巴尔查斯涂层介绍

BD 802 633 BE 4th Edition 11/2001B A I 730 D D i a m o n dC o a t i n g S y s t e mP a r t I / O p e r a t i n g M a n u a lS T A N D A R DPart I / Operating ManualBAI 730 D Diamond Coating SystemI m p o r t a n t i n f o r m a t i o n f o r t h e u s e rOnly appropriately qualified personal will have the required technical knowledge to correctly in-terpret and act upon the technical information in this document.We also point out that the content of this document is not part of, nor do they affect, any earlieror existing agreement, commitment or legal relationship. All obligations of Balzers Ltd. will begoverned by the sales contract in question, which also contains complete and exclusively validprovisions regarding warranty. These contractual warranty provisions are neither extended norrestricted by the information contained in this document.The information contained in this document will be regularly updated and checked for correct-ness, and may be subject to amendments at any time without prior notice.Manufacturer's address:Balzers LimitedFL-9496 BalzersPhone+423 388 4111Fax+423 388 5419Ó Balzers Limited. 1997Subject to technical alterations.No part of this document may be stored in a retrieval system, transmitted, or reproduced in anyway, including but not limited to photocopy, photograph, magnetic or other record, without theprior agreement and written permission from BALZERS Ltd. Offenders are liable to pay da-mages. All rights in respect of issuance of a patent or design registration are reserved.The system program, delivered as standard accessory or as updated version, are intended foruse only with the BAI 730 D system installed. It is illegal to use or copy this software for otherpurposes; in particular, it is strictly forbidden to give copies to other persons without the writtenpermission from BALZERS Ltd.2 / 6BD 802 633 BE 4th Edition 11/2001Part I / Operating ManualBAI 730 D Diamond Coating System1.G e n e r a l r e m a r k sThe deposition of wear protective coatings onto tools consists today not only of running thedeposition process. It consists also in the choice of appropriate substrates, pretreatment, toolinspection, documentation and delivery.This is especially true for diamond deposition, because the appropriate choice of the substratesand the pretreatment is the key for achieving good adhesion. Only carbide substrates can becoated and out of the large group of different carbide grades only grades with specificproperties.Depending on the substrates to be coated different efforts for pretreatment are necessary. Ac-cording to these requirements this manual is split into 3 parts:Part I:BAI 730 D Diamond Coating SystemPart II: Pretreatment ManualPart III: Diamond Deposition on ToolsPart I is the Manual for the BAI730 D Diamond Deposition System. It gives you all informationregarding the diamond deposition process, equipment and handling. It allows you to coat spe-cific substrates specially prepared from carbide manufacturers for diamond deposition (1 basicstandard process).Part II describes the pretreatment process and equipment developed by Balzers especially fordiamond deposition. It gives you the technical, chemical and handling information for the pre-treatment of conventionally available carbides for the following successful diamond deposition.Part III is the handbook for the tool coater. It describes all steps from income inspection to de-livery of the diamond coated tools. Here you find different recipes for the deposition process andpretreatment and which process you must choose for which tool application. The recipes youget in part III depend on the package you bought and will be supplemented in future with newrecipes according to progress in development.BD 802 633 BE 4th Edition 11/2001 3 / 6Part I / Operating ManualBAI 730 D Diamond Coating SystemLeerseite4 / 6BD 802 633 BE 4th Edition 11/2001Part I / Operating ManualBAI 730 D Diamond Coating SystemChapter overview The chapter Use, Technical Data and Infrastructure specifies the use of the DiamondCoating System and gives all the necessary technical parameters and specifications.The chapter Safety describes the safety philosophy of the BAI 730 D coating system. It provi-des information on the residual hazards, explains the safety precautions of the manufacturer,and explains safety regulations and warnings.The chapter Design and Function contains detailed information on the design and the func-tion of the BAI 730 D coating system.The chapter Operating Elements provides information on all control elements of the BAI 730D coating system.The chapter Operation describes how to operate the BAI 730 D coating system. This coversall principle operating steps of the deposition process.The chapter Troubleshooting contains a summary of errors and that may appear on theprocess visualization system. It gives also a checklist for possible errors and explainsadvanced trouble shooting.The chapter Maintenance and Service contains a maintenance and service list for the BAI730 D coating system.The chapter Installation, Transport and Disposal provides information on the transport andthe installation of the BAI 730 D coating system. It also explains the rules which are to be ob-served when the system is to be disposed.Consumables / Additional Parts / Accessories / Spare PartsParts lists and Drawings in exploded FormSoftware V04UAdjustmentsBD 802 633 BE 4th Edition 11/2001 5 / 6Part I / Operating ManualBAI 730 D Diamond Coating System6 / 6BD 802 633 BE 4th Edition 11/2001。

