Date Login No Type S/N Process running hours quotation 2004-1-16SA-03-12090ADS501995437SABPSG8139222,245 2004-1-16SA-03-12127ADP81965763Transfer37320136,381 2004-1-16SA-03-12074ADS5012010287CVD tungsten23431197,890 2004-1-16SA-03-12019ADS501973598HPY-Wsix5688243,456 2004-1-16SA-03-12033ADS5012103984SABPSG7942213,318 2004-1-19SA-03-12035ADS801974988CVD-Nitride teos17100279,700 2004-1-19SA-03-12013ADS501966043SABPSG6586194,138 2004-1-19SA-03-12022ADP81995412sputter33309141,945 2004-1-19SA-03-12043ADS801973603CVD-Nitride teos5643253,598 2004-1-19SA-03-12034ADS501975034SABPSG5616168,262 2004-1-19SA-03-12088ADS501974332SABPSG11224296,960 2004-1-19SA-03-12076ADS501966044DCS-poly12746179,195 2004-1-19SA-03-12136ADS501965926IMD-PECVD Nitride12392202,644 2004-1-19SA-03-12073ADS501995438WCV-tungsten10547222,116 2004-1-21SA-03-12147ADS501994555SABPSG10404230,396 2004-1-21SA-03-12148ADS501965922SABPSG6933237,560 2004-1-21SA-03-12129ADS501975553HPY-Poly6875388,171 2004-1-21SA-03-12128ADP812010780sputter11983126,258 2004-1-21SA-03-12126ADP812001559sputter30954113,643 2004-2-6SA-04-01047ADS8012002169CVD-Nitride teos8900315,725 2004-2-6SA-04-01059ADP812001555sputter31948168,638 2004-2-16SA-04-01082ADS501975552SABPSG23119355,841 2004-2-17SA-04-02004ADS501975032WCV-tungsten25088290,439 2004-2-22SA-04-02006ADP81973833sputter14760171,568 2004-2-22SA-04-02005ADS501965882WCV-tungsten6839210,846 2004-2-25SA-04-02041ADS5012002484DCS-poly7109235,610 2004-2-25SA-04-02032ADS501994522DCS-poly18540217,545 2004-2-25SA-04-02040ADS501965923WCV-tungsten4633226,732 2004-2-26SA-04-02067ADS501965884SABPSG6554206,160 2004-2-26SA-04-02042ADS501994518DCS-poly7293185,858 2004-2-27SA-04-02065ADS501975555HDP-SiO26871248,093 2004-3-2SA-04-02082ADS501983335IMD-PECVD Nitride32120270,560 2004-3-5SA-04-02080ADS501957384IMD-PECVD Nitride7808178,013 2004-3-9SA-04-02081ADS501995235IMD-PECVD Nitride5938191,515 2004-3-9SA-04-02110ADP81983503L/L49285145,312 2004-3-9SA-04-02111ADP81983378Transfer50318132,675 2004-3-16SA-04-03015ADS801994489CVD-Nitride teos6026256,359 2004-3-16SA-04-02112ADP81965760L/L30060179,723 2004-3-16SA-04-03025ADP81994457Transfer12437110,333 2004-3-16SA-04-02109ADP81994464Pre-clean38334140,100 2004-3-24SA-04-02058ADS501966036SABPSG5052261,753 2004-3-24SA-04-03017ADP812010782L/L25819112,653 2004-3-25SA-04-03016ADP81966113L/L25172163,726
2004-3-29SA-04-03042ADS801974336CVD-Nitride teos9768261,085 2004-4-2SA-04-03084ADS501963195SABPSG8975277,633 2004-4-2SA-04-03085ADS501973074HDP-SiO26482251,801 2004-4-12SA-04-03101ADS5012003085HPY-Poly18353325,153 2004-4-12SA-04-03099ADS501965883HPY-Poly5996364,699 2004-4-12SA-04-03100ADS5012009960WCV-tungsten24885156,767 2004-4-16SA-04-03136ADS501966038DCS-poly18574277,216 2004-4-16SA-04-03122ADS5012002489SABPSG10278222,002 2004-4-16SA-04-03156ADS801974335CVD-Nitride teos6896279,104 2004-4-19SA-04-04019ADS501984458IMD-PECVD Nitride14189242,701 2004-4-19SA-04-04016ADS501963122IMD-PECVD Nitride5437173,293 2004-4-19SA-04-03159ADP81995965Transfer37273136,256 2004-4-29SA-04-04070ADS8012002170HDP-SiO25851289,484 2004-4-29SA-04-04017ADS501995439SABPSG10322186,877 2004-4-29SA-04-04073ADS501965921IMD-PECVD Nitride12085205,396 2004-5-4SA-04-04081ADS501965880SABPSG14373275,384 2004-5-4SA-04-04080ADS501983881SABPSG5375238,381 2004-5-14SA-04-04118ADS501966039SABPSG14016257,001 2004-5-14SA-04-04079ADP812001556Transfer16950133,216 2004-5-19SA-04-04072ADS501973599SABPSG2956172,607 2004-5-19SA-04-04130ADS5012001143WCV-tungsten8518203,199 2004-5-19SA-04-04129ADS501995436WCV-tungsten21674175,359 2004-6-1SA-04-05060ADP81965888CVD-Tin22950202,966 2004-6-1SA-04-05008ADS801994488CVD-Nitride teos5304361,136 2004-6-1SA-04-05057ADS5012009959WCV-tungsten26114184,361 