B-2-3CF-2 3 3/8” CF 2.000 (51) 3.25 (83) 1.06 (27) 0.33 (8.3) 8 9.14 (232) 2.850 (72) No 0.7 300 253B-2-4CF-2 4 1/2” CF 2.000 (51) 4.47 (114) 1.00 (25) 0.33 (8.3) 8 10.36 (263) 3.628 (92) No 0.7 300 253B-3-6CF-26” CF 3.000 (76) 7.40 (188) 0.81 (21) 0.33 (8.3) 16 12.24 (311) 5.128 (130) No 1 500 253B-4-6CF-26” CF 3.875 (98) 7.40 (188) 0.94 (24) 0.33 (8.3) 16 12.24 (311) 5.128 (130) No 1.5 900 *For 153 Valves, add 1.93” (49mm) to the 253 Dimension** Molecular flow regime653B(a) (B) (C) (D) (E) (**)Nominal Number ControllablePart Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle Flapper Conductance l/s Number FlangeDiameterO-ringmin (max)holesheightDiameterDiameterDiameterThickness653B-20-2CF-1 2 3/4” CF 0.779 (20) 2.75 (70) 1.00 (25) 0.27 (6.8) 6 10.55 (268) 2.312 (59) Y es 0.07 24 653B-20-2CF-2 2 3/4” CF 0.779 (20) 2.75 (70) 1.00 (25) 0.27 (6.8) 6 10.55 (268) 2.312 (59) No 0.25 31 653B-1-2CF-1 2 3/4” CF 1.270 (32) 2.75 (70) 1.00 (25) 0.27 (6.8) 6 10.55 (268) 2.312 (59) Y es 0.2 50 653B-1-2CF-2 2 3/4” CF 1.270 (32) 2.75 (70) 1.00 (25) 0.27 (6.8) 6 10.55 (268) 2.312 (59) No 0.4 55 653B-2-3CF-1 3 3/8” CF 1.886 (48) 3.25 (83) 1.00 (25) 0.34 (8.6) 8 11.05 (281) 2.850 (72) Y es 0.35 300 653B-2-3CF-2 3 3/8” CF 1.886 (48) 3.25 (83) 1.00 (25) 0.34 (8.6) 8 11.05 (281) 2.850 (72) No 0.7 300 653B-2-4CF-1 4 1/2” CF 1.886 (48) 4.47 (114) 1.00 (25) 0.34 (8.6) 8 12.28 (312) 3.628 (92) Y es 0.35 300 653B-2-4CF-2 4 1/2” CF 1.886 (48) 4.47 (114) 1.00 (25) 0.34 (8.6) 8 12.28 (312) 3.628 (92) No 0.7 300 653B-3-6CF-16” CF 2.886 (73) 7.40 (188) 1.00 (25) 0.33 (84) 16 14.07 (357) 5.128 (130) Y es 0.5 500 653B-3-6CF-26” CF 2.886 (73) 7.40 (188) 1.00 (25) 0.33 (84) 16 14.07 (357) 5.128 (130) No 1 500 653B-4-6CF-16” CF 3.885 (99) 7.40 (188) 1.00 (25) 0.33 (84) 16 14.07 (357) 5.128 (130) Y es 0.75 900 653B-4-6CF-26” CF 3.885 (99) 7.40 (188) 1.00 (25) 0.33 (84) 16 14.07 (357) 5.128 (130) No 1.5 900 653B-6-8CF-28” CF 5.869 (149) 8.90 (226) 1.62 (41) 0.33 (.84) 20 17.13 (435) 7.128 (181) No 2 2100 653B-8-10CF-210” CF 7.650 (194) 11.22 (285) 1.62 (41) 0.33 (8.4) 24 18.90 (480) 9.128 (232) No 3 3750 Dimensions in inches (mm)** Molecular flow regimeDownstream Pressure Controllers Exhaust Throttle Valve Sizesand Flange Styles ISO Flanges253B(a)(B) (C) (D) (E)(**) Nominal Number Controllable PartMounting InsideOutside Bolt hole of Bolt Overall Bolt Circle Flapper Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height* Diameter O-ring min (max)253B-20-40-1 ISO KF-40 0.779 (20) 2.75 (70) 2.25 (57) N/A N/A 8.64 (219) N/A Y es 0.07 24253B-20-40-2 ISO KF-40 0.779 (20) 2.75 (70) 2.25 (57) N/A N/A 8.64 (219) N/A No 0.25 31253B-1-40-1 ISO KF-40 1.270 (32) 2.75 (70) 2.25 (57) N/A N/A 8.64 (219) N/A Y es 0.2 50253B-1-40-2 ISO KF-40 1.770 (32) 2.75 (70) 2.25 (57) N/A N/A 8.64 (219) N/A No 0.4 55235B-2-50-1 ISO KF-50 1.888 (48) 3.25 (83) 2.00 (51) N/A N/A 9.14 (232) N/A Y es 0.35 300235B-2-50-2 ISO KF-50 2.000 (51) 3.25 (83) 2.00 (51) N/A N/A 9.14 (232) N/A No 0.7 300253B-60-63-2 ISO NW-63 2.362 (60) 5.95 (151) 0.81 (21) 0.35 (9) 4 10.79 (274) 4.330 (110) No 0.8 375253B-3-80-2 ISO NW-80 3.000 (76) 5.95 (151) 0.81 (21) 0.35 (9) 8 10.79 (274) 4.920 (125) No 1 500253B-4-100-2ISO NW-1003.875 (98)7.40 (188)0.94 (24) 0.35 (9) 8 12.24 (311) 5.710 (145) No 1.5 900*For 153 Valves, add 1.93” (49mm) to the 253 Dimension** Molecular flow regime653B(a) (B) (C) (D) (E)(**) Nominal Number Controllable Part Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle Flapper Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height Diameter O-ring min (max)653B-20-40-1 ISO KF-40 0.779 (20) 2.75 (70) 2.25 (57) N/A N/A 10.58 (268) N/A Y es 0.07 24 653B-20-40-2 ISO KF-40 0.779 (20) 2.75 (70) 2.25 (57) N/A N/A 10.58 (268) N/A No 0.25 31 653B-1-40-1 ISO KF-40 1.270 (32) 2.75 (70) 2.25 (57) N/A N/A 10.58 (268) N/A Y es 0.2 50653B-1-40-2 ISO KF-40 1.270 (32) 2.75 (70) 2.25 (57) N/A N/A 10.58 (268) N/A No 0.4 55 653B-2-50-1 ISO KF-50 1.886 (48) 3.25 (83) 2.00 (51) N/A N/A 11.06 (281) N/A Y es 0.35 300653B-2-50-2 ISO KF-50 1.886 (48) 3.25 (83) 2.00 (51) N/A N/A 11.06 (281) N/A No 0.7 300653B-60-63-1 ISO NW-63 2.360 (60) 5.95 (151) 1.00 (25) 0.35 (9) 4 12.53 (318) 4.330 (110) Y es 0.4 375653B-60-63-2 ISO NW-63 2.360 (60) 5.95 (151) 1.00 (25) 0.35 (9) 4 12.53 (318) 4.330 (110) No 0.8 375653B-3-80-1 ISO NW-80 2.886 (74) 5.95 (151) 1.00 (25) 0.35 (9) 8 12.53 (318) 4.920 (125) Y es 0.5 500653B-3-80-2 ISO NW-80 2.886 (74) 5.95 (151) 1.00 (25) 0.35 (9) 8 12.53 (318) 4.920 (125) No 1 500653B-4-100-1 ISO NW-100 3.885 (99) 7.40 (1.88) 1.00 (25) 0.35 (9) 8 14.02 (356) 5.710 (145) Y es 0.75 950653B-4-100-2 ISO NW-100 3.885 (99) 7.40 (1.88) 1.00 (25) 0.35 (9) 8 14.02 (356) 5.710 (145) No 1.5 900653B-6-160-2 ISO NW-160 5.869 (149) 8.90 (226) 1.62 (41) 0.43 (11) 8 16.16 (410) 7.870 (200) No 4 2100653B-8-200-2 ISO NW-200 7.650 (194) 11.22 (285) 1.62 (41) 0.43 (11) 12 18.50 (470) 10.240 (260) No 6 3750653B-10-250-2 ISO NW-250 9.700 (246)13.19 (335)1.62 (41) 0.43 (11) 12 20.48 (520) 12.200 (310) No 8 6000653B-12-320-2ISO NW-32012.370 (314) 16.73 (425) 1.62 (41) 0.55 (14) 12 24.02 (610) 15.55 (395) No 10 9300Dimensions in inches (mm)** Molecular flow regimeJIS Flanges253B(**)Flange Controllable Nominal Number FlangePart Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle O-ring O-ring Flapper Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height* Diameter Groove ID Size (JIS) O-ring min (max)253B-2-50J-1JIS 50mm 1.888 (48) 4.47 (114) 1.00 (25) 0.39 (10) 4 10.36 (263) 3.937 (100) 2.766 (70) 2.765 x 0.157 Y es 0.35 300(4)x(70)253B-2-50J-2JIS 50mm 2.000 (51) 4.47 (114) 1.00 (25) 0.39 (10) 4 10.36 (263) 3.937 (100) 2.766 (70) 2.765 x 0.157 No 0.35 300(4)x(70)253B-4-100J-2JIS 50mm 3.875 (98) 7.40 (188) 