BDD电极的制备及其特性的研究
摘 要
本篇论文使用了热丝化学气相沉积法（HFCVD）制备掺硼金刚石(BDD)膜电极，接着对掺硼金刚石薄膜的生长特性进行深入的研究和仔细的分析。然后我们对制备获取的掺硼金刚石电极，采用SEM、Raman光谱、XRD等手段表征了掺硼金刚石的微观形貌及其结构，并对BDD电极的Hall效应分析 、BDD电极的充放电性能分析、 BDD电极的阻抗分析、BDD电极的动力学分析和用循环伏安法对BDD电极的电势窗口分析。
通过实验表明:这次实验制成了质量较好的掺硼金刚石膜电极。然后对其进行电化学性能的测试发现其的比电容比较大，可用来做优良的电极材料。
关键词：掺硼金刚石 HFCVD 电化学 Hall效应
Synthesis and Properties of Boron-doped Diamond
Film
ABSTRACT
This paper uses a hot filament chemical vapor deposition (HFCVD) Preparation
of boron-doped diamond (BDD) film electrode, then on boron-doped diamond thin
film growth characteristics of in-depth research and careful analysis. Then boron-doped diamond electrode preparation we get, using SEM, Raman spectroscopy, XRD
and other means to characterize the microstructure of boron-doped diamond of its
structure, and studied the Hall effect analysis BDD electrode sheet resistance BDD
Electrodes, BDD electrode impedance analysis, dynamic analysis BDD electrodes and
electrode potential window analyzed by cyclic voltammetry.
Experiments show: the experiment is made of good quality boron-doped diamond
film electrodes. And then found its specific capacity is relatively large, it can be used
for its excellent electrochemical properties of the electrode material testing.
Key Words: Boron-doped diamond HFCVD Electrochemical Hall effect
目 录
第一章 绪论 ...................................................................................................................................................... 1
1.1 金刚石的晶体结构 ....................................................................................................................................... 1
1.2 金刚石的性质及应用 .................................................................................................................................. 2
1.3 掺硼金刚石的应用 ....................................................................................................................................... 2
1.4 BDD电极的性质及应用 .............................................................................................................................. 3
1.5 本文的工作内容 ............................................................................................................................................ 5
第二章 实验部分 ......................................................................................................................................... 7
2.1 设备介绍 .......................................................................................................................................................... 7
2.1.1 气路系统 ................................................................................................................................................ 7
2.1.2 真空系统 ................................................................................................................................................ 7
2.1.3 水循环系统 ........................................................................................................................................... 7
2.1.4 电源系统 ................................................................................................................................................ 8
2.1.5 偏压电源系统 ...................................................................................................................................... 8
2.2 BDD电极的制备工艺 ................................................................................................................................... 8
2.3 BDD电极的电化学分析方法 ................................................................................................................... 11
第三章 掺硼金刚石膜的生长特性研究 ....................................................................................... 13
3.1 BDD的生长速率的影响 ............................................................................................................................ 13
3.2 BDD电极扫描电子显微镜（SEM）分析.............................................................................................. 13
3.3 BDD电极的RAMAN光谱分析 ..................................................................................................................... 14
3.4 BDD电极 X射线衍射(XRD)分析 ........................................................................................................... 15
第四章 掺硼金刚石膜的电化学特性研究 .................................................................................. 17
4.1 BDD电极的HALL效应分析 ..................................................................................................................... 17
4.2 BDD电极的充放电性能分析 ................................................................................................................... 17
4.3 BDD电极的阻抗分析 ................................................................................................................................. 18
4.3.1 交流阻抗法 ............................................................................................................................................ 18
4.3.2 阻抗分析 ................................................................................................................................................ 18
4.4 BDD电极的动力学分析 ............................................................................................................................ 19
4.5 BDD电极的电势窗口分析 ...................................................................................................................... 20
4.5.1 循环伏安法 ............................................................................................................................................ 20
4.5.2 电势窗口分析 ....................................................................................................................................... 20
第五章 总 结 .......................................................................................................................................... 23