2004-6-7SA-04-05092ADP81994459CVD-Tin29584143,266 2004-6-7SA-04-05059ADP81995213CVD-Tin15312125,744 2004-6-7SA-04-05093ADP812002486DCS-Wsix34456154,619 2004-6-7SA-04-05058ADS5012002482DCS-Wsix20133249,122 2004-6-18SA-04-05106ADS801996611CVD-Nitride teos8681405,478 2004-6-18SA-04-05116ADS501983336HPY-Wsix31022309,871 2004-6-18SA-04-05107ADS501983334IMD-PECVD Nitride8662206,388 2004-6-18SA-04-06008ADS501995234SABPSG9536272,948 2004-6-18SA-04-06010ADS501983512SABPSG7275222,068 2004-7-7SA-04-06038ADS501983289SABPSG6429252,159 2004-7-7SA-04-06029ADS501966045clan7566259,360 2004-7-7SA-04-06045ADS501995237DCS-Wsix21267349,193 2004-7-27SA-04-07018ADS501965879IMD-PECVD Nitride13321304,819 2004-7-29SA-04-06120ADP81983379L/L53508245,528 2004-7-29SA-04-06-102ADS501994523DCS-poly18578330,509 2004-7-29SA-04-06-066ADS501996167SABPSG4915327,414 2004-7-29SA-04-06121ADP81983380L/L53592198,085 2004-7-29SA-04-07019ADP812103444Transfer19153135,942 2004-7-29SA-04-07-017ADS5012003084DCS-Wsix6933242,585
2004-8-18SA-04-07-117ADS501965881HDP-SiO27029282,374 2004-8-18SA-04-07-076ADS501983292HPY-Poly6903281,926 2004-8-18SA-04-07-016ADS501966037SABPSG4402247,893 2004-8-18SA-04-07-092ADP81975021sputter4402180,203 2004-9-9SA-04-08-039ADS501983291IMD-CVD15696627,023 2004-9-9SA-04-08-058ADS8012010786CVD-Nitride teos5933372,179 2004-9-9SA-04-08-045ADS801974987CVD-Nitride teos4662355,083 2004-9-9SA-04-08-046ADS801965777CVD-Nitride teos10775399,566 2004-9-9SA-04-08-019ADS8012103446CVD nitride oxide 8849342,721 2004-9-9SA-04-08-021ADP81973615DCS-Wsix28419158,006 2004-9-23SA-04-08-112ADS501994520DCS-Wsix7650223,884 2004-9-23SA-04-09-014ADS501994198IMD-CVD6853303,797 2004-9-23SA-04-08-115ADS501958790HPY-Wsix30150336,114 2004-9-23SA-04-08-092ADS5012002488SABPSG5531299,009 2004-9-23SA-04-08-110ADS501984457HPY-Poly32743345,577 2004-9-23SA-04-08-093ADS501973598SABPSG5549300,527 2004-9-23SA-04-08-094ADS5012107288IMD-PECVD Nitride5839267,915 2004-10-10SA-04-09-073ADS501975834DCS-poly32441267,319 2004-10-10SA-04-09-091ADS501966041SABPSG6020250,615 2004-10-10SA-04-09-047ADS8012010785CVD nitride oxide4520302,012 2004-10-10SA-04-09-076ADS5012002490DCS-Wsix9129233,442 2004-10-16SA-04-09-075ADS501994470DCS-Wsix29175342,197 2004-10-16SA-04-09-121ADS501983333SABPSG4476371,585 2004-10-16SA-04-09-051ADS5012002481LOK-HDPECVD5238265,382 2004-10-16SA-04-09-055ADP81965920CVD nitride oxide 62012250,070 2004-10-16SA-04-09-089ADP81983880CVD-Tin31776115,382 2004-10-27SA-04-10-053ADS501994031WCV-tungsten7087207,988 2004-10-28SA-04-09-120ADS501995438WCV-tungsten5411302,507 2004-10-28SA-04-09-143ADS5012010286WCV-tungsten29556297,580 2004-10-31SA-04-10-052ADS501995435WCV-tungsten10444348,050 2004-10-31SA-04-09142ADS501965923WCV-tungsten5082174,312 2004-11-13SA-04-10029ADS501975032IMD-PECVD Nitride5328161,265 2004-11-21SA-04-10027ADS501957384SABPSG4901153,273 2004-11-21SA-04-10028ADS501996170DCS-poly25402254,134 2004-11-27SA-04-10154ADS501983335WCV-Tungsten4805292,749 2004-11-21SA-04-10123ADS801974988CVD-Nitride teos4330267,573 2004-12-21SA-04-11018ADS5012010289IMD-PECVD Nitride10436168,072 2004-12-21SA-04-10155ADP81983377SAT-L/L18197160,991 2004-12-21SA-04-10152ADS501974333DCS-Wsix12136255,432 2004-12-21SA-04-11046ADS801983519CVD-Nitride teos5676275,061 2004-12-21SA-04-11085ADS501984458SABPSG5107173,639 2004-12-21SA-04-11079ADS8012010785HDP-SiO21131280,577 2004-12-21SA-04-11064ADS501957193HDP-SiO216169165,082 2004-12-21SA-04-11078ADS501966036SABPSG5147178,255
2004-12-28SA-04-11083ADS501965924SABPSG8100191,716 2004-12-28SA-04-11084ADS501996168WCV-tungsten7874211,827 2004-12-29SA-04-11080ADS501994469IMD-PECVD nitride7874239,491
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