0.94 (24) 0.47 (12) 8 13.29 (338) 6.299 (160) 4.724 (120) 4.724 x 0.157 No 0.35 300(4)x(120)*For 153 Valves, add 1.93” (49mm) to the 253 Dimension** Molecular flow regime653BNominal Number Flange Flange Controllable (**)Part Mounting Inside Outside Bolt hole of Bolt Overall Bolt Circle O-ring O-ring Flapper Conductance l/s Number Flange Diameter Diameter Thickness Diameter holes height Diameter Groove ID Size (JIS) O-ring min (max)653B-2-50J-1JIS 50mm 1.886 (48) 4.47 (114) 1.00 (25) 0.39 (10) 4 12.27 (312) 3.937 (100) 2.766 (70) 2.756 x 0.157 Y es 0.35 300(4)x(70)653B-2-50J-2JIS 50mm 1.886 (48) 4.47 (114) 1.00 (25) 0.39 (10) 4 12.27 (312) 3.937 (100) 2.766 (70) 2.756 x 0.157 No 0.7 300(4)(70)x653B-4-100J-1JIS 100mm 3.8865 (99) 7.28 (185) 1.00 (25) 0.47 (12) 8 13.90 (353) 6.299 (160) 4.724 (120) 4.724 x 0.157 Y es 0.75 950(4)x(120)653B-4-100J-2JIS 100mm 3.8865 (99) 7.28 (185) 1.00 (25) 0.47 (12) 8 13.90 (353) 6.299 (160) 4.724 (120) 4.724 x 0.157 No 1.5 900(4)x(120)653B-6-150J-2JIS 150mm 5.709 (145) 9.25 (235) 1.62 (41) 0.47 (12) 8 16.51 (419) 8.268 (210) 6.890 (175) 6.890 x 0.157 No 2 2100(4)x(173)653B-8-200J-2JIS 200mm 7.677 (195) 11.81 (300) 1.62 (41) 0.59 (15) 8 19.09 (485) 10.630 (270) 8.858 (225) 8.761 x 0.236 No 3 3600(6)(223)x653B-10-250J-2JIS 250mm 9.645 (245) 13.78 (350) 1.62 (41) 0.59 (15) 12 21.08 (535) 12.598 (320) 10.827 (275) 10.709 x 0.236 No 4 6000(6)x(272)653B-12-300J-2JIS 300mm 11.597 (295) 15.75 (400) 1.62 (41) 0.59 (15) 12 23.02 (585) 14.566 (370) 12.795 (325) 12.795 x 0.236 No 5 8600(6)(322)xDimensions in inches (mm)** Molecular flow regimeThrottle Valve Heater KitsNW40Voltage Temp. LTa Watts amps Kit# (253 & 653) 120 VAC 150°C No 59 0.49 55-0361120 VAC 150°C Y es 59 0.49 55-0362120 VAC 105°C No 59 0.49 55-0363120 VAC 105°C Y es 59 0.49 55-0364240 VAC 150°C No 59 0.25 55-0367240 VAC 150°C Y es 59 0.25 55-0368240 VAC 105°C No 59 0.25 55-0369240 VAC 105°C Y es 59 0.25 55-0370NW50Voltage Temp. LTa Watts amps Kit# (253 & 653) 120 VAC 150°C No 68 0.57 55-0371120 VAC 150°C Y es 68 0.57 55-0372120 VAC 105°C No 68 0.57 55-0373120 VAC 105°C Y es 68 0.57 55-0374240 VAC 150°C No 68 0.28 55-0377240 VAC 150°C Y es 68 0.28 55-0378240 VAC 105°C No 68 0.28 55-0379240 VAC 105°C Y es 68 0.28 55-0380 NW80*Voltage Temp. LTa Watts amps Kit# 253 Kit# 653 120 VAC 150°C No 104 0.87 55-0172 55-0176 120 VAC 150°C Y es 104 0.87 55-0173 55-0177 120 VAC 105°C No 104 0.87 55-0170 55-0174 120 VAC 105°C Y es 104 0.87 55-0171 55-0175240 VAC 150°C No 104 0.43 55-0221 55-0225 240 VAC 150°C Y es 104 0.43 55-0222 55-0226 240 VAC 105°C No 104 0.43 55-0223 55-0227 240 VAC 105°C Y es 104 0.43 55-0224 55-0228NW100**Voltage Temp. LTa Watts amps Kit# 253 Kit# 653 120 VAC 150°C No 123 1.02 55-0251 55-0255 120 VAC 150°C Y es 123 1.02 55-0252 55-0256 120 VAC 105°C No 123 1.02 55-0253 55-0257 120 VAC 105°C Y es 123 1.02 55-0254 55-0258240 VAC 150°C No 123 0.51 55-0261 55-0265 240 VAC 150°C Y es 123 0.51 55-0262 55-0266 240 VAC 105°C No 123 0.51 55-0263 55-0267 240 VAC 105°C Y es 123 0.51 55-0264 55-0268NW63Voltage Temp. LTa Watts amps Kit# 253 Kit# 653 120 VAC 150°C No 104 0.87 55-0721 55-0731 120 VAC 150°C Y es 104 0.87 55-0722 55-0732 120 VAC 105°C No 104 0.87 55-0723 55-0733 120 VAC 105°C Y es 104 0.87 55-0724 55-0734240 VAC 150°C No 104 0.43 55-0727 55-0737 240 VAC 150°C Y es 104 0.43 55-0728 55-0738 240 VAC 105°C No 104 0.43 55-0729 55-0739 240 VAC 105°C Y es 104 0.43 55-0730 55-0740Heater SpecificationsTemperatureNominal Set Point 150°C 105°CExterior Range 60-70°C 45-55°CInterior Range 130-170°C 90-120°C Electrical Duty Cycle100 volts 72%120 volts 50%Foam Thickness0.5 in. (12.7mm)Materials Molded silicone foam, fiberglassreinforced silicone,T eflon insulatedwireRelative humidity90% MaximumConnectors Midget Twist-Lock, nylonNEMA ML-1Weight Range0.5 to 3.3 lb (0.73 to 1.5 kg) Compliance CE, UL E52951L T A Monitor SpecificationsEnclosure Black PlasticPower Requirements90-130 VAC input, 12 VDC ±3 VDCoutputPower Consumption0.3 WRelay Contact Rating SPDT, 2A @ 50 VAC resistive1@30 VDCInput/Output Wiring 1 Thermal switch line IN2 Thermal switch line OUT3 Normally closed4 Common5 Normally openDimensions 2.58” x 4.76” x 1.46” (inches) (L x H x D) 66 x 121 x 37 (mm)Compliance CEKits include any special hardware required, such as clamps.LT A- Low T emperature Alarm*Valve Heater designed to mate with heater on 3” tubing (consultfor other size tubing)**Valve Heater designed to mate with heater on 4” tubing (consultfor other size tubing)Note: Heaters can only be used with valves that are configured foruse at higher temperatures. T o obtain the order code for a heat-able throttle valve, place the letter “A” in place of the last “-” in thepart number.Example: 253B-20-40-1Becomes253B-20-40A1ASA Flange253, 653CF Flange253, 653Pressure Controller Specifications Dimensional DrawingsISO NW Flange253, 653ISO KF Flange253, 653JIS Flange253, 653153Heater Kitf or 653 Throttle ValveDimensional DrawingsPressure Controller1651Mounting bracketpositioned on front panelMounting bracketpositioned on side of unit9.40(238.8)0.88(22.4)1.63(41.5)0.40(10.2) 3.51(89.0)3.50(88.9)1.75 (19.1)9.25(234.9)Mounting bracketpositioned on front panelMounting bracket positioned on side of unit4.45(113.1)5.21(132.4)9.15(232.4)9.40(238.8)6.12(155.5)6.71(170.5)Slots 0.22x0.66 (5.5x16.7)Optional position for mounting bracketsDeviceNet™ Model6.71 (170.5)6.12 (155.5)3.38(86.0)1.63(41.5)6518.00(203 mm)3.38(86 mm)8.875(226 mm)9.469(241 mm)0.23(6 mm)3.00(76 mm)3.469(88 mm)9.00(229mm )Note: allow 2.5" (63 mm) clearance behind rear panel for connectors/cables.Heater KitFor 253 and 653 Throttle ValvesOrdering Inf ormation。

KGPS系列中频固态电源使用说明书西安迪利捷机电科技发展有限公司电话：（办）传真：网址：E-mail：公司简介西安迪利捷机电科技发展有限公司（西安迪利捷科技\DeLiJayst），是以研发、设计、制造及销售感应加热设备及控制线路为主的企业。

