1. MMF Multi Media Filter
多介质过滤器
2 AC Active Carbon
活性炭过滤器
3 WC Weak Cation
弱阳树脂塔
4 2B Cation and Anion
阳床，阴床
5 DG Degasifier
脱气塔
6 RO Reverse Osmosis
反渗透过滤
7 MB Mixed Bed
混床
8 MDG Membrane Degasifier
膜脱气
9 UV Ultraviolate Desinfector
紫外线杀菌机
10 TOC-UV TOC Ultravoilate Desinfector
紫外线除
TOC
杀菌机
11 UF Ultrafilter
超过滤
12 PAC Poly Alumina Chlorine
聚合氯化铝
13 DO Dissoved Oxygen
溶解氧
14 TOC Total Organic Carbon
总有机碳
15 DI Deionization
去除离子
16 SC Strong Cation
强阳树脂塔
17 WA/SA Weak Anion / Strong Anion
弱阴
/
强阴树脂塔
18 SDI Silt Density Index
污染密度指数
19 TUB Turbidity
浊度
20 RO CONC. RO Concentration Water RO
浓缩水
21 RO PERMEATE RO Permeate Water RO
产水
22 SS Suspendid Solid matter
悬浮物质
23 COD Chemical Oxygen Demand
化学需氧量
24 BOD Biological Oxygen Demand
生物需氧量
25 CMP Chemical Mechanical Polisher
化学机械研磨
26 BG Backside Grinding
晶背研磨
27 SF Sand filter
石英砂过滤器
28 FA Fluoride Absorber
氟离子吸收塔
29 AA Active Al2O3
活性
Al2O3
30 LSC Local Solvent Collection Cabinet
现场溶剂收集槽
31 PAM Polyaerylamide(Polymer)
聚丙烯酰胺
40 DWWA Acid/Caustic waste water drain piping
一般酸碱排放管路
41 DCHF concentrate hydrofluoric acid
浓氢氟酸排放管路
42 DDHF dilute hydrofluoric acid
稀氢氟酸排放管路
43 DB/GW
backside grounding water
晶背研磨排放管路
44 DFRW-Cu first rinse water in Copper line
铜制程初道冲洗水排放管路
45 DLRW last rinse water
后道冲洗水排放管路
46 DCMP-clean Chemical mechanical polish clean water
化学机械抛光废水排放管路
47 DF-FAB floor drain in FAB
地板排水排放管路
48 DIPA IPA
异丙醇排放管路
49 Dsolvent-1 solvent-1
有机溶剂
-1
排放管路
50 PDS Process drain sys.
制程排水系统
52 DH2SO4-Cu Cu line Sulphuric acid drain
铜制程初硫酸废液排放管路
53 DH2 SO4 Sulphric acid drain
硫酸废液排放管路
54 DH3PO4 Phosphoric acid drain
磷酸废液排放管路
55 PVC Polyvinyl Chloride
聚氯乙烯
56 CPVC Chlorinated Polyvinyl Chloride
氯化聚氯乙烯
57 PE Polyethylene
聚乙烯
58 PP Polypropylene (Homopolymer)
聚丙烯
59 PTFE Polytetrafluorethylene
聚四氟乙烯
60 PVDF (KYNAR) Polyvinylidene Fluoride
聚偏二氟乙烯
61 DW Domestic Water
生活用水
62 PW Process water
生产用水
63 DWW Domestic Warm Water
生活温水
64 MW Middle Water
中水
65 RWRS Rain Water Reuse System
雨水回收系统
66 IWWS Industrial Waste Water System
工业污废水排水系统
67 EEW Emergency Eye Washer
紧急冲身洗眼器
69 HEPA High Efficiency Particulate Air Filter
高效过滤器
11 H2SO4 Sulfuric Acid
硫酸
12 HCL Hydrochloric Acid
盐酸
13 HNO3 Nitric Acid
硝酸
14 H3PO4 Phosphoric Acid
磷酸
15 HF Hydrofluoric acid
氢氟酸
16 H2O2 Hydrogen Peroxide
过氧化氢（双氧水）
17 IPA 2-Propanol
异丙醇
19 NH4OH Ammonia (liquid )
氨水
25 VMB Valve Manifold Box
阀箱