英福康(INFICON)皮拉尼标准真空计PSG500 操作手册
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Maintenance ManualA Regal BrandIntroductionThe PM500 is an encapsulated electronic voltage regulator intended for use with the Marathon PMG systemand most Marathon AC generators. The PM500 controls the output of a brushless AC generator by regulating the DC current input to the exciter field. The PM500 is designed as a three phase or single phasetrue RMS sensing regulator that is capable of accepting analog voltage adjustment input. The PM500 is UL Recognized and UL Certified for Canada – Component per UL File E222903. The PM500 bears the CE markfor the European Union.SpecificationsSensing Input175 - 600Vac, True RMS, 60/50Hz, 3 Phase/1 PhasePower Input 175 - 260Vac, 300Hz PMG, 60/50Hz ShuntPower Output, Continuous 85Vdc at 3.5Adc with 240Vac input powerPower Output, Forcing 170Vdc at 7Adc for 10 sec. with 240Vac input powerFuse 5 x 20mm S505-5A, Slow Blow TypeVoltage Regulation ± 0.25%, with 4% engine governingExcitation Resistance9 ohms, minimumOver Excitation Protection Excitation exceeds 190Vdc or 7Adc for more than 10 seconds Manual Voltage Adjustment Range ± 20% with 2000 ohm rheostat± 10% with 1000 ohm rheostatAnalog Voltage Input A1 & A2 ± 20% with 0-10Vdc or ± 5Vdc biasUnder Frequency Factory Setting 58Hz preset for 60Hz operation and 48Hz preset for 50Hz operation Voltage Build-up Voltage build up from input voltage ≥ 5Vac at 25Hz.Response Time<1 CycleWeight16.6 oz.Operating Temperature -40°C to +60°CStorage T emperature -40°C to +85°CPower Dissipation12 watts, maximumSize 5.9” L x 5.3” W x 2.2” HThermal Drift 0.05% / °C change in AVR ambient temperature Electromagnetic Compatibility TestsImmunityIEC61000-4-2 - Electrostatic DischargeIEC61000-4-3 - Radiated RFIEC61000-4-4 - Electrical Fast TransientIEC61000-4-5 - SurgeIEC61000-4-6 - Conducted RFIEC61000-4-11EmissionEN61204-3 - Conducted RFCISPR 22IEC61000-3-2 - Harmonic IECIEC61000-3-3 - Flicker IEC2InstallationMOUNTINGThe PM500 is mounted through a keyed hole in the generator conduit box and secured with a plastic mounting nut.The PM500 should be mounted directly to the conduit box panel with the rubber gasket positioned between the outside of the conduit box panel and the mounting nut.Protect front panel adjustment pots by installing clear or black plastic cover.Mounting nut torque is 26 – 43 lbf-in. Refer to the Figure 1 for dimensions.Wiring and ConnectionsEXCITER FIELD POWER CIRCUITThe exciter field resistance must be ≥ 9 ohms.If the exciter field resistance is less than 9 ohms andthe full load field current does not exceed 3.5 amps, add a resistor in series of sufficient wattage to increase the total resistance to 9 ohms.Connect the generator F+ (F1) field lead to the regu- lator F+ terminal. Connect the generator F- (F2) field lead to the regulator F- terminal. Refer to Figure 3 for typical connection points.POWER I NPUT C IRCUITThe PM500 is designed to be powered by a PMG and capacitor. A 7.5µƒ capacitor is connected in parallel between the PMG leads and the regulator power input terminals.The regulator power input terminals are labeled P1 and P2. Connect leads from P1 and P2 to the capacitor terminals.Connect regulator