巴尔查斯涂层种类介绍表巴尔查斯涂层是一种常用的表面处理技术，广泛应用于各个领域，如汽车制造、航空航天、建筑等。

它可以提供保护、装饰、改善表面性能等多种功能。

本文将介绍几种常见的巴尔查斯涂层种类及其特点。

1. 防腐涂层防腐涂层是巴尔查斯涂层中最常见的一种。

它可以有效地防止金属表面受到氧化、腐蚀和化学物质的侵蚀，延长金属制品的使用寿命。

常见的防腐涂层材料包括环氧树脂、聚氨酯、聚酯等，其具有耐腐蚀性、耐磨性、附着力强等特点。

2. 耐热涂层耐热涂层主要用于高温环境下的金属制品，如引擎部件、炉具等。

它可以提供良好的耐高温性能，防止金属表面受热变形、氧化或融化。

耐热涂层常用的材料有陶瓷涂层、硅酮涂层等，具有高温稳定性、耐磨损性、隔热性能等特点。

3. 导电涂层导电涂层主要应用于电子器件、导电材料等领域。

它可以提供良好的导电性能，保证电流传输的稳定性和可靠性。

常见的导电涂层材料包括银、铜、金等，具有良好的导电性、耐腐蚀性和附着力。

4. 绝缘涂层绝缘涂层主要用于电子器件、电缆等领域。

它可以提供良好的绝缘性能，防止电流泄漏或短路现象的发生。

常见的绝缘涂层材料有聚酯、聚酰亚胺等，具有良好的绝缘性、耐热性和耐化学腐蚀性。

5. 抗磨涂层抗磨涂层主要应用于机械设备、工具等领域。

它可以提供良好的耐磨性能，减少金属表面因摩擦而受损。

常见的抗磨涂层材料有钨酸盐、钼酸盐等，具有高硬度、耐磨损性和耐腐蚀性。

6. 防尘涂层防尘涂层主要应用于电子器件、精密仪器等领域。

它可以形成一层保护膜，防止灰尘、污垢等杂质进入设备内部，影响设备正常工作。

常见的防尘涂层材料有聚四氟乙烯、硅酮等，具有良好的耐高温性、防水性和抗化学腐蚀性。

7. 防紫外涂层防紫外涂层主要应用于户外建筑、汽车玻璃等领域。

它可以有效地防止紫外线的辐射，减少材料老化、变色等问题。

常见的防紫外涂层材料有氟碳树脂、聚氨酯等，具有耐候性、耐腐蚀性和耐高温性。

巴尔查斯涂层种类繁多，每种涂层材料都有其特定的应用领域和优势。

刀具涂层公司十强刀具涂层公司十强内容来源网络，由“深圳机械展（11万㎡，1100多家展商，超10万观众）”收集整理！更多cnc加工中心、车铣磨钻床、线切割、数控刀具工具、工业机器人、非标自动化、数字化无人工厂、精密测量、3D打印、激光切割、钣金冲压折弯、精密零件加工等展示，就在深圳机械展.1.星弧涂层科技（苏州工业园区）有限公司是一家提供气相沉积涂层服务和相关设备开发，生产和制造的高科技企业。

其涂层产品包括类金刚石涂层（DLC）和其它金属陶瓷类（CrN，TiN等）全系列硬质涂层，主要服务于汽车零部件、医疗器械、工具模具以及一般机械零部件的市场和加工行业；公司的真空涂层设备和等离子体表面处理设备主要应用于机械加工、各种零件制造、LED芯片以及太阳能利用和转化行业。

公司拥有和掌握相关技术的核心知识产权，具有独立的研发和大规模量产能力，尤其是DLC相关技术和产品得到国内外用户的广泛认可和采用。

2.日新高性能涂层（沈阳）有限公司是日新电机株式会社在沈阳投资兴建的专门从事PVD真空离子镀膜的专业企业。

日新涂层是处于全世界领先地位的专业涂层公司，在研制开发机械加工工具、模具和各种设备零部件的PVD涂层技术方面处于全世界领先地位，从上世纪七十年代开始，日新公司已成为世界的高性能工具涂层行业的先驱者之一。

日新涂层采用独自研发的电弧蒸发源和精细涂层技术，使电弧式中产生的液滴现象明显减少，再加上电弧式具有的高接点，可向客户提供平滑性好的精细涂层。

日新涂层产品表面及其平滑（摩擦系数0.3),极高的耐磨损性能，极高的抗氧化性能，极高的热硬性，极强的附着力。

公司致力于中国国内的切削刀具、工具、模具、零部件、电子等基础工业、装备制造业，提供优质的表面硬化处理服务与技术支持。

3.胜倍尔超强镀膜(苏州)有限公司专业低温专利技术真空PVD镀膜服务，PVD涂层，TiN涂层，TiCN涂层，TiAlN涂层,CrN涂层,DLC涂层,TiAlCrN涂层。

