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Wafer-Cell-Panel Introduction(Rev[1]

Wafer ?Cell ?Panel Introduction

Stella Su, Monica Xiao

Feb-24-2011

Revision A

家庭供电电动车充电站

消防局

高速公路隧道

Wafer?Cell?Panel

硅片车间Wafer Fab电池车间Cell Fab组件车间Panel Fab

Wafer Cell Panel

第一阶段:硅片车间

Part 1: Wafer Fab.

硅片种类

Wafer Type

单晶和多晶原子结构的区别

单晶硅和多晶硅显微镜中的区别

微观结构的不同造成了外观上的区别:

在整个晶体内,原子都是周期性的规则排列,称之为单晶。

由许多取向不同的单晶颗粒杂乱地排列在一起的晶体称为多晶

传统硅片制造过程V.S Evergreen硅片制造过程:

流程图Process Flow

硅料粉碎Silicon Crushing

硅料预处理Silicon Prep

牵引丝复绕String Rewind

熔炉Quad

品质检测QISM

硅料再利用Seed bar & Ribbon

Salvage

硅片制造Wafer producing

拉升系统Puller

硅料粉碎Silicon Crushing

接收系统Receiver

将硅料盛装起来Gather the product

筛选到不同桶中Sort into different

bucket

将细小的粉末收集Gather fines in a

collector

硅料倒进粉碎机Pour into crusher

硅料粉碎Silicon Crushing

硅料粉碎的目的Purpose of crushing

●将硅块粉碎成颗粒状Crushing the silicon chunk to granular / pieces

硅块Silicon chunk硅颗粒Silicon pieces

硅料预处理Silicon Prep

流程图Process Flow

添加液态硼化合物,混合10分钟Add Boron liquid ,mix for 10 minutes

将硅料装入容器中Fill the silicon to vessel

装袋Bagging

混合3分钟;干燥3小时Mix for 3 minutes; Dry for 3 hours

装入容器

Filling into vessel

品质验证Qualifying

混合及干燥Mixing & Drying

Filling into vessel 参杂

Doping

将硅料包成2.5kg每袋Pack the silicon to 2.5 kg bag

取出5袋作验证用Pick up 5 bags for qualification;

检测硅片的电阻率及寿命Test the wafer resistivity and lifetime.

硅料预处理Silicon Prep

硅料预处理的目的Purpose of Silicon Prep :

?参杂氧化硼到硅料中,并包装成袋Dope silicon with Boron, and Pack silicon into bags ?验证是为了确认参杂氧化硼的效果Qualification is to confirm the doping result.

Vessel

品质验证Qualifying

硅料预处理

Silicon Prep

The resistivity-inspecting machine can indicate resistance of a wafer by measuring thickness of the wafer and calculate the resistance from a

formula.

The lifetime tester will detect how long time the electrons can be

activated, or how long distance the electrons can travel in the wafer.For resistivity

test, the results should be between 2 and 4.5 ohm-cm.For lifetime test, The results should be higher than 0.8ms .

硅料预处理Silicon Prep

参杂质量与效率的关系

Doping VS Efficiency

Higher doping ratio (>3.2ml:1kg) leads to lower resistivity, and vice versa.

The desired resistivity is 2.8 ohm-cm. We get highest efficiency when resistivity is between 2 and 4.5 ohm-cm.

Bag # dependence is found in resistivity. The last 2-3 bags have very high resistivity value and low efficiency. This is because silicon size increase from vessel bottom to vessel top.

牵引丝复绕String Rewind

目的Purpose of String Rewind

Transfers the strings

from a 8’’Gemini reel to

a 20’’Quad reel.

硅料再利用Wafer Salvage

-Seedbar Salvage from Gemini(3 feet)

-Ribbon Salvage from Quad

-Salvage ribbons are manually harvested from

Quad or Gemini into product wafers or seed

bars.

--To hold a ribbon, we have to use two hands

at all time.

拉伸系统Rubber Puller

The Rubber Puller is a part that pulls the ribbons out of melt crucible.

Purpose of QISM

-To inspect wafers and find out if

-The wafer defects can be defined

as the following categories:

-Crack

-Chip

-Limbo

-EBO (Edge Break Out)

-Spike

-Weight fail

QISM-Defect

Mouse Bite

Shark Tooth

EBO Protrusion

Chip

Limbo

Broken

QISM-Limbo

Measure theory: use three sets of

laser and receiver to scan wafer,

find the lowest and hight point.

Crucial settings:

●Lower and higher scan point

●Scan speed

●Degree of level of wafer support

It’s not possible to get same Limbo

value every time due to different wafer surface shape, but we tried to get smallest variation.1-1

1-2

2-1

2-23-1

3-2 Limbo=Height max-Height min

=Height2-1-Height3-2

第二阶段:电池车间

Part 2: Cell Fab.

1 Introduction On

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