terminals P1 & P2 to generator leads that will provide 240Vac output. No capacitor is used with the PM500 in shunt mode.Refer to Figure 3 for typical connection points.Figure 23TO PREVENT PERSONAL INJURY OR EQUIPMENT DAMAGE, ONLY QUALIFIED PERSONNEL SHOULD INSTALL, OPERATE OR SERVICE THIS DEVICE.Figure 1Wiring and Connections (cont’d)Figure 3a – Three PhaseFigure 3b – Single PhaseSENSING CIRCUITSSensing input range is 175 - 600Vac. DIP switch SW1 and SW2 must be set appropriately. Refer to Figures 3a & 3b for typical connections.Single Phase SensingConnect PM500 terminal E1 to output lead L1 and E2 to output lead L2. PM500 terminal E3 is jumpered to E2. 3 Phase SensingConnect PM500 terminal E1 to output lead L1, E2 to output lead L2 and E3 to output lead L3.If used in a paralleling application, a paralleling CT will be required in the generator B phase. Paralleling CT must be sized to provide either a 1A or 5A signal when the generator is under full load.4Wiring and Connections (cont’d)DIP SWITCH PROGRAMMINGEight DIP switches located on the back of the regulator must be set appropriately for correct regulator operation and generator control. Refer to Figure 4.Switches 1 & 2 set the regulator sensing range.Switches 3 – 8 Configure multiple functions: 3 or Single Phase Sensing, Frequency, Over Excitation Protection, kW Range and Paralleling CT Range.SW1 : OFF SW2 : OFF Volts ≤ 280VacSW1 : OFF SW2 : ON Volts ≤ 480VacSW1 : ON SW2 : ON Volts ≤ 600VacOFF ONSW3 : 3 Phase Sensing 1 Phase SensingSW4 :60 Hz 50 HzSW5 :O/E Protect On O/E Protect OffSW8 :CT 1A CT 5ASW6 : OFF SW7 : OFF< 90kWSW6 : ON SW7 : OFF90 - 500kWSW6 : ON SW7 : ON> 500kW PROTECTION F UNCTIONSThe PM500 has built in protection functions for Over Excitation, Under Frequency and Over Voltage Protection.Over ExcitationThe Over Excitation function protects the PM500 and generator components in the event the excitation system demands excessive levels of voltage and/or current to maintain output.The Over Excitation function will trip when excitation output exceeds 190Vdc or 7Adc for more than 10 sec. with 220Vac input power.The Over Excitation O/E LED on the front panel will be illuminated when thePM500 when the OverExcitation system has tripped. Replace the fuse on theback panel if required and inspect the generator. ThePM500 will reset when power is cycledUnder FrequencyUnder Frequency protection allows the generatorvoltage to decrease when the output frequency dropsbelow the Roll-Off point. This reduces the load on theengine, allowing engine RPM to recover. This is normaloperation and no reset is required.5 Figure 4Operating AdjustmentsSix adjustable potentiometers are accessible on the front panel of the PM500. These are: VOLT, STAB, U/F, DIP, DROOP and TRIM.Figure 6VOLTAGE ADJUST (VOLT)Set PointOutput voltage may be adjusted via the VOLT poten- tiometer on the front panel of the regulator. The set point range is 175 - 600Vac.Remote Voltage AdjustA 2000 ohm, 2 watt rheostat may be connected to VR1 and VR2 - replacing the factory jumper, providing a ±10% voltage adjustment range. T erminals A1 & A2 may not be used when a rheostat is installed.Analog Voltage AdjustRegulator terminals A1 & A2 may be connected to the analog output