Cutting:Products and servicesProductivity gainsCoated cutting tools can be used with substantially higher cutting speeds and feeds than uncoated tools. This reduces machining times and thus costs per piece. Longer tool life means fewer tool replacements and thus reduced setupcosts.HSC and dry machiningHigh-speed cutting and dry machining generateconsiderable heat. Thanks to the thermal stability, hot hardness and oxidation resistance of the coating, theheat is dissipated via the chip.Hard machiningHard and wear-resistant coatings make it possible to machine hardened steels up to 70 HRC. Tools with defined cutting edges allow the finishing of hard work-pieces, thus eliminating the need for grinding.Difficult to cut materialsTitanium and nickel alloys as well as high-alloy steels are difficult to cut. Coatings with a low coefficient of friction and a low tendency of adhesion to the workpiece materialmake it easier to machine such materials.Re-coating offers even greater savingsIf resharpened tools are re-coated, they achieve the same performance as new coated tools and a longer total service life. Re-coating becomes a must if the service lives and cutting parameters prescribed for production lines are to bemaintained.Partners for regrindingRegrinding and recoating must occur rapidly and efficiently. Oerlikon Balzers cooperates closely with reputable toolgrinding specialists.Efficient logisticsIn most areas, Oerlikon Balzers offers a convenient pick-up service. Special transport containers eliminate the need to individually package the tools. Also, the order data can be transmitted digitally.BALINIT ® reduces costs in cutting applicationsHQ016EN (1210)We are at your service. World-wide.Headquarters OC Oerlikon Balzers AG Technology and Service Centre Iramali 18LI-9496 Balzers Liechtenstein T +41 81 784 /balzersArgentina Oerlikon Balzers Revestimentos Metálicos Ltda Av. Pablo Richieri, 4240Córdoba 5014T +54 351 /balzers/arBenelux Oerlikon Balzers Coating Benelux NV Schurhovenveld 4 050B-3800 Sint-Truiden T +32 11 69 30 /balzers/beBrazil Oerlikon Balzers Revestimentos Metálicos Ltda Rua Balzers, 250Parque Industrial – Jundiai-SP 13213-084T +55 11 2152 /balzers/brCanada Oerlikon Balzers Coating USA Inc.3250 Harvester Road Burlington, Ontario L7N 3W9T +1 905 631 /balzers/usChina Oerlikon Balzers Coating (Suzhou) Co., Ltd No.9 Chang Yang Street Suzhou Industry Park Suzhou, 215024Jiangsu Province, China T +86 512 676 /balzers/cnCzech Republic Oerlikon Balzers Coating Austria GmbH organizační složka Červeny ´ K říž 250586 02 Jihlava T +420 561 201 /balzers/czGermany Oerlikon Balzers Coating Germany GmbH Am Ockenheimer Graben 41D-55411 Bingen T +49 67 21 7 /balzers/deSpain Oerlikon Balzers Coating Spain S.A.U.Antigua, 2E-20577 Antzuola T +34 9 /balzers/esFrance Oerlikon Balzers Coating France SAS P .A. des 3 Noyers 16 avenue James de Rothschild F-77164 Ferrières-en-Brie France T +33 1 64 12 49 /balzers/frIndia Oerlikon Balzers Coating India Ltd.EL-22, J Block M.I.D.C. Bhosari Pune 411 026T +91 20 3061 /balzers/inIndonesia PT Oerlikon Balzers Artoda Indonesia Kawasan Delta Silicon 2 Blok F5 No. 10A Lippo Cikarang, Cibatu Cikarang Selatan, Bekasi 17550T +62 21 8911 /balzersItaly Oerlikon Balzers Coating Italy S.p.A.Via Volturno, 37I-20047 Brugherio (MI)T +39 039 28 /balzers/itKorea Oerlikon Balzers Coating Korea Co., Ltd.Eyon-Hansan Industrial Park (5B-3, 4, 5)833-2 Hansan-ri Chongbuk-myeon Gyeonggi-do Pyongtaek City 451-833T +82 31 680 /balzers/krLiechtenstein OC Oerlikon Balzers AG Beschichtungszentrum Iramali 18LI-9496 Balzers T +423 388 /balzers/chHungary Oerlikon Balzers Coating Austria GmbH Magyarországi Fióktelepe Babér U. 6 (Alpa Ipari Zóna)H-8000 Székesfehérvár T +36 22 /balzers/huMalaysia Oerlikon Balzers Coating Malaysia Sdn. Bhd. - Regional Office No 21&23, Jalan PTP 1/6, Taman Perindustrian Tasik Perdana,Puchong, Selangor 47120T +603-8066 /balzersMexico Oerlikon Balzers Coating México, S.A. de C.V.Acceso III No. 304 y 306Colonia Industrial La Montaña C.P. 76150 - Querétaro, Qro.T +52 442 209 68 /balzers/mxJapan Oerlikon Nihon Balzers Coating Co., Ltd.7-2-2 Shinomiya, Hiratsuka-City,Kanagawa-Pref., Japan 254-0014T +81 463 /balzers/jpNordic Countries Oerlikon Balzers Sandvik Coating AB Årstaängsvägen 31 D-E SE-117 43 Stockholm T +46 8 681 /balzers/seAustria Oerlikon Balzers Coating Austria GmbH Burgstallweg 27A-8605 Kapfenberg T +43 38 62 /balzers/atPoland Oerlikon Balzers Coating Poland Sp. z o.o.ul. Fabryczna 4PL-59-101 Polkowice T +48 76 746 48 /balzers/plPortugal Oerlikon Balzers Coating Spain S.A.U.Sucursal em Portugal Zona Industrial do Casal da Areia,Lote 17PT-2460-392 Alcobaça T +351 262 544 /balzers/ptRomania S.C. Oerlikon Balzers Coating Austria GmbH Kapfenberg Austria - Maracineni Branch Office Platforma …Europa 2“ sat Argeselu, nr. 537 bis - Hala 5Com. Maracineni Jud Arges - Romania RO-110195 Pidesti T +40 372 706 /balzers/roRussia Oerlikon Balzers RUS Ltd.Russian Federation, 144011Moscow Region, Elektrostal Lesnaya st, 8A.T +7 495 702 97 /balzersSwitzerland Oerlikon Balzers Coating SA, Brügg Erlenstrasse 39CH-2555 Brügg T +41 323 65 74 /balzers/chSingapore Oerlikon Balzers Coating Singapore Pte. Ltd.21 Kian Teck Drive Singapore 628838T +65 62 68 62 /balzers/sgThailand Oerlikon Balzers Coating (Thailand) Co., Ltd.Amata Nakorn Industrial Estate 700/38 Moo 6, T. Nongmaidaeng A. Muang Chonburi 20000T +66 38 468 810//balzersTurkey Oerlikon Balzers Kaplama Sanayi ve Ticaret Ltd. Sti Nosab 120. Sokak No. 716140 Nilüfer Bursa T +90 224 411 00 /balzers/trUnited Kingdom Oerlikon Balzers Coating UK Ltd.Bradbourne Drive, Tilbrook,Milton Keynes, MK7 8AT Great Britain T +44 19 08 37 72 /balzers/ukUSA Oerlikon Balzers Coating USA, Inc.2511 Technology Drive Suite 114Elgin, IL 60124United States T +1 847 /balzers/us/balzersProperties of BALINIT ® coatings(...) = alternative coating CC = Cemented carbide HSS = High-speed steelCutting toolsApplication recommendations for BALINIT ® coatingsCoatable materialsMetallic materials such as high-speed steels, hot- and cold-working steels, stainless steels, heat-treatable steels, carbides and cermets can be coated.Heat treatment of toolsThe temperature in the final heat-treatment step (most commonly the tempering temperature in the case of steels) must be higher than the coating temperature.Surface conditions of toolsSurfaces must be in the bright condition. Tools must not be chrome-plated, burnished,steam-tempered or bath-nitrided. Ground surfaces must not display grinding cracks, oxide films or rehardening burns. Cutting edges must not have burrs. Polished surfaces must be free of polishing residues. Surfaces must be free of rust, chips, wax, adhesive tape, and paint. Tools must be demagnetised.Brazed toolsBrazed tools can be coated provided the filler metal has a melting point higher than 600°C and contains no cadmium.Packaging for shipmentTools are to be packaged in such a way that they will not be damaged by other objects or each other. The packaging has to be suitable for return shipment. On request, shipment can occur in coating fixtures. The use of transport grids for shank tools facilitates safe and cost-effective handling without the need for expensive individual packaging.Rust protectionTools should be coated lightly with water-displacing oil in order to safeguard them against rusting.Wear and success factorsForms of tool wearSuccess factors for coatingB = BALINIT ® BDIA = BALINIT ® DIAMONDHC = BALINIT ® HARD CARBON HL = BALINIT ® HARDLUBEA = BALINIT ® AAD = BALINIT ® ALDURA AN = BALINIT ® ALNOVAAP = BALINIT ® ALCRONA PRO LM = BALINIT ® LATUMA PT = BALINIT ® PERTURA T = BALINIT ®TRITONThese recommendations are of a general nature. Precise values depend on the substrate, geometry, surface finish, and machining parameters.。

