英文原文：——From X IA W e-i q iang, FAN Shang-chun Chinese Journal of Scientific Instrument Advances in Sensor Technology Development The sensor technology is an important technical foundation of the new technological revolution and the information society, is a multidisciplinary science and technology, and is widely regarded as the source of the modern information technology [1].In recent years, sensor technology developmentFast, and made many new developments, in particular, has made a lot of progress in terms of gas sensors, biological sensors, vision sensors [2 - 3].Massachusetts Institute of Chinese scientist Zhang Shuguang research team led by means of a special solution to find the large-scale manufacture of the olfactory receptor [4]; same MIT researchers used gas chromatography - mass spectrometry feelidentify gas molecules, developed a trace toxic gases react strongly miniature sensors [5]; Russian scientists as raw material extracted from a common mushroom mixture, a resonant sensor with a piezoelectric quartz crystal canvery low levels of phenol in the detection of air ingredient Japanese scientists have developed quickly identify influenza virus nanosensors [7], nanotechnology is expected to quickly identify influenza virus, hepatitis B virus, mad cow disease pathogens and pesticide residues and other substances [6];the Autonomous University of Barcelona, Spain, developed a new means;New microfilm DNA analysis sensors [8], this sensor is able to analyze the DNA chain time shortened to a few minutes or a few hours, intelligent instrument and sensor technology, space biology, intelligent sensing technology.Applications, a series of laboratory tests in a paternity test to detect genetically modified food also can determine the genetic toxicity of new drugs; National Institute of Standards and Technology Research Institute to develop an ultra-sensitive micro-nuclear magnetic resonance (NMR) sensor, the micro-sensor andparallel microfluidic channels in a silicon chip on top of this technology to enhance the detection sensitivity of NMR to a new level, with a wide range of application prospects [9] in the chemical analysis.Our sensor technology compared with foreign countries, there is a big gap, but the last two years has also made some progress and breakthroughs, the birth of some new products, some of the major national Model Engineering application.Such as resource ringReality technology in the field of environmental monitoring and environmental risk assessment technology, fast online monitoring technology of Air Pollution Complex key gaseous pollutants and airborne fine particles and ultrafine particles fast online monitoring technology, marine technology collarDomain of marine water pollution parameters online monitoring technology and marine metal contaminants on-site and on-line monitoring techniques.HgCdTeinfrared sensors have been used in China's Fengyun series satellites, oceanic satellites and Shenzhou series flyShip.Beijing University of Aeronautics and Astronautics invented the small precision CMOS celestial sensor technology won the 2008 National Invention and Technology Prize [10].The development of these technologies highlights sensor technology showing toThe high-precision, miniaturization, micro-power consumption and passive, intelligent, high reliability direction of the trend, the following were discussed.The main direction of development of sensor technology to the development of high-precisionAutomated production technology continues to evolve, the requirements of the sensor is also continuously improve the requirements developed with high sensitivity, high accuracy, fast response speed, good interchangeability new sensor to ensure the reliability of production automation.In recent years, the world's major the sensor research institutions using new theories, new methods, new techniques to improve the sensor accuracy achieved outstanding results.American scholars have found a new method to improve the sensitivity of the sensor [11], to take a systematic approach to the various design rules together with a consistent framework to improve the design of the sensor.They compared the traditional planar sensor (p lanar sensor) components with cylindrical single nanotube sensor (cylindrica l sing le-nano tube sensor)Components, the results show the smaller cylindrical sensitivity of the sensor is at least 100 times higher, which is sufficient to prove that the smaller the better the theoretical.University of California at Berkeley and the Berkeley Lab researchers create the world's first fully functional nanotube device, the successful construction of a weighing gold atoms nanoelectromechanical systems (NEMS) [12].This device measured the gold atoms quality for 3125 @ 10 - 22 g.The NEMS mass sensor consists of a single carbon nanotube, double wall, with all the electronic properties, and the increase in hardness.The one end of the carbon nanotubes can be freely, while the other end is connected to one electrode, and the distance relative to the electrode is very near.The DC power from the battery or solar cell on the pair of electrodes connected, cause it to some fluctuations in the resonance frequency of vibration.When an atom or molecule is stored above carbon nanotubes, the resonant frequency of this carbon nanotube will therefore the mass of the atoms or molecules to change, similar to the different weight diver would change the resonance frequency of the diving board.American Oak R idge National Laboratory using silicon micro-electromechanical systems (MEMS) sensor detected 515 fg (femtograms) of the substances, and to create a new world record [13].The use of only 2 Lm Length, 50 nm thick silicon cantilever, by an inexpensive diode laser vibration.The researchers believe that the use of MEMS sensors in theory be able to detect any