公司人员配备合理，其中工程技术人员占公司人数的40%以上，具有自主研发电子、自控、机械等多方面的能力。

在不断吸收国內外先进科技技术的同时，长期与西安电炉研究所、交通大学、西安石油大学、浙江大学等多家科研单位合作，已成功开发出用于淬火、透热、熔炼、钎焊、烧结等多领域的高、中、低频成套先进设备，特别是近两年来开发出的大功率Insulated Gate Bipolar Transistor 电源，填补了国内大功率超音频感应加热用电源的空白；为了适应行业发展需要，公司技术人员经过多年的不懈努力，相继开发出DLJ-3；DLJ-6；DLJ-7；DLJ-88；DLJ-24；DLJ-G3用于高、中、低频感应加热设备的控制主板，其市场占有率达到感应加热控制板行业的60%以上。

在开发新产品的同时我公司时刻遵循“依靠科技进步诚信务实发展”的原则，依靠强大的技术力量，为客户提供高品质、高性能的产品，公司产品以其可靠的质量与良好的售后服务在广大客户中赢得较高的赞誉。

公司自创立以来，就确立了“我们的信誉和客户的满意是最好的财富”为目标，以项目带动企业发展、以产品创新来提升企业竞争力的战略，公司坚持以人为本、和谐发展，从而增强了企业的凝聚力和向心力，不断推动企业发展。

目录1.概述―――――――――――――――――――――――（3）2.技术要求―――――――――――――――――――――（4）3.技术数据―――――――――――――――――――――（5）4.变频器工作原理――――――――――――――――――（5）5.调试―――――――――――――――――――――――（12）6.安装―――――――――――――――――――――――（15）7.维护与保养――――――――――――――――――――（16）8.操作方法及注意事项――――――――――――――――（17）9. 控制电路板各故障显示灯――――――――――――――（18）一、概述KGPS系列感应加热晶闸管变频装置，是利用晶闸管将三相工频交流电能变换成几百或几千HZ的单相交流电能。

General Purpose Relays MKS277Exceptionally Reliable General Purpose Relay now available with Lockable Test Button•IEC Rating of 7A 250 V AC 50/60 Hz,General use 100,000 cycles.•Mechanical indicator standard for all models.•Optional features include lockable test button, LED indicator, diode surge suppression, varistor, reverse polarity, and alternate wiring styles.•UL (RU/C RU), CE and TUV approved.•RoHS Compliant.FeaturesTwo-way Action Test ButtonModel Number StructureModel Number Legend1.Contact Form 2: DPDT 3: 3PDT2.Terminals P: Plug-in3.Mechanical Indicator/Test Button Blank:Mechanical indicator I:Mechanical indicator and lockable test button4.LED Indicator Blank: Standard N:LED indicator5.Coil PolarityBlank: Standard 1: Reverse polarity (DC coil only)6.Surge Absorption Blank:Standard D:Surge absorber diode (DC coil only)V:Surge absorber varistor (AC coil only)7.Internal Connections DPDT Blank: Standard 2 :Non StandardInternal Connections 3PDT 5 :StandardBlank: Non Standard 2 :Non Standard 8.Rated Voltage(Refer to “Coil Ratings”.)Pull down the test button to the firstposition, then press the yellow button with an insulated tool to operate the contact.Pull down the test button to the second position.(The contact is now in the locked position.)278General Purpose Relays MKSOrdering Information■List of Models■10A Sockets (Order Separately)Type Terminals Contact form Internal connections(See note 3.)With mechanical indicator With mechanical indicatorand lockable test button Coil ratingsBasic ModelsPlug-inDPDT Standard MKS2P MKS2PI AC/DCNon Standard MKS2P-2MKS2PI-23PDTStandard MKS3P-5MKS3PI-5Non StandardMKS3P-2MKS3PI-2MKS3P MKS3PI Models with LED Indicator (See note 2.)DPDT Standard MKS2PN(1)MKS2PIN(1)AC/DC Non Standard MKS2PN(1)-2MKS2PIN(1)-23PDTStandard MKS3PN(1)-5MKS3PIN(1)-5Non StandardMKS3PN(1)-2MKS3PIN(1)-2MKS3PN(1)MKS3PIN(1)Models with Diode(See note 2.)DPDT Standard MKS2P(1)-D MKS2PI(1)-D DC Non Standard MKS2P(1)-D-2MKS2PI(1)-D-23PDTStandard MKS3P(1)-D-5MKS3PI(1)-D-5Non StandardMKS3P(1)-D-2MKS3PI(1)-D-2MKS3P(1)-D MKS3PI(1)-D Models with LED Indicator and DiodeDPDT Standard MKS2PN-D MKS2PIN-D DC Non Standard MKS2PN-D-2MKS2PIN-D-23PDTStandard MKS3PN-D-5MKS3PIN-D-5Non StandardMKS3PN-D-2MKS3PIN-D-2MKS3PN-D MKS3PIN-D Models with VaristorDPDT Standard MKS2P-V MKS2PI-V AC Non Standard MKS2P-V-2MKS2PI-V-23PDTStandard MKS3P-V-5MKS3PI-V-5Non StandardMKS3P-V-2MKS3PI-V-2MKS3P-V MKS3PI-V Models with LED Indicator and VaristorDPDT Standard MKS2PN-V MKS2PIN-V AC Non Standard MKS2PN-V-2MKS2PIN-V-23PDTStandard MKS3PN-V-5MKS3PIN-V-5Non StandardMKS3PN-V-2MKS3PIN-V-2MKS3PN-VMKS3PIN-VItemTypeModelTrack-mounted Socket8-pin PF083A-E 11-pin PF113A-E 8-pin PF083A-D 11-pinPF113A-D Hold-down Clip(For PF083A-E and PF113A-E)PFC-A1General Purpose Relays MKS279Specifications■RatingsCoil RatingsNote:1.The rated current and coil resistance are measured at a coil temperature of 23°C with tolerances of +15%/−20% for AC rated current and±15% for DC coil resistance.2.Performance characteristic data are measured at a coil temperature of 23°C.3.The maximum voltage is one that is applicable instantaneously to the Relay coil at 23°C and not continuously.4.For DC-operated Relays with the LED indicator built-in, add an LED current of approx. 5 mA to the rated current.Contact RatingsRated voltage Rated current Coil resistanceMust operate voltageMust release voltageMax. voltagePower consumption 50 Hz 60 Hz AC6 V 443 mA 385 mA 3.1 Ω80% max. of rated voltage 30% min. of rated voltage at 60 Hz 25% min. of rated voltage at 50 Hz110% of rated volt-ageApprox. 2.3 VA at 60 HzApprox. 2.7 VA at 50 Hz12 V 221 mA 193 mA 13.7 Ω24 V 110 mA 96.3 mA 48.4 Ω110 V 24.2 mA 21.0 mA 932 Ω120 V 22.2 mA 19.3 mA 1,130 Ω220 V 12.1 mA 10.5 mA 3,550 Ω230 V 11.5 mA 10.0 mA 4,250 Ω240 V11.0 mA 9.6 mA4,480 ΩDC6 V 224 mA 26.7 Ω15% min. of rated voltageApprox. 1.4 W12 V 112 mA 107 Ω24 V 55.8 mA 430 Ω48 V 28.1 mA 1,710 Ω100 V 13.5 mA 7,390 Ω110 V12.3 mA8,960 ΩLoadResistive load (cos φ = 1)Inductive load (p.f. = 0.4)Contact mechanism Single Contact material AgSnIn Rated loadNO 10 A, 250 VAC 10A, 30 VDC 7 A, 250 VAC NC5 A, 250 VAC 5 A, 30 VDC Rated carry current 10 AMax. switching voltage 250 VAC, 250 VDC Max. switching current 10 AMax. switching capacityNO 2,500 VA/300 W NC1,250 VA/150 W280General Purpose Relays MKS■CharacteristicsNote:1.The values given above are initial values.2.Ambient temperature of models with LED indicator is −25 to 60°C.■Approved StandardsUL Recognized (File No. E41515) - - Ambient Temp. = 40°CNote:10A UL ratings are with no load on the other contact set.IEC Standard/TUV Certification: IEC61810-1 (Certification No. R50104853)Note:Maximum carrying current per TUV Certification is 9 A whennew MK-S relays are mounted in PF083A-E or PF113A-E Sockets.Engineering Data■Reference DataNote:The lower limit of the ambient operating temperature for modelswith built-in operation indicators is −25°C.Contact resistance 100 m Ω max.Operate time AC: 20 ms max. DC: 30 ms max.Release time20 ms max.