of a gen-set controller. The allowable voltage input range is 0-10Vdc or ± 5Vdc will provide a 20% range. Jumper VR1 & VR2 when analog voltage adjustment terminals are used.TRIM ADJUST (TRIM)The analog bias range is adjusted via the TRIM potenti-ometer on the front panel. Set the TRIM potentiometer fully clockwise to provide a ± 20% adjustment range. DROOP ADJUST (DROOP)Requires a 1A or 5A CT in the B Phase.DIP switch SW8 must be set appropriately.In a paralleling system, the PM500 adjusts the genera- tor output voltage when the B phase current leads or lags the B phase voltage.The adjustment range may be preset via the DROOP potentiometer. The default setting is full counter clock-wise for minimum range. Maximum range is ±7% at 1.7 PF lagging to 0.7 PF leading.UNDER FREQUENCY ROLL-OFF ADJUST (U/F) The Roll-Off point is the frequency at which the gen- erator output voltage is allowed to decrease and is factory preset at 57Hz for 60Hz operation and at 47Hz for 50Hz operation.When the U/F LED on the front panel it lit, the PM500 is operating in Under Frequency mode.To change the roll-off point, first verify that the gen-set is operating at the intended speed and voltage.Fixed Engine RPMOn most new engines (Tier 4i and up), the engine speed is fixed at 1800RPM or 1500RPM.Adjust the roll-off point by block loading the genera-tor and observing the U/F LED on the front panel. To ensure the generator maintains voltage under a given block load, adjust U/F potentiometer until the U/F LED remains off during the block load test.Adjustable Engine RPMAdjust engine speed to the new roll-off point. Verify that the output voltage still matches the intended set-point voltage.Next, adjust the U/F potentiometer clockwise until the voltage starts to drop off, then slightly adjust the poten- tiometer counterclockwise until the voltage returns to rated voltage. Re-adjust engine speed to rated speed. U/F DIP ADJUST (DIP)When Under Frequency (U/F) protection is activated, the voltage dip follows a linear Volts / Hertz curve. The voltage dip ratio may be adjusted via the DIP potentiometer with an adjustable range of 3-10V/Hz. The default setting is full clockwise for 10V/Hz. STABILITY ADJUST (STAB)Stability is the ability of the generator to respond to load changes. Decreasing the stability setting allows the generator to respond faster to load changes. If the stability setting is too low, the generator voltage will tend to hunt under steady state conditions.Correct stability adjustment must be conducted while the generator is operating unloaded.Adjust the STAB potentiometer clockwise until the voltage becomes unstable, then slightly adjust coun- terclockwise (Approximately 1/5 turn) until the voltage becomes stable.6Warnings & CautionsIMPORTANT INFORMATIONPlease Read CarefullyThis document is not intended to provide operational instructions. Appropriate Marathon Electric instructions provided with the generator and precautions attached to the generator should be read carefully prior to installation, operations and/or maintenance of the equipment. Injury to personnel or generator failure may be caused by improper installation, maintenance or operation.The following and information is supplied to you for your protection and to provide you with many•Buyer shall be solely responsible for determining the adequacy of the product for any and all uses to which Buyer shall apply the product. The application by Buyer shall not be subject to any implied warranty of fitness for a particular purpose.