substances.British the Transense company launched a precision level millionth non-contacttorque sensor Torqsense [14].This sensor is based on the principle of surface acoustic wave (SAW), the size of only 4 mm @ 2 mm @ 015 mm.45b fixed for measuring the torque of the shaft, the two SAW sensor and the shaft was continuously into / half-bridge 0 structure; When the shaft is subject to torque, a pressure receiving a tensile the consolidated two sensors frequency generating / Difference 0 or /superposition 0 signal to derive the respective torque or temperature signal.Epson Toyocom Corporation developed a? 10 Pa (about one ten thousandth atmospheric pressure) of high accuracy and high resolution of 011 Pa and a volume of 1215 ml, weight is 15 g small crystal absolute pressure sensor [15].Tuning-fork type crystal unit is used in the pressure detecting unit, whereby the oscillation frequency of high stability can be obtained, thus achieving the pressure sensor with high precision and high resolution crystal; on top of this using QMEMS technology developed a new original.pressure sensing structure, to make it possible to have both small and high performance.Taiyo Yuden developed a detection sensitivity of 10 @ - 9 (1ppb) gas sensor [16], because of its gas adsorption characteristics, Taiyo Yuden be called / of nanoscale gas sensor 0, and in October 2007show opening / CEATEC JAPAN 20070.The sensor 80Lm @ 500Lm dielectric film is formed on a silicon wafer, using a dielectric film after the adsorbed gas, the resistance value change of the dielectric film, in order to detect the gas.112 development to the miniaturization of various control equipment function more and more, the requirements of the various components of smaller is better, and thus the sensor itself, the volume is as small as possible, which requires a focus on the development of micro-sensors based on new materials and processing technology.French scientist, winner of the 2007 Nobel Prize in Physics Albert # Fil German scientist Peter # Green Berger found / giant magnetoresistance 0 effect [17 - 19], not only can produce more sensitive data read headThe increasingly weak magnetic signals and still be able to be clearly read out and converted into a clear current change.The breakthrough in the technology provides an extremely important technical support for the miniaturization of sensors.Hitachi Metals has developed the world's smallest 3-axis acceleration sensor, external dimensions of 215mm @ 215 mm _AT_ 1mm volume of 6125 mm3 to varistor resin package.The package size smaller than similar products by 30% the volume and weight of 14 mg, 46% lower than similar products, with more than 20,000 gravitational acceleration impact resistance.Japanese scientists have also successfully developed the world's smallest ultra-sensitive tactile sensor, the prospects for a wide range of applications in the field of medical devices.The sensor is embedded in the synthetic resin of approximately 011mm3 a diameter of 1 ~ 10 Lm, long of 300 ~~ 500 Lm, the helical spring-like fine carbon coil element, carbon coil after the contact with the object, will be minor changes in pressure and temperature conversioninto electrical signals.Furthermore, the sensor can also sense / screwed 0, / 0, etc. of friction signal.113 micro-power consumption and passive sensor can not work without power, in the field or in a place far from the grid, often with a battery or solar power, the development of micro-powersensor and passive sensor is an inevitable development direction,In this way, you can saveEnergy and can improve the life of the system.German scientists have developed a sensor, the energy of the fluid (liquid or gas) can have through their own conversion into electricity, which means that the sensor can own / power generation 0, which would greatly facilitate the design and maintenance of the system.The conversion process is carried out in a fixed cavity into electricity, the media fluid (liquid or gas) through the heart as blood flows through here like.Due to the Coanda effect, the flow of fluid is close to the conduit wall; continuous flow generated here periodic pressure fluctuations, to the piezoelectric ceramics, piezoelectric ceramic ultimately by the energy of the fluid is converted into electrical conduction by the feedback member.Generated electricity in the microwatt or milliwatt able to meet the energy demand of the loop running sensor to ensure the sensor reading and outgoing data.British Perpetuum and CAP-XX, Australia developed without battery driven wireless sensor terminal The terminal is equipped with a micro vibration can be converted to energy generators and double-layer capacitor.The vibration of the installation site can be used as energy, power generation, the surplus electric power can be stored in the electric double layer capacitor [23].114 to the intelligent development of increasingly complex with the development of science and technology, the function of the sensor.Its output is no longer a single analog signal, but after the microprocessor processing the digital signal, and some even with a control function.Technology development that the digital signal processor (DSP) will promote the development of many new next-generation products.The technology laboratory R & D of the San Jose Accen ture one is called / 0 of smart dust smart sensing system can automatically monitor and leaf-like objects combustion warning.Once the smart dust sensor point will be near each small dust sprayed into the trees, dust to locate and establish a wireless connection.When spotted possible anomalies detected, it will touch the the nearby dust size device to determine their access to information, and get multiple information from multiple sources, then the sensor will be able to judge a tree dangerous.Once the danger trigger