(40 ms max. for built-in diode models)Max. operating frequency Mechanical: 18,000 operations/hr (no load)Electrical:1,800 operations/hr (at rated load)Insulation resistance 100 M Ω min. (at 500 VDC)Dielectric strength2,500 VAC 50/60 Hz for 1 min. between coil and contacts1,000 VAC 50/60 Hz for 1 min. between contacts of same polarity and terminals of the same polarity 2,500 VAC 50/60 Hz for 1 min. between current-carrying parts, non-current-carrying parts, and opposite polarity Insulation method Basic insulationImpulse withstand voltage 4.5 kV between coil and contacts (with 1.2 × 50 μs impulse wave)3.0 kV between contacts of different polarity (with 1.2 × 50 μs impulse wave)Pollution degree 3Rated insulation voltage 250 VVibration resistance Destruction:10 to 55 Hz, 1.5 mm double amplitude Malfunction:10 to 55 Hz, 1.0 mm double amplitude Shock resistance Destruction:1,000 m/s 2 (approx. 100 G)Malfunction:100 m/s 2 (approx. 10 G)Life expectancy Mechanical: 5,000,000 operations min. Electrical:100,000 operations min.Min. permissible load 10 mA at 1 VDC P level: λ60=0.1 x 10-6 / opsAmbient temperature Operating: –40 to 60°C (with no icing or condensation)Ambient humidity Operating: 5% to 85%WeightApprox. 90 gCoil ratingsContact ratingsOperations6 to 110 VDC 6 to 240 VAC N.O.contact10 A, 250 V AC 50/60 Hz (Resistive) 10 A, 30 V DC (Resistive)7 A, 250 V AC 50/60 Hz (General Use)100,000N.C.contact10 A, 250 V AC 50/60 Hz (Resistive) 10 A, 30 V DC (Resistive)7 A, 250 V AC 50/60 Hz (General Use)100,000Coil ratingsContact ratings Operations6, 12, 24, 48, 100, 110 VDC 6, 12, 24, 100, 110, 200, 220,240 VACN.O.contact 10 A, 250 V AC 50/60 Hz (Resistive) 10 A, 30 V DC (Resistive)7 A, 250 V AC 50/60 Hz (General Use)100,000N.C.contact5 A, 250 V AC 50/60 Hz (Resistive) 5 A, 30 V DC (Resistive)7 A, 250 V AC 50/60 Hz (General Use)100,000General Purpose Relays MKS281DimensionsNote:All units are in millimeters unless otherwise indicated.Models without Test Button Models with Lockable Test ButtonTrack Mounted SocketsSee below for Socket dimensions.Note:If using the PF083A or PF113A Sockets, be sure the maximum carrying current is 5 A or less. When using finger-protection sockets, makesure the connecting wire terminals are Y-shaped.PolesFinger-protection models—Maximum carry current10 A 5 A 2 polesPF083A-EPF083A-DPF083A3 polesPF113A-E PF113A-D PF113A733435.423.5734435.423.533±0.233±0.24PF083A-E (Conforming to EN 50022)Mounting HolesTerminal ArrangementPF113A-E (Conforming to EN 50022)52 max.Eight, M3.5 × 7 sems41 max.21 max.Two, M4 or two 4.5-dia. holesTwo, M4 or two 4.5-dia. holesEleven, M3.5 × 7 sems52 max.42.8 max.31 max.Mounting HolesTerminal Arrangement282General Purpose Relays MKSHold-down ClipsMounting TracksMounting Height with SocketsNote:PF083A(-E) and PF113A(-E) allow either track or screw mounting.4.515 25 25 25 25 *1010 1000 (500)*7.3±0.1535±0.327±0.15 15 (5)14.515 25 2525 25 1510101000±435±0.3 27241629.21 1.5* The figure in parenthesis is for PFP-50N.PFP-100N, PFP-50N(Conforming to EN 50022)PFP-100N2(Conforming to EN 50022)General Purpose Relays MKS283Terminal Arrangement/Internal Connection Basic Models (AC/DC Coil)LED Indicator Type (AC Coil)LED Indicator Type (DC Coil:Standard Polarity)LED Indicator Type (DC Coil:Reverse Polarity)Diode Type (DC Coil:Standard Polarity)Diode Type (DC Coil:Reverse Polarity)(Bottom View)284General Purpose Relays MKSSafety Precautions■Safety Precautions for Correct UseInstallationRecommend mounting MK-S Relay so that side with wiring diagram is facing down.HandlingCheck coil polarity when wiring LED Indicator and Diode Models.Test ButtonDo not use the test button for any purpose other than testing. Be sure not to touch the test button accidentally as this will turn the contacts ON.Before using the test button, confirm that circuits, the load, and any other connected item will operate safely.Check that the test button is released before turning ON relay circuits.If the test button is pulled out too forcefully, it may bypass the momentary testing position and go straight into the locked e an insulated tool when you operate the test button.Models with test buttons or LED indicators fulfill the requirements for reinforced insulation between live parts and the front of cover only when the Relay is in a complete condition, i.e. with the nameplate, nameplate frame, test button, and slider in place. If any of these parts are removed, only the requirements for basic insulation are fulfilled.LED Indicator and Diode Type (DC Coil)Varistor Type (AC Coil)LED Indicator and Varistor Type (AC Coil)Terms and Conditions of SaleCertain Precautions on Specifications and UseOMRON ELECTRONICS LL C • THE AMERICAS HEADQUARTERS Schaumburg, IL USA • 847.843.7900 • 800.556.6766 • OMRON CANADA, INC. • HEAD OFFICEToronto, ON, Canada • 416.286.6465 • 866.986.6766 • OMRON ELETRÔNICA DO BRASIL LTDA • HEAD OFFICE S ão P aulo, SP, Brasil • 55.11.2101.6300 • .br OMRON ELECTRONICS MEXICO SA DE CV • HEAD OFFICEApodaca, N.L. • 52.811.156.99.10 • 001.800.556.6766 • **************OMRON ARGENTINA • SALES OFFICE Cono Sur • 54.11.4783.5300OMRON CHILE • SALES OFFICE Santiago • 56.9.9917.3920OTHER OMRON LATIN AMERICA SALES 54.11.4783.5300© 2009 Omron Electronics LLCALL DIMENSIONS SHOWN ARE IN MILLIMETERS.To convert millimeters into inches, multiply by 0.03937. T o convert grams into ounces, multiply by 0.03527.Note:This datasheet is provided as a guideline for selecting products. Do not use this document to operate the Unit.Cat. No. X301-E-1 6/09 Specifications are subject to change without notice. Printed in U.S.A.。