•For safety, Buyer or User should provide protective guards over all shaft extensions and any moving apparatus mounted thereon. The User is responsible for checking all applicable safety codes in his area and providingsuitable guards. Failure to do so may result in bodily injury and/or damage to equipment.•Hot oil can cause severe burns. Use extreme care when removing lubrication plugs.•Disconnect power and lock out drive equipment before working on a generator.•Always keep hands and clothing away from moving parts.•The lifting eyes on the generator are not to be used to lift the entire generator set. Only the generator may be safely lifted by the lifting eyes. Do not use the conduit box for lifting or support of the generator.•Install and ground the generator per local and national codes.•Discharge all capacitors before servicing the generator.•Misapplication of a generator in a hazardous environment can cause fire or an explosion and result in serious injury.•Never attempt to measure the temperature rise of a generator by touch. Temperature rise must be measured by thermometer, resistance, imbedded detector or thermocouple.•Operation of a generator at higher than its nameplate ratings may result in fire, damage to equipment or serious injury to personnel.•Do not apply any force to the generator fan when rotating the generator rotor.•Generators should not be operated faster than their rated speed.•The following statement is only applicable to high voltage generators (above 5000 V). A grounding strap is supplied from the generator neutral to ground. This grounding strap not only bleeds off any voltage potential on the main statorafter the high potential test, but also bleeds off any static charge that can build-up on the main stator during shipmentand storage. THIS GROUND STRAP IS NOT A PERMANENT PART OF THE GENERATOR CONSTRUCTION. REMOVETHIS GROUND STRAP ONLY AFTER A PERMANENT GROUND IS INSTALLED ON THE GENERATOR MAIN STATOR(not supplied by Marathon Electric), OR THE GENERATOR FINAL INSTALLATION IS COMPLETE.•Mounting bolts should be routinely checked to ensure that the unit is firmly anchored for proper operation.•Consult qualified personnel with questions. All electrical repairs must be performed by trained and qualified personnel only.•For inverter applications, follow the inverter manufacturer’s installation guidelines.•Make sure the generator is properly secured and aligned before operation.•When installing the generator, insure that loose parts or tools do not fall inside the generator.