巴尔查斯PVD涂层机的起弧保护方式近年来，随着中国工业经济的发展，PVD涂层业务也发展很快。

目前在国际市场上知名的PVD设备制造商有瑞士的巴尔查斯、德国的普拉提，荷兰的豪泽等。

其中巴尔查斯的涂层在国际上处于领先地位，市场占有率第一。

在PVD涂层工艺过程中，起弧保护是重要的保护之一，好的起弧保护措施可以有效的避免加工零件灼伤，从而最大限度的保护工件。

一、巴尔查斯PVD涂层机介绍巴尔查斯涂层设备最普遍的型号是BAI1200，在2006年后逐渐推出了新型号-INNOVA无论是BAI1200和INNOVA设备涂层原理都是一样的，都分为抽真空、刻蚀、涂层、冷却、检漏五个阶段。

其中最关键的阶段是刻蚀和涂层：刻蚀：是巴尔查斯涂层机特有的工艺。

由弧电源在阴极和辅助阳极间放电，对工艺气体- 氩气进行电离，从而形成氩气的等离子体。

等离子体中的带正电的氩离子在偏压电源产生的电场中进行加速，高速撞击工件的基体，把附在基体表面的氧化层打掉，从而增加了涂层的结合力。

涂层：金属蒸发源（靶源）作为阴极，在真空的条件下通过它与阳极腔体之间的弧光放电，使靶材蒸发并离化，形成空间等离子体。

等离子体中的金属正离子在偏压电场的牵引下，镀覆到工件基体表面形成涂层。

巴尔查斯涂层机的基本组成包括真空镀膜室、阴极弧源、离子室、辅助阳极、基片、负偏压电源、真空系统、起弧保护装置等。

二、“起弧”定义和判断原理“起弧”定义：在刻蚀和涂层阶段，由涂层电源提供等离子体，在等离子体中包含大量的正离子和电子，如果此时在基体和腔体之间加上负向偏压，则一部分正离子会被吸附到基体上，同时电子会被吸引到腔体，形成偏压电流。