New ProductNew Super MK Relays.Models with Latching Lever Added to the Series.•Same mounting and internal wiring as the previous Super MK Relays •Built-in mechanical indicator enables checking contact operation.•Two modes can be used to check circuits for models with latching lever. •Nameplate provided on models with latching lever.•All materials are RoHS compliant.•UL and IEC (TÜV) certification.FeaturesModels with Latching Lever*The operation indicator is built in only on specified models.Example of Applications of Models with Latching LeversOperation checks in relay sequence circuitsOperating Method for Latching LeverModel Number StructureModel Number Legend 1.Contact Form 2: DPDT 3: 3PDT 2.Terminals P: Plug-in3.Mechanical Indicator/Test Button Blank:Mechanical indicator I:Mechanical indicator and lockable test button4.LED Indicator Blank: Standard N:LED indicator5.Coil Polarity Blank: Standard 1: Reverse polarity (DC coil only)6.Surge Absorption Blank:Standard D:Surge absorber diode (DC coil only)V:Surge absorber varistor (AC coil only)7.Internal Connections Blank:Standard2 or 5:Non-standard connections (Refer to “TerminalArrangement and Internal Connection (Bottom View)”.)8.Rated Voltage(Refer to “Coil Ratings”.)N ameplateLatching le v er DC: Bl u e AC: RedYello bu ttonRelay inNormal OperationFor Momentary OperationFor Lock OperationSlide the latching le v erto the first position, then press the yello w bu tton w ith an ins u lated tool to operate the contact.Slide the latching le v er to the second position.(The contact is no w in the locked position.)MK-S Ordering InformationList of ModelsList of Models (Order Separately)Item Type ModelTrack-mounted Socket 8-pin PF083A-E 11-pin PF113A-E 8-pin PF083A-D 11-pin PF113A-DHold-down Clip(For PF083A-E and PF113A-E)PFC-A1MK-SSpecificationsRatingsCoil RatingsNote:1.The rated current and coil resistance are measured at a coil temperature of 23°C with tolerances of +15%/−20% for AC rated current and ±15% for DC coil resistance.2.Performance characteristic data are measured at a coil temperature of 23°C.3.The maximum voltage is one that is applicable instantaneously to the Relay coil at 23°C and not continuously.4.For DC-operated Relays with the LED indicator built-in, add an LED current of approx. 5 mA to the rated current.Contact RatingsRated voltageRated current Coil resistanceMust operate voltageMust release voltageMax. voltagePower consumption50 Hz 60 Hz Percentage of rated voltageAC6 V 443 mA 385 mA 3.1 Ω80% max. of rated voltage30% min. of rated voltage at 60 Hz 25% min. of rated voltage at 50 Hz110% of rated voltageApprox. 2.3 VA at 60 HzApprox. 2.7 VA at 50 Hz12 V 221 mA 193 mA 13.7 Ω24 V 110 mA 96.3 mA 48.4 Ω100 V26.6 mA 23.1 mA 760 Ω110 V 24.2 mA 21.0 mA 932 Ω200 V 13.3 mA 11.6 mA 3,160 Ω220 V 12.1 mA 10.5 mA 3,550 Ω230 V 10.0 mA 11.5 mA 4,250 Ω240 V 11.0 mA 9.6 mA4,480 ΩDC6 V 224 mA 26.7 Ω15% min. of rated voltageApprox. 1.4 W12 V112 mA 107 Ω24 V 55.8 mA 430 Ω48 V 28.1 mA 1,710 Ω100 V13.5 mA7,390 Ω110 V 12.3 mA 8,960 ΩLoadResistive load (cos φ = 1)Inductive load (cos φ = 0.4)Contact mechanism Single Contact materialAgSnIn Rated loadNO10 A, 250 VAC 10A, 30 VDC 7 A, 250 VAC NC5 A, 250 VAC 5 A, 30 VDC Rated carry current 10 AMax. switching voltage 250 VAC, 250 VDC Max. switching current 10 AMax. switching powerNO 2,500 VA/300 W NC1,250 VA/150 WMK-SCharacteristicsNote:1.The values given above are initial values.2.P level: λ60 = 0.1 × 10-6/operation3.Ambient temperature of models with LED indicator is −25 to 60°C.Approved StandardsUL508 (File No. E41515)IEC Standard/TUV Certification: IEC61810-1 (Certification No. R50104853)Note:W hen Relays are mounted on the PF083A-E or PF113A-E, themaximum carrying current is 9 A.Engineering DataReference DataContact resistance 100 m Ω max.Operate time AC: 20 ms max. DC: 30 ms max.Release time20 ms max. (40 ms max. for built-in Diode Relays)Max. operating frequency Mechanical: 18,000 operations/hElectrical:1,800 operations/h (under rated load)Insulation resistance 100 M Ω min. (at 500 VDC)Dielectric strength 2,500 VAC 50/60 Hz for 1 min between coil and contacts1,000 VAC 50/60 Hz for 1 min between contacts of same polarity and terminals of the same polarity2,500 VAC 50/60 Hz for 1 min between current-carrying parts, non-current-carrying parts, and opposite polarity Insulation method Basic insulationImpulse withstand voltage 4.5 kV between coil and contacts (with 1.2 × 50 μs impulse wave)3.0 kV between contacts of different polarity (with 1.2 × 50 μs impulse wave)Pollution degree 3Rated insulation voltage 250 VVibration resistance Destruction:10 to 55 to 10 Hz, 0.75-mm single amplitude (1.5-mm double amplitude)Malfunction:10 to 55 to 10 Hz, 0.5-mm single amplitude (1.0-mm double amplitude)Shock resistance Destruction:1,000 m/s 2 (approx. 100 G)Malfunction:100 m/s 2 (approx. 10 G)EnduranceMechanical: 5,000,000 operations min. (at 18,000 operations/h under rated load)Electrical:100,000 operations h. (at 1,800 operations/h under rated load)Failure rate P level (reference value)10 mA at 1 VDC Ambient temperature Operating: –40 to 60°C (with no icing or condensation)Ambient humidityOperating: 5% to 85%WeightApprox. 