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AlGaN_GaNHEMTs表面钝化抑制电流崩塌的机理研究_英文_

AlGaN_GaNHEMTs表面钝化抑制电流崩塌的机理研究_英文_
AlGaN_GaNHEMTs表面钝化抑制电流崩塌的机理研究_英文_

收稿日期:2007206210

基金项目:国家重大基础研究(973)资助(51327020301)作者简介:岳远征(19812),男,西安电子科技大学博士研究生,E 2mail :yzhyue @https://www.doczj.com/doc/7b18731990.html,.

A l Ga N /Ga N H EM Ts 表面钝化抑制电流崩塌的机理研究

岳远征,郝 跃,张进城,冯 倩

(西安电子科技大学微电子学院,陕西西安 710071)

摘要:通过实验测量对Al G aN/G aN H EM T 表面钝化抑制电流崩塌的机理进行了深入研究.Al G aN/

G aN H EM T Si 3N 4钝化层使用PECVD 获得.文章综合考虑了钝化前后器件输出特性及泄漏电流的变

化,钝化后直流电流崩塌明显减少,仍然存在小的崩塌是由于GaN 缓冲层中的陷阱对电子的捕获.传输

线模型测量表明,钝化后电流的增加是由于钝化消除了表面态密度进而增加了沟道载流子密度.

关键词:高电子迁移率晶体管;钝化;电流崩塌

中图分类号:TN386 文献标识码:A 文章编号:100122400(2008)0120125204

Mechanism study of the surface passivation effect on current collapse

characteristics of Al G a N/G a N HEMTs

YU E Yuan 2z heng ,H A O Yue ,Z H A N G J i n 2cheng ,F EN G Qi an

(School of Microelectronic ,Xidian Univ.,Xi ′an 710071,China )

Abstract : The effects of surface passivation on Al GaN/G aN high 2electron 2mobility transistors

(H EM Ts )have been investigated.The surface passivation layer of Si 3N 4is deposited by plasma

enhanced chemical vapor deposition (PECVD ).The current 2voltage and gate 2drain diode characteristics

of Al G aN/G aN H EM Ts before and after passivation are analyzed.The current collapse under DC sweep

has been significantly decreased after passivation and the existence of small dispersion of drain current is

due to traps in the G aN buffer.The drain current increases after passivation ,because surface passivation

reduces the surface state density and so increases the sheet carrier density shown in Transmission Linear

Model (TL M )measurement.

K ey Words : high electron mobility transistors ;passivation ;current collap se

The Al GaN/GaN material system for high power applications has advantages of a larger band 2gap (314eV ),a larger critical breakdown electric field (3MV/cm ),larger conduction band discontinuity between GaN and Al GaN and strong polarization effect s t hat allow a large two 2dimensional elect ron gas (2DEG )concent ratio n (>1013cm -2)which is larger t han t hat of Al GaAs/GaAs to be confined.Based on t hese properties ,dramatic progress has been made in t he develop ment of Al GaN/GaN high 2elect ron 2mobility t ransistors (H EM Ts )as an ideal candidate for high power and high temperat ure applications at microwave f requencies.One of t he f requently reported p roblems is t hat t he RF power obtained from GaN 2based H EM Ts is much lower t han t hat expected f rom t he DC characteristics [1~3].Several mechanisms have been identified ,including t he presence of surface states between t he gate and drain of t he H EM T struct ure which deplete t he channel in t his region wit h time constant s long enough to disrupt t he modulation of t he channel charge during large signal operation and t he t rap states in t he GaN buffer layer [3].The main obstacle to t he develop ment of GaN 2based high power devices has been ,and co ntinues to be ,how to cont rol t he t rap densities in t he bulk and surface of t he material.Surface t rapping effect s is present in

2008年2月

第35卷 第1期 西安电子科技大学学报(自然科学版)

J OU R NAL O F XI D IAN U N IV E R S I T Y Feb.2008

Vol.35 No.1

virt ually all devices ,and significantly impacte current collap se.Much attention has been focused on t he reduction of surface states using different passivation dielect rics [2~6].

In t his paper ,t he mechanisms of Si 3N 4surface passivatio n on Al GaN/GaN H EM Ts are st udied.In addition ,unpassivated H EM Ts are also compared wit h passivated

ones.

Fig.1 Typical Al G aN/GaN H EM T

cross section.1 Materials grow th and device fabrication

Our st ruct ure was grown by metal 2organic chemical vapor

depo sitio n and consist s of a 40nm undoped AlN buffer layer ,a

1μm undoped GaN layer ,and a 25nm n 2Al 013Ga 017N barrier layer

on a 22in.sapp hire substrate.The room temperat ure Hall mobility

of 1096cm 2/(V ?s )and a sheet carrier concent ration of 1165×

1013cm -2have been measured respectively.Figure 1shows a

representative cro ss section of Al GaN/GaN H EM Ts.