sensor group through its wireless connection to send messages to woodland workers to monitor the sensor network.Ok i recently introduced ultra-small triaxial accelerometer module the ML8950, integrated sensor chip and control IC, the world's thinnest package.Has detected a triaxial accelerometer function can also detect tilt and impact shocks.The controlling IC chip is fitted in the signal amplifying circuit, a control circuit, analog-to-digital converter, and temperature compensation circuit.Furthermore, it is the first with a digital interface triaxial accelerometer module, because it can be directly connected to the CPU, so without the use of analog to digital signal converter device can be embedded in the digital device.115 directly affects the reliability of the sensor to the high reliability electronic device antijamming performance, the development of high reliability, the wide temperaturerange of the sensor will be permanent direction.Improve the temperature range has always been a major issue in the scope of its work, most sensors are - 20 ~ 70e, in the military system requirements Operating temperature - 40 ~ 85e range, while cars boiler occasions require sensor temperature requirements are higher, so the development ofpromising emerging materials (such as ceramic) sensor.Honeyw e ll launch LG1237 absolute pressure sensor is an intelligent, accurate, stable measurement of the product within the pressure range of 015 to 1000 Pa, its service life of 25 years or 100, 000 hours.Product - 55e to 125e, the accuracy rate of over? 0103% F1S1, the device will be with a piezoresistive pressure sensor connected with the DSP of the microprocessor, and can withstand the live level acceleration and vibration.Institute of Precision Engineering, Xi'an Jiaotong University successfully developed an anti-shock 2000e instantaneous ultra high temperature silicon isolated high temperature pressure sensor.The sensors in the environment - 30 ~ 250e pressure measurement, pressure measurement to be completed by the of 1000MPa any of the following range, and can withstand the high temperature of 2000e instantaneous impact, to meet the high-temperature, high-pressure, high-frequency response and instantaneous temperature impact and other harsh environmentspressure measurement.The sensor is an effective solution to the technical problems of sensor failure pressure measurement and instantaneous temperature impact in the field of China's aerospace, petrochemical, automotive and other high-temperature environment.The development of biosensorsIn recent years, with the development of biotechnology, bio-sensor has also been a lot of development.And attaches great importance to the food industry, environmental monitoring, fermentation industry, medicine and a wide range of applications, such as for the detection of food ingredients, food additives, harmful toxins and food freshness [28 - 31].Environmental pollutants, continuous, rapid, on-line monitoring of foreign subcellular lipids fixed made of cellulose acetate membrane and oxygen electrode amperometric biosensor detection of acid rain acid mist sample solution.Widely used microbial sensors take advantage of this electrochemical sensors can be of the number of microbial cells as an effective measurement tool, a continuous, on-line determination of the cell concentration in the fermentation industry.Microbial sensor is not only used in clinical medicine, and is also used in military medicine, through timely and rapid detection of bacteria, viruses, and biological weapons defense.The past two years, China has invested in biosensor research on a lot of manpower and resources, made some pretty good results.For example, successfully developed / protein chip biosensor system 0 and its practical prototype provides a novel label-free protein analysis technology.The water-soluble conjugated polymer is used as a new fluorescent probes, the design of a series of conjugated polymer-based biosensor system.The use of fluorescence resonance energy transfer principle, the development of novel high sensitivity based on the conjugated polymer spent hydrogen peroxide and glucose sensing system.Conjugated through the regulation ofthe electron transfer process of the polymeric system, to achieve a sensitive detection of the nitroxide free radicals and antioxidants.117 quantum mechanics and sensor technology, the development of quantum mechanics provides a theoretical basis for the development of modern science and technology.Development of quantum effects sensitive a measurement of the quantum-sensitive devices, such as resonant tunneling diodes, quantum well lasers and quantum interference components, with high-speed (increased 1,000-fold) than the sensitive electronic devices speed, low-power (more sensitive than electronicdevices reduce energy consumption by 1000 times), efficient, highly integrated, reliable and economic advantages.Therefore, the development of nanoelectronics, may lead to a new revolution in sensor technology and sensor technology to a new stage of development.2 domestic sensor gapIn recent years, China's sensor industry has made great strides, and has formed the basis of a certain industry, but there is still a wide gap compared with developed countries. Scientific research and development behind the international level from 5 to 10 years, 10 to 15 years behind the large-scale production technology. China's chemical industry, the security monitoring sensor market, almost all foreign enterprises occupied. Sensors for military, aerospace and other purposes, the foreign country is an embargo. The level of development of the sensor behind a serious impediment to the development of China's automobile, petrochemical, aerospace and other industries. At present, China has yielded few results of independent intellectual property rights