90 g Coil ratingsContact ratingsOperations6 to 110 VDC6 to 240 VAC N.O.contact10 A, 250 V AC 50/60 Hz (Resistive)10 A, 30 V DC (Resistive) 7 A, 250 V AC 50/60 Hz (General Use)100,000N.C.contact10 A, 250 V AC 50/60 Hz (Resistive)10 A, 30 V DC (Resistive) 7 A, 250 V AC 50/60 Hz (General Use)100,000Coil ratings Contact ratingsOperations6, 12, 24, 48, 100, 110 VDC 6, 12, 24, 100, 110, 200, 220, 240 VACN.O.contact 10 A, 250 V AC 50/60 Hz (Resistive) 10 A, 30 V DC (Resistive) 7 A, 250 V AC 50/60 Hz (General Use)100,000N.C.contact5 A, 250 V AC 50/60 Hz (Resistive) 5 A, 30 V DC (Resistive) 7 A, 250 V AC 50/60 Hz (General Use)100,000Maximum Switching PowerRated Carry Current vs. Ambient Rated TemperatureNote:The lower limit of the ambient operating temperature for models with built-in operation indicators is −25°C.S w itching v oltage (V )S w i t c h i n g c u r r e n t (A )105R a t e d c a r r y c u r r e n t (A )Am b ient temperat u re (°C)MK-SDimensions(Unit: mm)Models without Latching LeverModels with Latching LeverSocketsSee below for Socket dimensions.Note:Use the Surface-mounting Sockets (i.e., finger-protection models) with “-E” at the end of the model number.W hen using the PF083A andPF113A, be sure not to exceed the Socket's maximum carry current of 5 A. Using at a current exceeding 5 A may lead to burning. Roundterminals cannot be used for finger-protection models. Use Y-shaped terminals.0.SocketSurface-mounting Socket (for track or screw mounting)Finger-protection models ---Maximum carry current10 A 5 A 2 polesPF083A-EPF083A-DPF083A3 polesPF113A-EPF113A-E-D PF113A733435.423.5734435.423.533±0.233±0.24PF083A-E (Conformin g to EN 50022)Mountin g HolesTerminal Arran g ementPF113A-E (Conformin g to EN 50022)52 max.Eight, M3.5 × 7 sems41 max.21 max.T w o, M4 or t w o 4.5-dia. holesT w o, M4 or t w o 4.5-dia. holesEle v en, M3.5 × 7 sems52 max.42.8 max.31 max.Mountin g HolesTerminal Arran g ementMK-SHold-down ClipsMounting TracksMounting Height with Sockets Surface-mounting SocketsPF083A-DTerminal Arran g ementT 22121424PF113A-D1611212A1113152272410A2934314412832Terminal Arran g ementMountin g HolesT w 4.51525252525*10101000 (500)*7.3±0.1535±0.327±0.1514.515252525251510101000±435±0.327241629.211.5* This dimension applies to the PFP-50N Mo u nting T rack.* A total of t w el v e 25 × 4.5 elliptic holes is pro v ided w ith sixholes c u t from each track end at a pitch of 10 mm.PFP-100N, PFP-50N(Conformin g to EN 50022)PFP-100N2(Conformin g to EN 50022)MK-STerminal Arrangement and Internal Connection (Bottom View)(AC/DC Coil)Models withLED Indicator(AC Coil)Models with Diode(DC Coil:Standard Polarity)Models withLED Indicator and Diode(DC Coil:Reverse Polarity)Standard Models(DC Coil:Standard Polarity)Models with Diode(DC Coil:Reverse Polarity)Models withLED indicator(DC Coil)MK-S(AC Coil)Models withLED indicator andVaristor(AC Coil)MK-SSafety PrecautionsSafety Precautions for Correct Use InstallationMount the MK-S with the marking at the bottom.HandlingCheck the coil polarity of models with built-in diodes and wire them correctly(DC operation coil).Test ButtonDo not use the test button for any purpose other than testing. Be sure not to touch the test button accidentally as this will turn the contacts ON. Before using the test button, confirm that circuits, the load, and any other connected item will operate safely.Check that the test button is released before turning ON relay circuits. If the test button is pulled out too forcefully, it may bypass the momentary testing position and go straight into the locked position. Use an insulated tool when you operate the test button.Models with test buttons or LED indicators fulfill the requirements for reinforced insulation between live parts and the front of cover only when the Relay is in a complete condition, i.e. with the nameplate, nameplate frame, test button, and slider in place. If any of these parts are removed, only the requirements for basic insulation are fulfilled.MEMOREAD AND UNDERSTAND THIS DOCUMENTPlease read and understand this document before using the products. Please consult your OMRON representative if you have any questions or comments.WARRANTYOMRON’s exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified) from date of sale by OMRON.OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, REGARDING NON-INFRINGEMENT, MERCHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED.LIMITATIONS OF LIABILITYOMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY.In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted.IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON’S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE MODIFICATION OR REPAIR.SUITABILITY FOR USETHE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED FOR ENSURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OMRON's safety rated products.OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the customer’s application or use of the product.At the customer’s request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use.The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products:•Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this document.•Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations.•Systems, machines, and equipment that could present a risk to life or property.Please know and observe all prohibitions of use applicable to the products.NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.PERFORMANCE DATAPerformance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON’s test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability.CHANGE IN SPECIFICATIONSProduct specifications and accessories may be changed at any time based on improvements and other reasons.It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased products.DIMENSIONS AND WEIGHTSDimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown.ERRORS AND OMISSIONSThe information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical, or proofreading errors, or omissions.PROGRAMMABLE PRODUCTSOMRON shall not be responsible for the user’s programming of a programmable product, or any consequence thereof.COPYRIGHT AND COPY