正常情况下，偏压电流均匀分布到基体和腔体之间。

但是特殊情况下，偏压电流突然上升，并且大部分电流都从工件上某个特定位置流过，这种情况我们称之为“起弧”。

起弧现象会引起工件灼伤，严重甚至报废。

判断原理：正常情况下，在刻蚀阶段中的偏压电流为10-20A ，而在涂层阶段的偏压电流为30-50A。

AlTiSiN／AlCrSiN 纳米多层复合涂层的结构及性能研究杨兵;刘琰;刘辉东;罗畅;万强;蔡耀;陈浩;陈燕鸣【摘要】以AlTiSi 合金和 AlCrSi 合金为靶材料，采用阴极电弧离子镀技术在单晶硅、硬质合金基底上沉积AlTiSiN／AlCrSiN纳米晶多层复合涂层，系统研究了氮气压强变化对AlTiSiN／AlCrSiN复合涂层结构和力学性能的影响．利用扫描电镜和X射线衍射仪分析了涂层的形貌和相结构，用显微硬度计和摩擦磨损仪测量了涂层显微硬度和摩擦系数．结果表明：氮气压强对涂层微结构和性能具有较大影响，涂层是以NaCl型TiN和CrN相结构为主的多晶材料．由于多元素掺杂导致复合涂层的衍射峰与纯TiN和CrN衍射峰位相比发生一定的偏移．随着氮气压强的增大，涂层的衍射峰强度逐渐降低并宽化，说明随着氮气压强的增大晶粒尺寸减小．涂层表面的颗粒污染和沉积气压密切相关，随气压增加污染颗粒尺寸逐步减少，涂层表面粗糙度降低；当氮气压从2．0 Pa增加到4．0 Pa时涂层的硬度值由2437．9 HK逐渐增大至3221．5 HK；涂层摩擦学性能也和氮气压密切相关，当氮气压强低于3．0 Pa时，平均摩擦系数约0．410；而在氮气压强高于3．0 Pa 后，平均摩擦系数逐渐降至0．258．%AlTiSiN/AlCrSiN nanocomposite coatings were deposited on Si and cemented carbide substrate using AlTiSi , AlCrSi cathodes by vacuum cathodic arc evaporation .The influence of N 2 pressure on the structure and mechanical properties of the coatings were investigated systematically .The morphology and phase structure were investigated by SEM and XRD.The micro hardness and coefficient of friction were measured by the micro hardness tester and friction and wear tester.The results showed that N 2 pressure had great influence on the microstructure and mechanical properties of the coatings.The coatingswere polycrystalline which exhibited NaCl-type TiN and CrN phase.The diffraction peaks of the coatings had a certain deviation due to the multi element doping compared with the pure TiN and CrN diffraction peaks . With the increase of N2 pressure, the intensity of the diffraction peaks of the coating decreased and widened gradually , suggesting that the grain size decreased with the increase of the N 2 pressure.The particle pollution was closely related to the deposition pressure .The particle size and the surface roughness decreased with the increase of the pressure .The coating hardness increased from 2437.9 HK to 3221.5 HK gradually when N2 pressure increased from 2.0 Pa to 4.0 Pa.The tribological properties of the coatings were also closely related to nitrogen pressure .When the pressure was lower than 3.0 Pa, the average friction coefficient was about 0.410, while the average friction coefficient decreased to 0.258 when N2 pressure was higher than 3.0 Pa.【期刊名称】《中南民族大学学报（自然科学版）》【年(卷),期】2016(035)003【总页数】4页(P13-16)【关键词】电弧离子镀;AlTiSiN/AlCrSiN复合涂层;氮气压强;显微硬度;摩擦系数【作者】杨兵;刘琰;刘辉东;罗畅;万强;蔡耀;陈浩;陈燕鸣【作者单位】武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072;武汉大学动力与机械学院，武汉430072【正文语种】中文【中图分类】TG174.444随着高强度钢、高温合金及复合材料等难加工材料使用量的急剧增加，以及高速切削、干切削和微润滑切削工艺大量使用，切削区域的温度常高于常规硬度为20～30 GPa 的 TiN、TiCN、TiAlN 等刀具涂层的热分解温度，导致刀具氧化磨损严重而失效，对切削刀具涂层性能提出了更高的技术要求[1-3] .