By Tustin Xu 2010/4/16
Outline drawing- Front side
Outline drawing- Top side
Outline drawing- Right side
Facility hookup layout
Support feet layout
Facility requirements
Facility requirements
Facility requirements
Resistivity Uniformity
Uniformity Formula
Furnace overview
loading?zone center?zone
TS
8 125
4 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5
bottom?tube Top?tube
Nr?of?tubes 125cm?flatzone 8?inch?compatible Tempress?Systems
Scavenger?box Scavenger?area source?zone
Furnace overview
touch?screens loadstation furnace gas?cabinet power?cabinet
1 2 3 4 5 1 2 3 4 5 1 2 3 4 5 1 2 3 4 5
DPC DPC DPC DPC DTC DTC DTC DTC
laminar flow?filters
SCL?head?assembly paddle
temperature controllers
process controllers
Automation overview
Stocker?shelves
Automation screen
Head?and fi fingers
Conveyor t ki system tracking t shuttle pusher h Scara?robot
Temperature control
Spike?TC Paddle?TC
Compensation?wire <50oC?Electrically?compatible?to?Pt cheaper
Type ype?R?=?100%Pt/13%Rh % / 3% ‐Pt Signal?0.111mV?=?20.0°C Signal?14.629mV?=?1300.0°C
T Temperature t measurement t
cjb jb
cjb jb
Cold?junction?board =?transfer?point?Pt‐Cu 3‐channel?2x
1?2?3?4?5?6?7?8?9?10?11
DTC
Cold?junction?board =?transfer?point?Pt‐Cu 3‐channel?2x
Temperature control
Spike?TC Paddle?TC Zero?voltage?crossing O ti ll i Optically isolated l t d Silicon Controller Rectifiers Rated?130A 3‐channel Normally?100A SCR Signal?max?98%?ON Interc. 20msec?internal?check?on?thyristor
Brd?2x
Thyristor y Silicon Controller Rectifier
Power?output
Main?transformer
Example:?50%?power
Overheating protection
1?2?3?4?5?6?7?8?9?10?11
DTC
DTC
Gas control
Sequence?and?events?=?process?recipe MFC:?Range?from?0‐2000sccm?or?0‐30SLM Analog?In/Out:0‐5V Total?8?output?number?1‐8 Description?AO1,?AO2 Certification RANGE Digital?output:?Valve?normally?closed?or?open Digital?input :?Sensor?for?door,?gas?pressure PS Shutoff?valve?
Analog g?output p
CDA?Pressure?sensor PS
Analog?I/O AI AO
MFC
Digital g output p
CDA
Pilot?Valve: 24V?control?by Digital g I/O / board
DO DI
DPC
1?2?3?4?5?6?7?8?9?10?11
DPC
Gas control
Purge?gas?line?with?N2 Bubblers?used?for?liquids POCl3 BBr3 TransLC Pickup?with?carrier?gas?(N2 only!!) New?container?open?Outlet?valve?first! Old?container?close?inlet?valve?first! R l Release overpressure?f from?outlet. l CDA
PT
Manual bypass
1/4”?inlet
3/8”?Outlet
Temp?probe
P Process tube b