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Fabrication, Characterization, and Analysis of a DRIE CMOS-MEMS Gyroscope

622IEEE SENSORS JOURNAL,VOL.3,NO.5,OCTOBER2003 Fabrication,Characterization,and Analysis of a DRIE CMOS-MEMS Gyroscope

Huikai Xie and Gary K.Fedder

Abstract—A gyroscope with a measured noise floor of

0.02s/Hz1

1

1.

Fabrication, Characterization, and Analysis of a DRIE CMOS-MEMS Gyroscope

Fabrication, Characterization, and Analysis of a DRIE CMOS-MEMS Gyroscope

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