自从Veprek[4]成功制备出超硬Ti-Si-N涂层以来，纳米晶-非晶复合涂层成为超硬质涂层研究的一个热点.但纯Ti-Si-N涂层摩擦系数大，在工业应用上存在一定的局限性.为了克服这些缺点，添加多合金元素(Al、Cr、W)形成多元纳米晶复合涂层是该类涂层发展的一个主要方向.AlTiSiN和AlCrSiN是目前工业上获得应用的两种合金化涂层，利用合金化提高涂层的耐磨性及切削性能.Si能起到细化晶粒、提高硬度的作用，Si在AlTiN和AlCrN涂层中以会形成非晶态的Si3N4,能有效地阻止相邻晶粒间由于择优取向方向的改变而导致的结合力的丧失，并消除内部残余应力，改善力学性能，大范围拓展了纳米晶-非晶涂涂层的应用范围.但大多集中在涂层的多元合金化，涂层硬度、韧性及切削性能有待进一步提高.将多种 Me-Si-N纳米晶-非晶涂层材料复合构筑纳米多层结构，充分利用纳米晶-非晶强化导致的超硬效应及多层膜结构大量界面导致的韧化效应，在保持材料高硬度基础上大幅度提高涂层的韧性、硬度及耐温性，是目前超硬刀具涂层材料领域发展的前沿.本文尝用多弧离子镀方法制备了AlTiSiN/AlCrSiN纳米晶多层复合涂层，系统研究了氮气压强对涂层结构和力学性能的影响.1.1 材料和仪器场发射扫描电镜(Sirion IMP型, 荷兰FEI)，X射线衍射仪(X'Pert Pro型，荷兰帕纳科)，显微硬度计(HX-1000，上海光学仪器厂)，球盘测试仪(MS-T3000，兰州华汇).1.2 涂层的制备用AlTiSi合金靶和AlCrSi合金靶制备了AlTiSiN/AlCrSiN复合涂层，实验所用基体材料为硬质合金与单晶硅片.AlTiSiN/AlCrSiN复合涂层沉积之前，先用氩气进行辉光清洗10 min以保证衬底表面清洁，之后用Cr靶轰击10 min以增强涂层附着力.为保证AlTiSiN/AlCrSiN复合涂层与基底之间的结合力，沉积过程中通入N2制备CrN过渡层和CrN/AlTiSiN的梯度结构，沉积衬底偏压为-150 V，靶电流控制为60 A，沉积时间均为10 min，控制氮气流量将沉积气压保持在3.3 Pa.工件模具绕沉积室的中心轴旋转，工件模具转至AlTiSi靶前面时形成AlTiSiN涂层,当工件模具转至AlCrSi靶前面形成AlCrSiN涂层，工件模具连续转动将形成AlCrSiN/AlTiSiN多层涂层.制备AlTiSiN/AlCrSiN复合涂层的具体参数见表1. nano-composite coatings1.3 涂层性能检测用扫描电镜观察样品表面和截面形貌，用XRD分析AlTiSiN/AlCrSiN复合涂层的晶体结构与相组成.用显微硬度计测量AlTiSiN/AlCrSiN复合涂层硬度，载荷为50 g，为提高测量的准确性，每个样品取10个点进行测量，取其平均值，平均摩擦系数用球盘测试仪测得.对磨材料为不锈钢，球盘载荷为500 g，旋转速度为50 r/min，每组持续时间为30 min.2.1 涂层XRD衍射结果分析图1为不同氮气压强下制备的样品的XRD衍射图.图1结果表明：AlTiSiN/AlCrSiN复合涂层中晶体结构为NaCl型，涂层中有TiN和CrN的衍射峰，并具有多个晶面取向，分别为(111)，(200)，(220).复合涂层的衍射峰在TiN和CrN的衍射峰之间，随着氮气压强的增大，涂层的衍射峰逐渐降低并展宽，其中(200)取向衍射峰展宽程度大于(111)和(220)取向，表明(200)取向上晶粒尺寸更小.根据Scherrer[5]公式计算AlTiSiN/AlCrSiN在不同晶面取向上的平均晶粒尺寸：其中，D为晶粒度，为衍射光线波长，为半峰宽，为衍射角，K为常数(取0.89).不同氮气压强下制备的AlTiSiN/AlCrSiN 晶粒尺寸见表2.由表2可见，随着氮气压强增大，相对于其他取向，(200)取向上晶粒尺寸更小，这是由于薄膜的生长和取向是由表面能和应变能综合控制的结果，随着氮气压强的增大，涂层应力增大[6]，根据薄膜能量最小化理论，当薄膜应力较大时，弹性应变能成为决定薄膜结晶取向的主导因素，而(200)取向上的应变能相对于其他取向较大，因此(200)取向上晶粒生长速率小于另外两个取向.图中未见硅或硅合金的衍射峰，说明硅以非晶态形式存在，这与Veprek和Reiprich研究TiSiN纳米复合涂层时所得出的结果一致[7].图中也未见AlN或Al的峰，且TiN、CrN的衍射峰相对于标准峰发生了偏移，这是因为Al部分存在于TiN、CrN的晶格中形成了饱和固溶体的缘故[8]. 2.2 涂层的表面形貌分析图2 为在不同氮气压强条件下制备的AlTiSiN/AlCrSiN复合涂层的表面形貌.由图2可见当氮气压强为2.0 Pa时，涂层表面分布着较多的的大颗粒.因为氮气压强较低时，真空室中粒子碰撞几率较小，很多粒子来不及碰撞直接沉积到基体表面形成颗粒较大的熔滴[9].随着氮气压强增大，粒子碰撞的几率增大，并且有利于未经第一次碰撞直接沉积到基体表面的粒子产生二次溅射，使得涂层表面分布的颗粒尺寸减小[10,11].当压强增大到3.5 Pa时，过高的氮气压强使金属粒子运动的自由程变短，降低了高能粒子对基体的再溅射作用，导致涂层表面出现凹坑[12].当氮气压强增至4.0 Pa时，真空室中的氮气与靶材产生反应，在靶材表面形成氮化物，阻碍靶材产生金属离子，难以在涂层表面产生大颗粒及凹坑.图3为氮气压强为3.5 Pa时制备的AlTiSiN/AlCrSiN复合涂层的SEM截面形貌图，由图3可见AlTiSiN/AlCrSiN复合涂层有3层，由下到上分别为CrN过渡层，CrN/AlTiSiN梯度层，AlTiSiN/AlCrSiN复合涂层.层与层之间结合致密，未出现孔洞与断层现象，且AlTiSiN/AlCrSiN复合涂层的致密性优于CrN和CrN/AlTiSiN.2.3 AlTiSiN/AlCrSiN涂层硬度测试图4为复合涂层的显微硬度随氮气压强变化的曲线图.由图4可见复合涂层的硬度随着氮气压强的增大而呈现单调上升的趋势.在压强为4.0 Pa时达到最高硬度值3221.5 HK.