In t he devices discussed in t his paper ,t he source 2drain spacing is 5μm and gate lengt h is 2μm.Typical source 2gate and gate 2drain

spacings are 1μm and 2μm ,respectively.

The device p rocess follows standard H EM T processing technology.Mesa isolation is formed by Cl 22based ICP etch ,and follows Ti/Al/Ni/Au ohmic contact depo sition by elect ron 2beam evaporation and annealing at 850°C for 30s.The metal scheme of Pt/Au is utilized for gate metals.

After all t he device processes ,t he passivation layer was deposited.A low 2temperat ure (300°C ),plasma 2enhanced chemical vapor depo sition p rocess using Si H 4and N H 3was used to deposit Si 3N 4wit h a t hickness of 2×10-7m and a ref raction index of 1197which were measured by an ellip someter.The Si 3N 4layer above t he pads was etched wit h t he BO E solution.DC measurement s were performed on t he fabricated devices using a H P4156B

unit.

Fig.2 I ds vs.V ds double sweep f rom 021020V for H EM Ts before and after Si 3N 4,passivation.

2 Experimental results and discussion

Figure 2shows typical outp ut characteristics of t he double

sweep for Al GaN/GaN H EM Ts before and after Si 3N 4passivation.

V g is fixed at 0V ,and V ds sweep s f rom 0to 10V ,and t hen t he sweep

is repeated wit hout pause.The decrease in drain current between

first sweep and second sweep was pronounced before passivation.

The degradation in drain current was less significant when t he same

st ruct ures were grown on SiC subst rates [7].Clo ser lattice match

between GaN and SiC was discovered t han t hat wit h sapp hire.So t he

defect density will be lower between GaN and SiC.This seems to affect t he resultant surface state density.It is suggested t hat some of t he surface trap s be related to dismatch between GaN and sapp hire.Shown in Figure 2is an evident improvement of current after t he passivation.On t he ot her hand ,t he DC dispersion is still present in t he device after t he surface passivation.The reason is t he p resence of trap s in t he GaN buffer layer under t he active channel.Some electrons of t he 2DEG can be depleted due to t he surface states or buffer t rap s.The former may be mitigated to a greater or less extent by app rop riate surface passivation ,which most often uses Si 3N 4depo sited by plasma 2enhanced chemical vapor deposition ,while t he latter is a f unction of t he epitaxial

6

21 西安电子科技大学学报(自然科学版) 第35卷

growt h conditions.In t his paper ,surface states dominate t he current collap se ,because t he use of Si 3N 4passivation typically restores 70%~80%of t he lo st current.The increased drain current directly influences t he outp ut power.The device outp ut power (P out )is calculated wit h (V ds 2V knee )(I d /2),where V ds is t he applied drain source bias ,V knee is t he drain source bias where t he linear regime changes to sat uration regime ,and I d is t he drain current.A higher P out is observed in Si 3N 4passivated H EM Ts.

Figure 3shows t he I ds 2V ds characteristics before and after Si 3N 4passivation.The I ds increases after Si 3N 4passivatio n ,which indicates t hat t he surface state density is decreased.After passivation t he t hreshold voltage is shifted to negative values ,which is due to t he increase of 2DEG density.This increase of t he sheet carrier concent ration in 2DEG due to t he change of t he surface states after passivation is t he main reason for t he increased drain current.At p resent ,t he reason for t his increase is due to a reduction in surface depletion effect s or an additional charge cont ributio n f rom t he deposited nit ride layer.It is found in Figure 3t hat an increase in I d and g m has been observed on t he passivated Si 3N 4H EM Ts compared wit h t he unpassivated H EM Ts when V gs is below 0V.The observation of t he current reduction when V gs is above 0V f rom Si 3N 4passivated H EM Ts is due to t he formation of deep t rap s in t he Si 3N 4/Al GaN interface along wit h t he elimination of shallow t rap s t hrough t he PECVD depo sition [8].The kink or current collap se when V gs is above 0V is obvious on t he passivated H EM Ts.Similar behaviors were observed on Si 3N 4passivated Al GaN/GaN H EM Ts by Ando et al [9]

.

Fig.3 I ds vs.V ds for H EM Ts

before and after Si 3N 4passivation.Fig.4 G ate 2drain diode characteristics for H EM Ts before and after Si 3N 4passivation.