of innovative research results to industrial conversion speed is slow, inefficient, and achieved significant social and economic benefits of the project less; able to represent the national level, but also to achieve large-scale production of small enterprises, high-grade fewer products, low market share; big gap between production technology and equipment from the international level; overall in the tracking state. Sensor devices and systems the comprehensive technical level of China's independent innovation capability is low, sensitive materials, integrated design and manufacturing, industrial design, testing and calibration than backward. Gap with foreign countries mainly in: Device varieties, mainly dependent on imports of high-end products; lower level of automation, intelligent; modular, standardized, low degree of integration; poor stability, reliability is low; Low cost the market less competitive.3 countermeasures and suggestionsAccording to the current situation of the development of sensor technology at home and abroad, our gaps, combined with the needs and priorities of China's science and technology, social and economic development strategy, to give overall consideration to the sensor technology, basic research, applied basic research and applied research. Basic research is mainly focused on sensor mechanism of, from a theoretical point of view to solve a number of key technologies of sensor development, provide important theoretical basis for the study of the sensor. Application of basic research on the basis of the basic research, focusing on key technologies provide important technical support for the sensor market process transformation to the theoretical and experimental prototype. In the sensor applied research, the mainexisting, after the application of the basic research stage proved to be more reliable and mature technology into the application stage of the market-oriented products.For our future sensor development countermeasures, including the following aspects:1) the planning of the national level from the level of national development, the future direction of development of the sensor planning, the plan should focus on the development of a new type of high-precision, low power consumption, miniaturization and miniaturized sensors. Note that the combination of production, learning and research.2) between different industries sensors complement each other and promote each sensor as an information access means in different industries have different characteristics and needs. Similar sensor technology for different industries. Should support complementary advantages between the various sectors, including joint research on common technology, craftsmanship help each other, to form a common development of various industries, thus contributing to the sensorVigorously develop technology.3) vigorously promote the construction and development of the sensor research base, to develop sensor senior professionals to encourage the sensor research leading to the national laboratory, the joint ministerial key laboratories, Key Laboratory of the industry and universities Key Laboratory, the formation of a system national the sensor research base group to provide technical support for the development of the sensor. Meanwhile, laboratory and trained expertise of a number of sensors, provide important protection of personnel for the development of sensor technology research areas.4) To change from passive to active, actively develop high-performance sensor in the the sensor research process to avoid simply copying foreign technology. Sensing technology trends, to carry out a prospective study to break through the bottleneck problem, a technology with independent intellectual property rights, to break down foreignTechnological monopoly, in a place on the international.Development of new sensor new sensor, generally should include: a new principle, fill sensor Blank, biomimetic sensors and other aspects. They are interrelated. The working mechanism of the sensor is based on a variety of effects, and the law of which inspire people to further explore the sensitive functional materials with new effects and novel physical properties sensor device developed new principle, which is the development of high-performance, multi-function, important way of low-cost, miniaturized sensors. Structured sensor developed earlier matures. Complex structure type sensor, the general structure it, the volume is too large, the prices are high. Type sensors of the physical properties of roughly contrast, has many attractive advantages, coupled with past development is not enough. Countries in the world in terms of physical properties sensor invest a lot of manpower and material resources to strengthen research, thus making it a noteworthy developments. The various effects of quantum mechanics developed low sensitivity threshold sensor usedto detect weak signals, the development of one of the new trends. Integrated, multifunctional, integrated intelligent sensor includes two definitions, and one multi-element of the same functions in parallel, about a single sensing element of the same type with integrated technology are arranged on the same plane, aligned in one dimension This is the case for a linear sensor, a CCD image sensor. Another definition of integrated multi-functional integration, upcoming sensor zoom, computing, and temperature compensation, link integration, assembled into a single device. With the development of integrated technologies, various types of hybrid and monolithic integrated pressure sensors have appeared, some of them have become a commodity. Integrated piezoresistive, capacitive pressure sensor, and other types of integrated piezoresistive sensors rapid development and wide application. Sensor multifunction is one of the development. The typical