这是由于在真空室中氮气与金属离子反应生成晶体，压强增大，金属离子与氮气碰撞的几率增大，晶体形成速度加快，刚结晶的晶体来不及长大就被新形成的晶粒所覆盖，因此晶粒尺寸减小.这与XRD图谱中氮气压强增大涂层晶粒尺寸减小的变化规律相对应.根据Hall-Petch关系[13],晶粒尺寸减小会导致硬度增加.2.4 AlTiSiN.AlCrSiN涂层平均摩擦系数测试图5为涂层的平均摩擦系数随氮气压强变化曲线图.由图5可见，氮气压强为2.0～3.0 Pa时，涂层的平均摩擦系数基本保持不变；而压强增加至3.0～4.0 Pa 时，涂层的平均摩擦系数减小.因为前者涂层的表面熔滴颗粒较大，表面较粗糙；后者涂层表面熔滴颗粒数量减少，尺寸减小，降低了表面粗糙度，表面更加平整，涂层的平均摩擦系数降低.此外氮气压强增大至3.5～4.0 Pa时，涂层硬度较高，硬度值的增大也降低了涂层的平均摩擦系数.(1)以AlTiSi合金和AlCrSi合金作为阴极弧靶材料，用多弧离子镀系统制备了AlTiSiN/AlCrSiN复合涂层，其相结构为含有TiN和CrN的NaCl型结构.(2)随着氮气压强的增大，AlTiSiN/AlCrSiN复合涂层表面大颗粒逐渐减少，表面粗糙度降低，表面趋于平整.(3)氮气压强对AlTiSiN/AlCrSiN复合涂层的硬度有显著影响.随着氮气压强的增大，涂层的硬度增大.在氮气压强为4.0 Pa时，涂层硬度达到最大值3221.5 HK.(4)氮气压强影响AlTiSiN/AlCrSiN复合涂层的平均摩擦系数.氮气压强低于3.0 Pa 时，涂层平均摩擦系数变化不明显；氮气压强大于3.0 Pa时，涂层的平均摩擦系数随氮气压强增大而降低.在氮气压强为4.0 Pa时，涂层的平均摩擦系数达到最小值0.258.【相关文献】[1] Tam P L, Zhou Z F, Shum P W, et al. Structural, mechanical, and tribological studies of Cr-Ti-Al-N coating with different chemical compositions[J]. Thin Solid Films, 2013,516(16):5725-5731.[2] Chu K, Shen Y G. Mechanical and tribological properties of nanostructured TiN/TiBN multilayer films[J]. Wear, 2008, 265(3/4):516-524.[3] Knotek O, Atzor M, Barimani A, et al. Development of low temperature ternary coatings for high wear resistance [J]. Surf Coat Tech, 1990, 42(1):21-28.[4] Veprek S, Niederhofer A, Moto K, et al. Composition, nanostructure and origin of the ultrahardness in nc-TiN/a-Si3N4/a- and nc-TiSi2, nanocomposites with HV=80 to≥105 GPa[J]. Surf Coat Tech, 2000, s 133-134(1):152-159.[5] Patterson A L. The Scherrer formula for x-ray particle size determination[J]. Phys Rev,1939, 56(10):978-982.[6] 赵升升, 程毓, 常正凯, 等. (Ti,Al)N涂层应力沿层深分布的调整及大厚度涂层的制备[J]. 金属学报, 2012(3):277-282.[7] Veprek S , Reiprich S. A concept for the design of novel superhard coatings[J]. Thin Solid Films, 1995, 268(1/2):64-71.[8] Finster J, Klinkenberg E D, Heeg J. ESCA and SEXAFS investigations of insulating materials for ULSI microelectronics[J]. Vacuum, 1990, 41(90):1586-1589.[9] 陈燕鸣, 万强, 蔡耀,等. 多弧离子镀制备TiN涂层的高温氧化行为分析[J]. 中南民族大学学报(自然科学版), 2015,34(4):68-71.[10] Li M, Wang F. Effects of nitrogen partial pressure and pulse bias voltage on (Ti,Al)N coatings by arc ion plating[J]. Surf Coat Tech, 2003, 167(2):197-202.[11] Creasey S, Lewis D B, Smith I J, et al. SEM image analysis of droplet formation during metal ion etching by a steered arc discharge[J]. Surf Coat Tech, 1997, 97(1):163-175.[12] Li M, Wang F. Effects of nitrogen partial pressure and pulse bias voltage on (Ti,Al)N coatings by arc ion plating[J]. Surf Coat Tech, 2003, 167(2):197-202.[13] Segal V M, Ferrasse S, Alford F. Physical vapor deposition targets, and methods of fabricating metallic materials: US, US6946039[P]. 2005.。