The effect of passivation o n t he gate 2to 2drain diode I 2V characteristics is shown in Figure 4.The gate current measured at a voltage of -40V decreased f rom 140μA to 25μA after passivation.An about one order of magnit ude lower I g was observed on Si 3N 4passivated H EM Ts.This improvement in I g 2leak is

due Fig.5 Relation of TL M resistance and length.

to t he depletion layer formed ,resulting in t he reduction of t he

electric field strengt h at t he gate edge toward t he drain.The

reduction of t he elect ric field at t he gate edge result s in lower

electrons injectio n in surface states t rap s.S.Arulkumaran [8]reported

t hat an about o ne order of magnit ude lower I g 2leak was observed on

Si 3N 4passivated H EM Ts ,as compared wit h t he unpassivated

H EM Ts.This is similar to our experimental result shown in Figure

4. B.L uo [7]reported t he different result t hat t he increase in gate

leakage is not f ro m t he passivation it self ,but may originate f rom

degradatio n of t he gate metallization during t he oxide desorption step

at 350°C.Figure 5shows t he curve of t he relation between TL M resistance and lengt h.We can see t hat t he TL M resistance declines obviously.This result can be explained by a reduction in surface depletion effect s 721第1期 岳远征等:Al GaN/G aN H EM Ts 表面钝化抑制电流崩塌的机理研究

821 西安电子科技大学学报(自然科学版) 第35卷or an additional charge contribution from t he deposited nit ride layer after passivation.

3 Conclusion

We have demonst rated t he surface passivation effect s on t he performance of Al GaN/GaN H EM Ts by depo siting Si3N4wit h PECVD.An increase in drain current has been observed on t he passivated Si3N4 H EM Ts compared wit h t he unpassivated H EM Ts.An about one order of magnit ude lower I g2leak is observed on Si3N4passivated H EM Ts.This indicates an important improvement of device p roperties despite of t he fact t hat t he DC dispersion is still present after t he passivatio n process which is due to t he p resence of t rapping centers in t he resistive buffer underlying t he active channel.

Reference:

[1]Vetury R,Zhang N Q,Keller S.The Impact of Surface States on the DC and RF Characteristics of Al G aN/GaN HFETs

[J].IEEE Trans on Electron Devices,2001,48(3):5602566.

[2]Arulkumaran S,Egawa T,Ishikawa H.Investigations of SiO2/n2G aN and Si3N4/n2G aN Insulator2semiconductor

Interfaces with Low Interface State Density[J].Appl Phys Lett,1998,73(6):8092812.

[3]Green B M,Chu K K,Chumbes E M.The Effect of Surface Passivation on the Microwave Characteristics of Undoped

Al GaN/G aN H EM Ts[J].IEEE Electron Device Lett,2000,21(3):2682271.

[4]L u W,Kumar V.A Comparative Study of Surface Passivation on Al G aN/GaN H EM Ts[J].Solid State Electronics,

2002,46(6):144121445.

[5]Vertiachikh A V,Eastman L F.Effect of Surface Passivation of Al G aN/GaN Heterostructure Field2effect Transistor[J].

Electron Lett,2002,38(5):3882391.

[6]Dang X Z,Yu E T,Piner E J.Influence of Surface Processing and Passivation on Carrier Concentrations and Transport

Properties in Al GaN/G aN Heterostructures[J].J Appl Phys,2001,90(9):135721362.

[7]L uo B,Mehandru R,Kim J,et https://www.doczj.com/doc/7b18731990.html,parison of Surface Passivation Films for Reduction of Current Collapse in Al G aN/

G aN High Electron Mobility Transistors[J].Journal of The Electrochemical Society,2002,149(11):6132619.

[8]Arulkumaran S,Egawa T,Ishikawa H.Surface Passivation Effects on Al G aN/G aN High2electron2mobility Transistors

with SiO2,Si3N4,and Silicon Oxynitride[J].Appl Phys Lett,2004,84(4):6132615.

[9]Ando Y,Okamoto Y,Miyamoto H.A1102W Heterojunction Fet on Thinned Sapphire Substrate[J].IEDM Tech Dig,

2001,17(3):3812384.

(编辑:齐淑娟) 简 讯

2007年11月8日~9日,法国Thales公司的Francois Le Chevalier先生来我校讲

学访问.Chevalier先生是IEEE的高级会员,曾在法国宇航局ON EAR领导研究雷

达目标识别、目标和背景信号、雷达建模和雷达信号处理.1998年起从事机载雷达、

电子战、机载任务系统的高级研发等工作.

