Instruction of Pulsed Energy Process

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Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Super-Lattice PLD: (SrMnO3)2n(PrMnO3)2n on (100) LaAlO3
ID: 511031 (STO)20n(YBCO)n
2d sin = nl
d
150
20 x (SrTiO3)
Intensity
1 x (YBa2Cu3O7)
Y(005)
100
2
Y(007)
50
SrTiO3
0 20
30
40
50
60
2 Theta (degrees)
10000 Virginia Manor Road Beltsville, MD 20705 USA
Stage 1: Ablation Process
Pulsed laser beam hit target surface within short time. Optical energy source reacts with target materials. Target material’s optical property dependency.
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
SLs (003)
80
CCS : Continuous Composition Spread
S(003) Y(009)
160
150
Intensity (cps)
140 120 100 80 60 40
ID: 511031 (STO)20n(YBCO)n -scan @ YBCO(005) 2 = 38.52°
0.51°
Intensity
20
100
0 -3 -2 -1 0 1 2 3
Theta (degrees)
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Dept. of Field Service & Applications (service@)
Y(007)
Super-Lattice PLD: (SrTiO3)20n(YBa2Cu3O7)n on SrTiO3
250
S(002) S(001) Y(003) Y(006)
200
Multi-Layer
substrate
Super-Lattice
substrate
Super-Alloy
substrate
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
Advantage & Disadvantage of PLD & PED
1. Independent of Energy Source for PLD * Chamber’s Process Parameters independent * Multiple Chambers with One Laser Source * Smart approach for complex materials * Variety of Choice for Laser Types * Unlimited Possibility of Combination with other techniques 2. Limitation of Optical Property for PLD * Can be dramatically improved by optimized beam quality 3. Limitation of Electrical Property for PED * Can be improved by optimized target modifCover All Materials
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Standard Multi-Target Processes
Each layer thickness is thick enough to maintain its bulk properties. Each layer or at least one layer thickness is thin enough (only a few mono-layer thick) to modify its bulk properties. Nano-Structural think films. Each layer thickness is super thin (1 or 2 mono-layer thick or thinner) so that elements diffuse into other layers, creating a new alloy .
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
PLD Process Technology
Stage 1: Ablation Process Stage 2: Plasma Process Stage 3: Growth process
Dept. of Field Service & Applications (service@)
Super-Lattice PLD: (SrTiO3)20n(YBa2Cu3O7)n on SrTiO3
S(001) Y(003) S(002) Y(006)
200
ID: 511031 (STO)20n(YBCO)n
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Pulsed Energy Comparison
Sputter PLD PED
CVD Thermal Evaporation MBE Process Energy
(Process energy can be controlled from low to high)
10000 Virginia Manor Road Beltsville, MD 20705 USA
Simple but powerful combinatorial process to build various compositional multiple samples on a single deposition process.
Neocera’s unique patent process by indexing targets and substrate angles simultaneously though Neocera advanced software and hardware configration.
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
Dept. of Field Service & Applications (service@)
Pulsed Energy Deposition Process
Pulsed Laser Deposition
Pulsed Electron-Beam Deposition
10000 Virginia Manor Road Beltsville, MD 20705 USA
Y(005)
50
0 20 30 40 50 60 70 80
2 Theta (degrees)
10000 Virginia Manor Road Beltsville, MD 20705 USA
Thin Film Deposition Process Technologies since 1989
SLs (001)
SL (001)
SLs (002)
SL (002)
100000
100
10
10
20
SLs (001)
30
40
50