欧瑞康巴尔查斯涂层（苏州）有限公司新增300涂层米PVD 涂层“DYLYN”以及真空等离子脱膜设备技术改造项目、零部件脱膜线和PPD渗氮炉技改项目、欧瑞康巴尔查斯涂层（苏州）有限公司扩建项目竣工环境保护验收意见根据《建设项目环境保护管理条例》规定,2019年4月29日，欧瑞康巴尔查斯涂层（苏州）有限公司组成验收工作组对公司“新增300涂层米PVD涂层“DYLYN”以及真空等离子脱膜设备技术改造项目（以下简称项目一）、零部件脱膜线和PPD渗氮炉技改项目（以下简称项目二）、欧瑞康巴尔查斯涂层（苏州）有限公司扩建项目（以下简称项目三）”进行竣工环境保护验收。

验收工作组由建设单位（欧瑞康巴尔查斯涂层（苏州）有限公司，并由公司副总经理担任验收工作组组长）、项目一环评单位（苏州新视野环境工程有限公司）、验收监测单位和验收监测报告编制单位 (中新苏州工业园区清城环境发展有限公司)等单位代表及专业技术人员组成(名单附后)。

验收组对照《建设项目竣工环境保护验收暂行办法》的相关规定、严格依照国家有关法律法规、建设项目竣工环境保护验收技术规范/指南、本项目环境影响评价报告表和昆山市环保局建设项目环保审批意见等要求，分别听取了项目工程、环保设施建设和竣工验收监测情况的介绍，审阅了由中新苏州工业园区清城环境发展有限公司2019年4月编制的《欧瑞康巴尔查斯涂层（苏州）有限公司新增300涂层米PVD涂层“DYLYN”以及真空等离子脱膜设备技术改造项目、零部件脱膜线和PPD渗氮炉技改项目、欧瑞康巴尔查斯涂层（苏州）有限公司扩建项目竣工环境保护验收监测报告表》等相关材料，踏勘了建设项目现场，在补充相关材料后，提出意见如下：一、工程建设基本情况（一）建设地点、规模、主要建设内容建设地点：欧瑞康巴尔查斯涂层（苏州）有限公司位于苏州工业园区长阳街9号；租赁欧瑞康（中国）科技有限公司厂房从事生产经营，“项目一”在B栋，“项目二”PPD生产线位于在X栋，其它位于B栋，“项目三”在B栋。