•When connecting the generator, be sure to follow the correct wiring diagram for the desired voltage. Insure that the voltage regulator is connected per the wiring diagram.RESALE OF GOODSIn the event of the resale of any of the goods, in whatever form, Resellers/Buyers will include the following language in a conspicuous place and in a conspicuous manner in a written agreement covering such sale:The manufacturer makes no warranty or representations, express or implied, by operation of law or otherwise, as to the merchantability or fitness for a particular purpose of the goods sold hereunder. Buyer acknowledges that it alone has deter- mined that the goods purchased hereunder will suitably meet the requirements of their intended use. In no event will the manufacturer be liable for consequential, incidental or other damages. Even if the repair or replacement remedy shall be deemed to have failed of its essential purpose under Section 2-719 of the Uniform Commercial Code, the manufacturer shall have no liability to Buyer for consequential damages.Resellers/Buyers agree to also include this entire document including the cautions and warnings above in a conspicuous place and in a conspicuous manner in writing to instruct users on the safe usage of the product.This information should be read together with all other printed information supplied by Marathon Electric.For more information contact: Regal Beloit America, Inc., 100 E. Randolph St., Wausau, WI 54401Phone: 715-675-3311 or Fax: 715-675-80267A Regal Brand100 E. Randolph Street PO Box 8003Wausau, WI 54402-8003 U.S.A. PH: 715-675-3359 FAX: 715-675-8026 ©2019 Regal Beloit Corp GPN056 v1.2100/11-19/FSPrinted in the U.S.A.。
CLINITEK®500中文操作手册注意:此中文操作手册根据拜耳公司2002年的英文操作手册翻译,拜耳公司保留对原英文资料的更新权。
您在使用该手册时,有疑问,请查阅英文手册,目录1. 介绍使用目的 5 仪器组成和操作 5 光学系统7 定标7 规格8 结果报告2. 安装一般信息9 环境因素9 打开步骤9 仪器设定10 与打印机连接15 与计算机连接16 与条形码读取装置连接16 仪器的初始化检验16 3. 如何选择一般信息18 设定常规19A.设定菜单 #1 (日期;时间;计算机连接口;打印机) 20B.密码显示屏22C.设定菜单 #2 (语言;结果单位;附加分类系统;测试) 22D.设定菜单 #3 (日期,时间形式;日期,时间的分隔) 23E.设定菜单 #4 (测试的报告;阳性水平;正常水平) 24F.设定菜单 #5 (颜色;选择颜色,透明度;使用省略值) 25G.设定菜单 #6 (阳性水平颜色,透明度;报告的标志) 26H.设定菜单 #7 (被编辑的报告标志;输入样本ID;实验者ID) 27I. 设定菜单 #8 (计算机连接选择;条形码读取装置:密码) 28J. 设定菜单 #9 (省略的设定;硬件测试) 304.仪器操作一般信息32 使用准备33 参照试样测试34 常规试样测试34 A.基本操作35 B.如果使用试样ID代码37 C.使用ID代码而没有试样目录38 测试结束报告39 编辑确认报告39 寻找结果39 操作注意事项40 5.仪器维护一般清洗41 日常清洗41 消毒43 换纸44 6.附件7.简单维修一般要求46 更换打印头46 校正可触式显示器48 8.故障排除和服务一般要求49 何时寻求帮助49 何处寻求帮助49 故障排除表50 服务记录表54 9.附件和维修备件56 附件维修备件56 附录CPL:计算机和打印机的连接口57 一般信息串行口线缆针并行口线缆针介绍使用目的泰利特500尿液化学分析仪是一种半自动化桌面测试仪,能够读取“Bayer”反应试剂条,进行尿液分析。
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具体型号的使用说明请参照相关页面!具体机型:智能版型、普通型智能版型1 抽真空0~99S 充氮0~9.9S 加热0~9.9S冷却0~9.9S 电动开盖放气智能版型2 抽真空0~99S 充氮0~9.9S 加热0~9.9S冷却0~9.9S 放气智能版型3 抽真空0~99S 切丝0~9.9S 加热0~9.9S冷却0~9.9S 放气智能版型4 抽真空0~99S 加热0~9.9S 冷却0~9.9S放气普通型抽真空0~99S 加热0~9.9S 冷却0~9.9S放气各机型动作原理,内部结构,电器原理图,气路原理图,请根据机器功能参照相关页面!以上为现有通用机型,特殊机型及定制机型不在此列,具体情况请联系设备制造商!目录说明书自述-------------------------------------- 1目录-------------------------------------- 2用途及特点-------------------------------------- 3使用前准备-------------------------------------- 4操作说明-------------------------------------- 7气路原理图-------------------------------------- 9电气原理图-------------------------------------- 11故障分析-------------------------------------- 20用途及特点用途:本公司自发研制的全系列真空包装机具有功能优越,维护方便,操作简易,应用广泛等优点。
特别适用于复合薄膜或铝箔复合薄膜等软包装材料。
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E3000使用手册一,开机前的准备1.E3000从包装箱取出后,使用前必须将底部黄色防震螺丝拧下。
2.然后,将吸枪正确连接至主机,必要时,在连接后稍微用力将吸枪接头往里顶一下,确保其密封性。
注:吸枪与主机连接必须保持两者的方向性一致,可参考其定位键及定位槽。
3.最后,将带接地连接头的电源线连接至主机,便可以开机。
注:必须保证电源系统有接地连接,同时,工作电压范围在200---250伏。
二,检漏仪启动过程1.检漏仪在开启后,便进入自动启动的过程中2.当启动参数均正常的情况下,且无任何故障报警,仪器便进入正常的检漏模式。