PERMISSIONThis document shall not be copied for sales or promotions without permission.This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another, please copy or transmit it in its entirety.Authorized Distributor:In the interest of prod u ct impro v ement, specifications are s ub ject to change w itho u t notice. Cat. No. J168-E1-02OMRO N Ind u strial A u tomation Glo b al: Printed in Japan0908 OMRON CorporationIndustrial Automation CompanyRegional HeadquartersOMRON EUROPE B.V.Wegalaan 67-69-2132 JD HoofddorpThe N etherlandsTel: (31)2356-81-300/Fax: (31)2356-81-388 OMRON ELECTRONICS LLC One Commerce Dri v e Scha u m bu rg, IL 60173-5302 U.S.A. Tel: (1) 847-843-7900/Fax: (1) 847-843-7787 OMRON ASIA PACIFIC PTE. LTD. N o. 438A Alexandra Road # 05-05/08 (Lo bb y 2), Alexandra T echnopark, Singapore 119967 Tel: (65) 6835-3011/Fax: (65) 6835-2711 OMRON (CHINA) CO., LTD. Room 2211, Bank of China To w er, 200 Yin Cheng Zhong Road, P u Dong N e w Area, Shanghai, 200120, ChinaTel: (86) 21-5037-2222/Fax: (86) 21-5037-2200 Control Devices Division H.Q. Strate g y Plannin g Division Shiokoji Horika w a, Shimogyo-k u , Kyoto, 600-8530 Japan Tel: (81) 75-344-7109/Fax: (81) 75-344-7149 © OMRO N Corporation 2008 All Rights Reser v ed.。

produce a compact, robust device with excellent accuracy and settling time.Key Benefits•Compact design•Multi-gas/Multi-range capability for up to 15 gasesN T I NU E DDISSpecificationsFull Scale Flow Ranges (N 2 in slm)50, 100, 200, 300 slm Maximum Inlet Pressure 100 psig Normal Operating Pressure Differential(with atmospheric pressure at the MFC outlet)50, 100 slm200 slm 300 slm • 17 to 40 psid • 27 to 40 psid • 40 to 49 psid Control Range2 to 100% of Full Scale Accuracy (including non-linearity, hysteresis and non-repeatability; referenced to 760 mmHg and 0°C)±1% of Full Scale Repeatability ±0.5% of Full Scale Resolution0.1% of Full Scale Temperature Coefficients Zero Span• <0.05% of Full Scale /°C • <0.10% of Full Scale /°C Warm-Up Time<30 min Controller Settling Time <1 s typicalPressure Coefficient ±0.02% of Reading/psi Normal Operating Temperature Range15°C to 40°C (59°F to 104°F)Input Voltage Required 20.5 to 30 VDC Maximum Current300 mASet Point Command Signal 0 to 5 VDC from <20 k W Output Signal 0 to 5 VDC into >10 k WConnector Types Analog Profibus • 15-pin Type "D" male• 2 x 9-pin Type "D" male (analog) and female (Profibus)Wetted Materials Standard Optional (Seals and Valve Seat)• 316L S.S.T, Nickel, Viton ® • B una-N, Neoprene ®, Kalrez ®Leak Integrity External Through Closed Valve • <1 x 10-9 scc/sec He • <0.1% of Full ScaleFittings (compatible with) Standard Optional• 8 VCR ® male• 8VCO ® male, DN 16 KF, 1/2" Swagelok ®, 12 mm Swagelok, 4 VCR ® male (for 50 slm only)ComplianceCEDI SCONT INUE DMKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US law (and local country law) is prohibited. mksinst ™ is a trademark of MKS Instruments, Inc. or a subsidiary of MKS Instruments, Inc. All other trademarks cited herein are the property of their respective owners.1579A_10/21©2006-2021 MKS Instruments, Inc.Specifications are subject to change without notice.Ordering InformationOrdering Code Example: 1579A01332LR1BVXXCodeConfigurationModel 1579A Mass-Flo Controller1579A1579AGas To Be Calibrated For: (SEMI Gas Code) See table for additional optionsH elium Argon H ydrogen Nitrogen Oxygen 001004007013015013Full Scale Range of Calibrated Gas*50 slm100 slm 200 slm300 slm 51L 12L 22L 32L 32LFittings (compatible with)Swagelok 8 VCR male Swagelok 8 VCO male ½" Swagelok 12mm SwagelokDN 16KFSwagelok 4 VCR (for variant 51L only)R G S M D V RValve Normally closed 11ConnectorAnalog 15-pin Type DDigital Profibus DP B 4BSeal Materials**Buna-N Kalrez NeopreneVitonB K N VVFirmware (Profibus only)Unless otherwise specified, MKS will ship firmware revision current to date.XXXXOptional Accessories Diagnostics Adapter Kit (to use the proprietary Diagnostics Port) DMC-Support Mounting PlateY-5150166 1-Channel Power Supply and Readout Unit with RS-232 PR4000S 2-Channel Power Supply and Readout Unit with RS-232 PR4000FCabling for 1579A:CB147-12-10 to connect 1579 9-pin Type “D” to PR4000, 246CB259-5-3M to connect 1579 15-pin Type “D” to 246, PR4000* Max. 300 slm N 2 equivalentSEMI GasCode Name SymbolMaximumFull Scale, slmFlow Rate 001Helium He 30032L 004Argon Ar 30032L 007Hydrogen H 230032L 008Air --30032L 013Nitrogen N 230032L 015Oxygen O 230032L 019Chlorine Cl 220022L 025Carbon Dioxide CO 220022L 028Methane CH 420022L 029Ammonia NH 320022L 039Silane SiH 410012L 042Acetylene C 2H 210012L 110Sulfur Hexafluoride SF 65051LDI SC ONT INU E D。

(not electropolished).Key BenefitsPatented thermal sensor design providesexceptional zero stabilityPercent of set point accuracy (calibration gas) enables precise process controlDeviceNet ™ and RS485 with VCR fittings* (*see manual for additional I/O and fitting types). Unless otherwise specified, dimensions are nominal values in inches (mm referenced).Digital I/ODeviceNet ™RS485Profibus ®EtherCAT ®PROFINET ®Input Power Required +11 to +25 VDC per (< 4 watts) +15 to +24 VDC (< 4 watts)+15 to +24 VDC (< 4 watts)+24 VDC (< 5 watts)+24 VDC (< 5 watts)Connector5 pin micro connector (power and comm.)9 pin Type D male (power and comm.)9 pin Type D male(power)9 pin Type D female(comm.) 