摘自《西电情况》2007.12.10

电路图中常用的英文缩写的中文解释

A A 模拟 A/DC模拟信号到数字信号的转换A/L音频/逻辑板 AAFPCB音频电路板 AB 地址总线 ab 地址总线 accessorier 配件ACCESSORRIER 配件 ADC(A/O)模拟到数字的转换adc 模拟到数字的转换ADDRESS BUS地址总线 AFC 自动频率控制 afc 自动频率控制 AFC自动频率控制 AFMS 来音频信号 afms 来自音频信号 AFMS来音频信号 AFPCB 音频电路板 AF音频信号 AGC 自动增益控制 agc 自动增益控制AGC自动增益控制aged 模拟地 AGND 模拟地AGND模拟地ALARM 告警 alarm 告警 ALC 自动电平控制ALEV 自动电平 AM 调幅 AMP 放大器 AMP放大器 AM调幅 ANT 天线 ANT/SW 天线开关ant 天线 Anternna天线 antsw 天线开关ANTSW天线切换开关ANT天线 APC 自动功率控制APC/AOC自动功率控制ARFCH 绝对信道号

ASIC 专用接口集成电路AST-DET 饱和度检测ATMS 到移动台音频信号atms 到移动台音频信号ATMS到移动台音频信号AUC 身份鉴定中心AUDIO 音频 AUDIO音频 AUTO自动 AUX辅助 AVCC音频处理芯片 A模拟信号 b+ 内电路工作电压BALUN平衡于一不平衡转换BAND-SEL频段选择/切换BAND频段 Base band基带(信号) base 三极管基极 batt+ 电池电压 BDR接收数据信号 Blick Diagram方框图 BPF带通滤波器BUFFER缓冲放大器 BUS通信总线 buzz 蜂鸣器 C CALL 呼叫 CARD 卡 Carrier载波调制 CCONTCSX开机维持(NOKIA) CCONTINT关机请求信号 CDMA 码分多址 cdma 码分多址 CEPT 欧洲邮电管理委员会 CH 信道 CHAGCER 充电器 CHECK 检查 CIRCCITY 整机 Circuit Diagram电路原理图 CLK 时钟 CLK-OUT逻辑时钟输出 CLK-SELECT时钟选择信号(Motorola 手机) COBBA音频IC(诺基亚系列常用)

电路分析基础课程教学大纲

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四.课程教学基本内容和基本要求 第一章基础知识( 5学时) [知识点]:电路分析基本变量(电流、电压和功率)的概念;线性电阻元件和独立源的定义及伏安关系;基尔霍夫电流定律和基尔霍夫电压定律;受控源。 [重点] 电流、电压、功率及参考方向的概念,电路的两类约束关系(元件约束和拓扑约束) [难点] 电流、电压真实方向与参考方向关系、关联非关联参考下功率计算及功率正负含义,受控源电路分析 [基本要求] 1、理解电路分析基本变量(电流、电压和功率)的概念;2、掌握线性电阻元件和独立源的定义及伏安关系;3、熟练掌握基尔霍夫电流定律和基尔霍夫电压定律;4、理解受控源的概念。 [实践与练习] 课后作业布置建议: 习题:1-1、1-2、1-3 、1-5、1-6、1-12、1-9、1-13、1-17 、1-30、1-31。 课程思政映射点:由电压、电流单位以物理学家伏特和安培名字命名,以及基尔霍夫21岁提出基尔霍夫定律,引导学生敬畏科学家、崇尚科学精神。 第二章等效变换分析法( 5学时) [知识点]:单口网络等效条件;实际电源的两种电路模型及其等效变换;无源和含源单口网络的等效化简;T~π等效变换。 [重点]:单口网络的等效条件,单口网络的等效化简方法;

电路图常用英文缩写大全

UREGISTERED未注册 SW开关 UI用户接口BSIC专用集成电路 BAND频段 BAND-SEL频段选择/切换 BUFFER缓冲放大器 BUS通信总线 DET检测 Circuit Diagram电路原理图 Blick Diagram方框图 PCB板图 LayoutPCB元件分布图 Receiver收信机 Transmitter发信机 Interface界面,电子电路基础知识2,接口 Power Supply电源系统 射频电路 A模拟信号 AFC自动频率控制 AGC自动增益控制 APC/AOC自动功率控制 AGND模拟地 ANT天线 ANTSW天线切换开关 AM调幅 BPF带通滤波器 CP-TX RXVCO控制输出接收锁相电平 CP-TX TXVCO控制输出发射锁相电平 DUPLEX / DIPLEX双工器 Duplex Sapatation双工间隔 DCS-CS发射机控制信号:控制TXVCO与I/Q调制器FILFTER滤波器 Gen Out信号发生器 GAIN增益 GSM-PINDIODE功率放大器输出匹配电路切换控制信号GSM-SEL频段切换控制信号之一 G-TX-VCO900MHZ发射VCO切换控制 IF中频 IFLO中频本振 LO本振 LOCK锁定 MODFreq调制频率 Mixed Second第二混频信号

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计量经济学实验报告英文版

Econometrics report Class number: No number: Eglish name: Chinese name:

Contents Background and Data Analysis 2-5 and model T-test 6-8 F-test 8-10 Summary,and,suggestion 11

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