三,检漏仪使用检漏仪在首次使用或长时间存放后的第一次使用,我司建议仪器在预热三十分钟以后执行一次校准。
如果仪器处于一直在使用状态,可以先操作半小时后,再执行校准。
校准包括两种:外部校准及内部校准。
外部校准:凡是与主机分离开的标准漏孔,执行时,我们都称之为外部校准。
外部标准漏孔外部校准执行过程:1.将E3000检漏仪正常连接启动。
仪器预热三十分钟以上后,执行外部校准。
2.选择显示器右上角CAL键进入校准过程。
3.检漏仪提示“选择校准气体”,例如:执行R134a校准。
气体1为R134a,选择右上角“GAS1”4.在确定所执行校准的气体类型后,仪器提示“开始外部校准”。
5.根据外置式标准漏孔漏率设置检漏仪上的参数。
例如:现有一个4.18g/a的R134a漏孔。
6.进入界面中的“编制漏率”,通过左边上下键将漏率修正至4.2g/a(由于修正值以0.05为一个单元,因此尽可能将数值靠近外置式标准漏孔漏率)。
7.确认后,准备开始校准。
8.将吸枪对准标准漏孔后按“起始”。
9.E3000将提示“吸外部校准漏孔,如讯号稳定请按OK”。
10.确认信号波动不大时,按OK。
此时,仪器将对信号进行采样处理,因此,在期间必须保证吸枪不能离开标准漏孔。
11.当提示“吸入空气”时,将吸枪移开标准漏孔,尽量使吸枪吸入新鲜空气。
UV500检测器操作说明500检测器的使用和维护图2.1:检测器前面板16789111112534前面板见图2.1:以下控制和指示器位于前面板上:1)显示屏:A31/2数字显示器。
吸收值可显示到1.999AU。
当按下开关8(SAMP)时,这个显示屏显示样品相对光密度,当按下开关9(REF)时,这个显示屏显示参照光强度。
2)上升时间选择开关:一个四档旋转开关控制,能控制二级Beel滤器的过滤强度。
可选择的上升时间有0.1,0.3,1.0和3.0秒四档。
上升时间等于2倍的时间常数。
(以秒为单位)3)灵敏度选择开关:十二档的旋转开关控制仪器背板上的输出口的输出电压范围。
可供选择的有 2.0,1.0,0.5,0.2,0.1,0.05,0.02,0.01,0.005,0.002,0.001,和0.0005AUFS。
这个开关不控制仪器背板上的1V/AU积分仪输出端口的输出。
4)波长选择器:连续波长旋钮,可调范围190-800nm。
顺时针旋转降低波长,逆时针旋转增加波长。
箭头指示波长增加方向。
注意:不要强力旋转旋钮,使波长值低于180nm或高于820nm这会损坏波长控制器。
5)波长指示器:一个三位的机械波长指示器,显示当前工作波长。
6)紫外(UV)灯指示器:绿色发光二极管亮表示氘(D2)灯装于设备内并且发光。
7)可见光(VIS)灯指示器:绿色二极管灯亮表明这个设备内装着一个钨灯并且发光。
8)样品光强度开关:按下这个瞬间开关,显示器显示样品室光敏二极管测到的样品光密度。
9)参照光密度开关:也是瞬间开关,按下此开关,显示器显示参照光敏二极管测到的参照光密度。
10)短路开关:瞬时开关,按下这个按钮,记录仪输出端电压降为零伏。
这个按钮必须持续按压一会才能发挥作用。
这个按钮用于调整记录笔在记录纸上的位置,但不影响积分仪输出。
11)标记开关:瞬时开关按下该开关可产生偏转度达20%的输出信号,该开关不影响积分仪输出。
12)等待状态指示灯:绿色LED指示灯,此灯亮表示记录仪输岀端正在输出一个恒定的零电压。
技术手册2003年3月11日2.0版UL1000 Fab 氦检漏仪目录1一般信息1.1 本手册使用符号1.1.1 安全符号1.1.2 指示符1.1.3 真空符号1.1.4 术语定义1.2 INFICON服务的支持1.2.1 维修中心1.3 前言1.3.1 用途1.3.2 技术参数1.3.2.1 物理参数1.3.2.2 电气参数1.3.2.3 其它参数1.3.2.4 环境条件1.4 开箱1.4.1 设备供货范围1.4.2 附件与选件1.4.2.1 吸入器管线SL2001.4.2.2 工具箱1.4.2.3 氦气瓶支架1.4.2.4 ESD 垫层1.4.2.5 手持单元2安装2.1 运输2.2 就位2.3 电连接2.3.1 供电电源2.3.2 数据采集系统的连接2.3.2.1 附件2.3.2.2 数字输出2.3.2.3 数字输入2.3.2.4 记录仪2.3.2.5 RS2322.3.2.6 手持单元2.4 真空连接件2.4.1 进气口2.4.2 排气2.4.3 放空2.4.4 冲洗/气镇3初始运行检查3.1 需要的设备3.2 初始运行说明3.2.1 启动与测量0-23.2.2 内部校准3.2.3 验证4 说明和工作原理4.1 前言4.2 UL1000Fab的组件4.2.1 真空系统4.2.2 控制面板4.2.2.1 液晶显示器4.2.2.2 启动按键4.2.2.3 停止按键4.2.2.4 抑零按键4.2.2.5 菜单按键4.2.2.6 软键4.2.2.7 数值输入4.3 工作模式4.3.1 真空模式4.3.2 吸入器模式5 UL1000Fab的运行5.1 显示屏5.2 起转模式中的显示屏5.3 测量模式中的显示屏5.3.1 校准的调用5.3.2 扬声器音量5.3.3 显示屏的状态线5.3.4 数值显示模式5.3.5 趋向模式6 菜单说明6.1 主菜单6.2 一览6.2.1 线性/对数刻度6.2.2 显示范围自动/手动6.2.3 时间轴6.2.4 对比度6.2.5 待用模式中的本底6.2.6 小数点位数6.2.7 漏率过滤器6.3 模式6.4 触发与警告6.4.1 触发值16.4.2 触发值26.4.3 音量6.4.4 单位6.4.5 警告延迟6.4.6 音响警告型式6.4.6.1 定点0-36.4.6.2 漏率正比6.4.6.3 设点6.4.6.4 触发警告6.5 校准6.6 设定值6.6.1 真空设定值6.6.1.1 放空延迟6.6.1.2 保护功能6.6.1.3 内测试漏孔漏率6.6.1.4 机器因素6.6.2 抑零-时间6.6.3 质量6.6.4 接口6.6.4.1 记录仪输出6.6.5 杂项6.6.5.1 时间和日期6.6.5.3 语言6.6.5.3 校准请求6.6.5.4 电源频率6.6.5.5 服务区间排气过滤器6.6.5.6 服务信息排气过滤器6.6.6 参数保存/载入6.6.6.1 载入参数组16.6.6.2 载入参数组26.7 信息6.7.1 服务6.7.1.1 调试6.7.1.2 因素6.7.1.3 切换灯丝6.7.1.4 高级功能6.7.1.5 手动调谐6.7.1.6 复位功能6.8 查访控制6.8.1 查访校准功能6.8.2 更改菜单-PIN6.8.3 更改设备-PIN6.8.4 抑零7 校准7.1 前言7.2 校准进程7.2.1 内部校准7.2.1.1 自动内部校准7.2.1.2 手动内部校准7.2.2 外部校准8 误差和警告信息8.1 提示0-48.2 信息清单9 接口说明9.1 ASCII-模式9.1.1 误差信息9.1.2 参数9.1.3 实例9.1.4 指令清单9.2 二进制模式9.2.1 实例9.2.2 数据格式9.2.3 误差信息9.2.4 指令10 维护10.1 INFICON服务10.2 维护计划10.2.1 最小维护10.2.2 标准维护10.2.3 高级维护10.3 维护步骤10.3.1 更换排气消音器10.3.2 打开UL1000Fab10.3.3 检查/更换过滤器过滤筛网10.4 涡轮分子泵10.5 涡旋泵附录A 图B 索引0-51一般信息注意我们建议您仔细阅读本使用说明书,以保证从一开始就进入最佳工作状态。