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)2 x RJ-45 (comm.) male, M8 male, 5 pin (power)Data RateSwitch/Selection4 positions: 125, 250, 500K (Default), (programmable over network)No switch Set data rate viaRS485No switch Set data rate viaProfibus No switch No switchComm. Rate(s)125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps38.4 Kbps 9.6 Kbps to 12 Mbps100 Mbps 100 MbpsMAC ID Switches/Addresses2 switches, 10 positions; 0,0 to 6,3 1 to 254Set address over RS485Station Addresses0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A Network Size Up to 64 nodes Up to 32 nodesUp to 99 nodes Up to 4095 nodes N/AVisual IndicatorsLED Network (green/red)LED Module (green/red)LED Comm (yellow)LED Error (red)LED Comm (green/red)LED Error (green/red)LED Power (green)LED Run (green) LED Error (red)LED Comm (green)LED Maint (amber)LED BUS Fault (red)LED Ready (green)LED Sys Fault (red)Compliance CECECECECEMKS products provided subject to the US Export Regulations. Export, re-export, diversion or transfer contrary to US law (and local country law) is prohibited. US Patent No 5461913. mksinst ™ is a trademark of MKS Instruments, Inc. or a subsidiary of MKS Instruments, Inc. All other trademarks cited herein are the property of their respective owners.GM50A_10/21©2012-2021 MKS Instruments, Inc.Specifications are subject to change without notice.Ordering InformationOrdering Code Example: GM50A013502R6M020CodeConfigurationModelMFC Mass Flow Controller GM50A GM50A GM50AGas (per Semi Standard E52-0703)013 = Nitrogen = N 2029 = Ammonia = NH 3110 = Sulfur Hexafluoride = SF 6013029110013Flow Range Full Scale*5 sccm 10 sccm 20 sccm50 sccm 100 sccm 200 sccm 500 sccm 1000 sccm 2000 sccm 5000 sccm 10000 sccm20000 sccm 30000 sccm50000 sccm500101201 501102202 502103203 503 104204304504502Fittings (compatible with)6 mm Swagelok 8 mm Swagelok 10 mm Swagelok12 mm Swagelok1/8'' Swagelok (for 1000 sccm N 2 equivalent or below) 1/4'' Swagelok 1/2'' Swagelok 3/8'' SwagelokSwagelok 4 VCR male Swagelok 8 VCR maleC-seal surface mount as per SEMI 2787.1 W-seal surface mount as per SEMI 2787.3F KF16Swagelok 2 VCR (for 1000 sccm N 2 equivalent or below)M E P F A S K J R T C H U B RConnectorEtherCAT DeviceNetRS485 (uses 9 pin connector) Profibus (1480 Compatible) Profibus (1179B Compatible) PROFINETAnalog 0 to 5 VDC, 9 Pin D connectorAnalog 0 to 5 VDC, 9 Pin D connector, Tied Grounds Analog 0 to 5 VDC, 15 Pin D connectorAnalog 0 to 5 VDC, 15 Pin D connector, Tied GroundsAnalog 4 to 20 mA, 15 Pin D connector 865439 A L B M H 6Valve/Device TypeNormally Closed/Mass Flow Controller, Teflon ®No Valve/Mass Flow MeterNormally Open/Mass Flow Controller, Teflon M030PT M0FirmwareUnless otherwise specified, MKS will ship firmware revision current to date.2020* The Full Scale flow rate is designated by a 3 digit number. The first two digits represent the significant digits of the Full Scale flow rate separated by a decimal point. The third digit is the exponent of the power of ten. Example flow rate code: 254 is 2.5 x 104 or 25000 sccm 153 is 1.5 x 103 or 1500 sccm 601 is 6.0 x 101 or 60 sccm ** The user should consult with their gas supplier on the appropriate elastomer which is compatible with the selected gas.。

727A and 728AHeated (45°C or 100°C) General PurposeAbsolute Baratron® Capacitance ManometersMany thin film and industrial applications require accurate, reliable measurement of vacuum in processes where condensation of byproducts could affect the performance of the sensor. To meet these challenging requirementsand offer a cost-effective solution, MKS developed the 727A and 728A Baratronabsolute capacitance manometers. Its blend of small size, high operating temperatures, rugged corrosion-resistant Inconel® sensor, and performance make it an ideal solution for new process equipment and retrofitsinto existing process tools.The 727A Baratron manometer is heated to 45°C, while the 728A Baratron is heated to 100°C. Both modelsuse a robust sensor design that provides high tolerance to overpressure, and its all-Inconel construction gives exceptionally high corrosion resistance to process gases and byproducts found in many applications. TheSemiconductor Precursor Gas DeliveryFlat Panel Display Manufacturing EquipmentOptical and Magnetic Data StorageManufacturing EquipmentBiopharmaceutical Processing SystemsAdvanced Materials Thermal ProcessingDimensional DrawingSpecificationsConfiguration Absolute measurement, single endFull Scale Ranges1, 2, 10, 30, 50, 100, 200, 500, and 1000 Torr and metric equivalents Operating Temperatures727A 45°C728A 100°CAccuracy (including non-linearity, hysteresis, and non-repeatability)727A0.50%ofReading728A 0.50% of Reading (10 to 1000 Torr ranges)1.0% of Reading (< 10 Torr ranges)Response Time< 75 msecTemperature CoefficientsZero0.004% of Full Scale/°C for 0.10 Torr; 0.010% of Full Scale/°C for < 10 Torr Span 0.030% of Full Scale/°C for 0.10 Torr; 0.040% of Full Scale/°C for < 10 Torr Ambient Temperature Range40°C727A 15to728A 15 to 50°COverpressure Limit 45 psia or 2x Full Scale range, whichever is greaterMinimum Burst Pressure10x Full Scale range or 90 psi, whichever is greaterMaterials Exposed to Process Gases Inconel nickel alloyElectronics AnalogInput Power Required727A ±15VDC or +24VDC ±5% @ 200 mA max728A ±15VDC ±5% @ 400 mA maxOutput Signal0-10 VDC analog into > 10K ohm loadElectrical Connectors15-pin D-subminiature or 9-pin D-subminiatureFittingsTubeODStandard ½”Optional 8 VCR® female, 8 VCO® female, NW16-KF, or 1.33” OD CF+1-978-645-5500 I +1-800-227-8766727A and 728A_10/19©2019 MKS Instruments, Inc.Some Baratron ® capacitance manometer products may not be exported to many end user countries without both US andlocal government export licenses under ECCN 2B230.Specifications are subject to change without notice.mksinst ™ is a trademark and Baratron ® is a registered trademark of MKS Instruments, Andover, MA. Inconel ® is a registeredtrademark of Inco Alloys, Huntington, WV . VCR ® and VCO ®are registered trademarks of Swagelok Corp., Solon, OH.Ordering InformationOrdering Code Example: 728A11TCE2FBCodeConfiguration。