d i d o
MEMS
NanoScale Electronic/Magnetic Devices Non-Equilibrium Materials
Transmission Electron Microscope
Advanced Analytical Electron Microscope
Scanning Electron Microscope
2 Electron Energy Distributions
How deep does the signal come from?
Contrast in an SEM Image ?Topographic Contrast
?Atomic Number Contrast ?Voltage Contrast
?Magnetic Contrast
?Electron Beam Induced Current ?Cathodoluminescenece
?Electron Channeling Contrast ?Electronic/Digital Signal Processing ?Characteristic X-ray Emission
A-B A+B
No Field Field On
Voltage / Current Contrast