example of the so-called multi-functional monolithic silicon, an American University Sensor Research and Development Center developed a multi-axis force sensor can measure three line speed, of three centrifugal acceleration (angular velocity) and three angular acceleration. The main element is mounted on one substrate by four properly designed cantilever consisting of monolithic silicon structures, 9 are correctly arranged in the respective cantilever piezoresistive sensitive components. Multifunctional not only can reduce production costs, reduce the volume, and can effectively improve the stability of the sensor, reliability and other performance indicators. Integrate a plurality of different functions of the sensing element and integrated processing and evaluation of the results of measurement of these parameters, in addition to measurement of a variety of parameters can be performed simultaneously, but also reflects the overall status of the system under test.From the above it can be seen, integrated solid-state sensor brings many new opportunities, it is also the basis of multi-functional. Combination of sensor and microprocessor, the detection function also has information processing, logical judgment, self-diagnostics, and artificial intelligence of "thinking" it is called intelligent sensors. By means of a semiconductor integrated sensor portion signal pre-processing circuit, the input and output interfaces, microprocessor production on the same chip, large-scale integrated intelligent sensor. Smart sensor is the product of the combination of sensor technology and LSI technology, its implementation will depend on the improvement and development of the sensing technology and semiconductor integrated process level. Such sensors have multi-energy, high-performance, small size, suitable for mass production and ease of use, and can say with certainty, is one of the most important direction sensor.The development of new materials, sensor materials is an important foundation of the sensor technology, sensor technology upgrades support. With the advances in materials science, sensor technology has matured, more and more of its kind, In addition to early use of semiconductor materials, ceramic materials, optical fiber, as well as the development of superconducting materials, the development of the sensor provides a material basis. For example, according to many semiconductor materials silicon substrate easy miniaturization, integration, multi-functional, intelligent, and semiconductor optical heat detectors with high sensitivity, high accuracy, non-contactsexual characteristics, the development of infrared sensors, laser sensors modern sensors, fiber optic sensors, etc.; in the sensitive material, a ceramic material, organic material quickly, different formulations can be used mixed raw material and precision deployment of chemical constituents based on, after the precision molding sintering, to obtain one or a certain types of gas-sensitive material having an identification function, is used to produce a new gas sensor. In addition, the organic polymer sensitive materials is of great concern in recent years new sensitive materials with potential applications, the sensor can be made of the thermistor, photosensitive, gas sensing, humidity, force-sensitive ion-sensitive biological Min et al. Sensor technology continues to evolve, but also to promote the development of newer materials, such as nano materials.U.S. NRC has developed a nano ZrO2 gas sensor, and control of motor vehicle exhaust emissions, cleaning up the environment effect good, relatively broad application prospects. As a result of the production of nanomaterials sensor, has a huge interface can provide a lot of gas channel, and the on-resistance is small, is conducive to the development of miniaturized sensor to the birth of more new material With the continuous advancement of science and technology . Adoption of new technology in the development of new sensors, is inseparable from the adoption of new technology. Within the meaning of the new technology is very broad, and here mainly refers to the development of emerging sensor contact a particularly close microfabrication technology. This technique, also known as micro-machining technology, With the IC process development, it is the ion beam, electron beam, molecular beam, a laser beam, and chemical etching for microelectronics processing techniques in recent years, has been the more more used in the sensor field, such as sputtering, vapor deposition, plasma etching, chemical gas deposition (CVD), epitaxy, diffusion, etching, lithography, etc., so far, a large number of sensors made by the process described above reported at home and abroad. Smart materials smart materials refers to the physical, chemical, mechanical, electrical, and other parameters of the design and control of materials, develop biological material characteristics or superior to biological material properties of artificial materials. Some people think that the material has the following functions can be called smart materials: a judgment on the environment can be adaptive function; possess self-diagnostic function; possess self-healing capabilities; function with self-reinforced (or time base). The most prominent feature of the biological material with time base function, this differential sensor characteristics and its variational sensitive.Conversely, the long-term in a particular environment and get used to this environment, the sensitivity decreased. In general, it can adjust its sensitivity to adapt to the environment. In addition to the biological material, most notably smart material is a shape memory alloy, shape memory ceramics and shape memory polymer. The smart material exploration work has just begun, I believe the near future there will be a lot of development.。
